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Electrostatic microactuator and method for use thereof

  • US 5,998,906 A
  • Filed: 08/17/1998
  • Issued: 12/07/1999
  • Est. Priority Date: 01/13/1998
  • Status: Expired due to Term
First Claim
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1. An electrostatic microactuator comprising a substrate, at least one comb drive assembly having first and second comb drive members, each of the first and second comb drive members being provided with comb drive fingers, the first comb drive member being mounted on the substrate, first and second spaced-apart, beam-like spring members, the at least one comb drive assembly being disposed between the first and second beam-like spring members, the second comb drive member overlying the substrate, each of the first and second beam-like members having a first end portion secured to the substrate and a second end portion secured to the second comb drive member for suspending the second comb drive member over the substrate, the second comb drive member being movable between a first position in which the comb drive fingers of the first and second comb drive members are spaced apart and a second position in which the comb drive fingers of the first and second comb drive members are interdigitated.

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