Article comprising anisotropic Co-Fe-Cr-N soft magnetic thin films
First Claim
1. An article, comprising:
- a non-magnetic substrate; and
an anisotropic, magnetically soft film supported by said substrate, said film including an alloy of cobalt-iron-chromium-nitrogen (Co--Fe--Cr--N) and having a saturation magnetization (4π
Ms) of at least approximately 8 kilogauss (kG), an anisotropy field (Hk) within the range from approximately 15 to 300 oersteds (Oe) and a magnetic hysteresis (M-H) loop squareness ratio (remanent magnetization, Mr, to saturation magnetization, Ms) of at least approximately 0.90, wherein said alloy contains, by atomic percentage, at least approximately 15% cobalt (Co), and wherein said article has been heat treated at a temperature of no more than approximately 150°
Celsius.
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Accused Products
Abstract
The invention is embodied in an anisotropic, soft magnetic thin film article comprising a cobalt-iron-chromium-nitrogen (Co--Fe--Cr--N) alloy. The thin film is formed such that the alloy has a relatively high saturation magnetization (4πMs), e.g., greater than approximately 8 kilogauss (kG), a relatively low coercivity (Hc), e.g., less than approximately 2.0 oersteds (Oe), a relatively high squareness ratio (Mr /Ms), e.g., greater than approximately 0.90, and a relatively high anisotropy field (Hk), e.g., greater than approximately 20 Oe, in an as-deposited condition or, alternatively, with a relatively low temperature treatment, e.g., below approximately 300° Celsius. The inventive films are suitable for use in electromagnetic devices, e.g., in microtransformer cores, inductor cores and in magnetic read-write heads.
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Citations
21 Claims
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1. An article, comprising:
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a non-magnetic substrate; and an anisotropic, magnetically soft film supported by said substrate, said film including an alloy of cobalt-iron-chromium-nitrogen (Co--Fe--Cr--N) and having a saturation magnetization (4π
Ms) of at least approximately 8 kilogauss (kG), an anisotropy field (Hk) within the range from approximately 15 to 300 oersteds (Oe) and a magnetic hysteresis (M-H) loop squareness ratio (remanent magnetization, Mr, to saturation magnetization, Ms) of at least approximately 0.90, wherein said alloy contains, by atomic percentage, at least approximately 15% cobalt (Co), and wherein said article has been heat treated at a temperature of no more than approximately 150°
Celsius. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method for making a magnetically soft thin film article, said method comprising the steps of:
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providing a non-magnetic substrate; and depositing at least one anisotropic, magnetically soft thin film in such a way that said non-magnetic substrate supports said film, said film including an alloy of cobalt-iron-chromium-nitrogen (Co--Fe--Cr--N) and having a saturation magnetization (4π
Ms) of at least approximately 8 kilogauss (kG), an anisotropy field (Hk) within the range from approximately 15 to 300 oersteds (Oe) and a magnetic hysteresis (M-H) loop squareness ratio (remanent magnetization, Mr, to saturation magnetization, Ms) of at least approximately 0.90, wherein said alloy contains, by atomic percentage, at least approximately 15% cobalt (Co), and wherein said article has been heat treated at a temperature of no more than approximately 150°
Celsius. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification