Acceleration sensing device
First Claim
Patent Images
1. An acceleration sensing device, comprising:
- a rotational speed sensor for detecting a rotational speed, the rotational speed sensor being mounted on a substrate, the rotational speed sensor including at least one oscillating structure, the at least one oscillating structure including a first seismic mass, the first seismic mass being plate shaped and being capable of oscillating around an axis perpendicular to a first plane containing the first seismic mass; and
an acceleration sensor for detecting a linear acceleration, the acceleration sensor including at least one second seismic mass suspended on flexible elements, the at least one second seismic mass being plate shaped,wherein the first seismic mass and the at least one second seismic mass are independently deflectable,wherein, in response to a rotation, the first seismic mass is deflected in a direction substantially parallel to the axis perpendicular to the first plane, andwherein, in response to the linear acceleration, the at least one second seismic mass is deflected within a second plane containing the at least one second seismic mass.
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Abstract
An acceleration sensing device includes a rotational speed sensor which is mounted on a substrate and detects rotational speed, at least one oscillating structure with a deflectable seismic mass, and an acceleration sensor that detects linear acceleration and has at least one additional seismic mass which is suspended on flexible elements so that it can be deflected. The seismic masses of the two sensors are deflected independently of one another.
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Citations
18 Claims
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1. An acceleration sensing device, comprising:
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a rotational speed sensor for detecting a rotational speed, the rotational speed sensor being mounted on a substrate, the rotational speed sensor including at least one oscillating structure, the at least one oscillating structure including a first seismic mass, the first seismic mass being plate shaped and being capable of oscillating around an axis perpendicular to a first plane containing the first seismic mass; and an acceleration sensor for detecting a linear acceleration, the acceleration sensor including at least one second seismic mass suspended on flexible elements, the at least one second seismic mass being plate shaped, wherein the first seismic mass and the at least one second seismic mass are independently deflectable, wherein, in response to a rotation, the first seismic mass is deflected in a direction substantially parallel to the axis perpendicular to the first plane, and wherein, in response to the linear acceleration, the at least one second seismic mass is deflected within a second plane containing the at least one second seismic mass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18)
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Specification