Vibrator, vibratory gyroscope, and vibration adjusting method

• US 5,998,911 A
• Filed: 11/17/1997
• Issued: 12/07/1999
• Est. Priority Date: 11/26/1996
• Status: Expired due to Term

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: NGK Insulators Limited
• Inventors: Soma, Takao, Kikuchi, Takayuki, Osugi, Yukihisa, Gouji, Shosaku
• Primary Examiner(s): BUDD, MARK OSBORNE
• Application Number:
  US08/971,686
• Time in Patent Office: 750 Days
• Field of Search: 310/316, 310/321, 310/370, 310/366-368, 310/357-359, 310/330-332, 73/505
• US Class Current: 310/367
• CPC Class Codes: G01C 19/5607 using vibrating tuning forks double-ended tuning forks using planar vibrating masses suspended at opposite ends G01C19/5719

Abstract

A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Claims

1. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane substantially perpendicular to said axis of rotation, (ii) a base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one substantially straight bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part, wherein said bending vibration piece terminates at said second end thereof;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detecting means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detecting means is positioned on said bending vibration piece.

2. The vibratory gyroscope of claim 1, wherein said first end of said bending vibration piece is attached to said base part at said second end thereof.

3. The vibratory gyroscope of claim 2, wherein said bending vibration piece comprises a pair of pieces, the first end of each piece being attached to said base part at said second end thereof so that said bending vibration pieces are symmetrical about a longitudinal axis of said base part.

4. The vibratory gyroscope of claim 2, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

5. The vibratory gyroscope of claim 3, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

6. The vibratory gyroscope of claim 1, further comprising at least one pair of resonant arms arranged within said plane and extending from said fixing part, wherein said resonant arms resonate with vibration of said base part.

7. The vibratory gyroscope of claim 6, wherein said resonant arms extend substantially parallel to said base part.

8. The vibratory gyroscope of claim 7, wherein portions of said fixing part positioned between said base part and said resonant arms extend along said base part and said resonant arms a predetermined distance beyond a remaining portion of said fixing part.

9. The vibratory gyroscope of claim 8, wherein said predetermined distance ranges from 1.0 mm to 6.0 mm.

10. The vibratory gyroscope of claim 1, wherein said bending vibration piece has a through hole passing therethrough in a direction substantially perpendicular to said plane.

11. The vibratory gyroscope of claim 6, wherein each of said resonant arms has a through hole passing therethrough in a direction substantially perpendicular to said plane.

12. The vibratory gyroscope of claim 1, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

13. The vibratory gyroscope of claim 2, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

14. The vibratory gyroscope of claim 3, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

15. The vibratory gyroscope of claim 12, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

16. The vibratory gyroscope of claim 13, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

17. The vibratory gyroscope of claim 14, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

18. The vibratory gyroscope of claim 1, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of 45°

to 135°

.

19. The vibratory gyroscope of claim 1, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of about 90°

.

20. The vibratory gyroscope of claim 1, wherein said excitation means comprises at least one driving electrode positioned on said base part.

21. The vibratory gyroscope of claim 20, further comprising detecting electrodes positioned on said bending vibration piece.

22. The vibratory gyroscope of claim 1, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

23. The vibratory gyroscope of claim 22, further comprising detecting electrodes positioned on said base part.

24. The vibratory gyroscope of claim 12, wherein said excitation means comprises at least one driving electrode positioned on said resonant arm.

25. The vibratory gyroscope of claim 24, further comprising detecting electrodes positioned on said bending vibration piece.

26. The vibratory gyroscope of claim 12, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

27. The vibratory gyroscope of claim 26, further comprising detecting electrodes positioned on said resonant arm.

28. The vibratory gyroscope of claim 6, wherein said excitation means comprises driving electrodes positioned on said resonant arms.

29. The vibratory gyroscope of claim 28, further comprising detecting electrodes positioned on said bending vibration piece.

30. The vibratory gyroscope of claim 6, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

31. The vibratory gyroscope of claim 30, further comprising detecting electrodes positioned on said resonant arms.

32. The vibratory gyroscope of claim 1, wherein said base part and said bending vibration piece are formed from a piezoelectric single crystal selected from the group consisting of quartz, LiTaO₃, LiNbO₃, and Li(Nb,Ta)O₃.

152. The vibratory gyroscope of claim 6, wherein said resonant arms extend in directions that intersect, within said fixing part, a longitudinal extension of said base part.

33. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane substantially perpendicular to said axis of rotation, (ii) a base part arranged in said plane and having a first end attached to said fixing part and a free second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one substantially straight bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part at an angle of 45°

to 135°

, wherein said bending vibration piece terminates at said second end thereof, and said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detecting means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detecting means is positioned on said bending vibration piece.

34. The vibratory gyroscope of claim 33, wherein said first end of said bending vibration piece is attached to said base part at said second end thereof.

35. The vibratory gyroscope of claim 34, wherein said bending vibration piece comprises a pair of pieces, the first end of each piece being attached to said base part at said second end thereof so that said bending vibration pieces are symmetrical about a longitudinal axis of said base part.

36. The vibratory gyroscope of claim 34, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

37. The vibratory gyroscope of claim 35, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

38. The vibratory gyroscope of claim 33, further comprising at least one pair of resonant arms arranged within said plane and extending from said fixing part, wherein said resonant arms resonate with vibration of said base part.

39. The vibratory gyroscope of claim 38, wherein said resonant arms extend substantially parallel to said base part.

40. The vibratory gyroscope of claim 39, wherein portions of said fixing part positioned between said base part and said resonant arms extend along said base part and said resonant arms a predetermined distance beyond a remaining portion of said fixing part.

41. The vibratory gyroscope of claim 40, wherein said predetermined distance ranges from 1.0 mm to 6.0 mm.

42. The vibratory gyroscope of claim 33, wherein said bending vibration piece has a through hole passing therethrough in a direction substantially perpendicular to said plane.

43. The vibratory gyroscope of claim 38, wherein each of said resonant arms has a through hole passing therethrough in a direction substantially perpendicular to said plane.

44. The vibratory gyroscope of claim 33, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

45. The vibratory gyroscope of claim 34, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

46. The vibratory gyroscope of claim 36, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

47. The vibratory gyroscope of claim 44, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

48. The vibratory gyroscope of claim 45, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

49. The vibratory gyroscope of claim 46, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

50. The vibratory gyroscope of claim 33, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of about 90°

.

51. The vibratory gyroscope of claim 33, wherein said excitation means comprises at least one driving electrode positioned on said base part.

52. The vibratory gyroscope of claim 51, further comprising detecting electrodes positioned on said bending vibration piece.

53. The vibratory gyroscope of claim 33, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

54. The vibratory gyroscope of claim 53, further comprising detecting electrodes positioned on said base part.

55. The vibratory gyroscope of claim 44, wherein said excitation means comprises at least one driving electrode positioned on said resonant arm.

56. The vibratory gyroscope of claim 55, further comprising detecting electrodes positioned on said bending vibration piece.

57. The vibratory gyroscope of claim 44, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

58. The vibratory gyroscope of claim 57, further comprising detecting electrodes positioned on said resonant arm.

59. The vibratory gyroscope of claim 38, wherein said excitation means comprises driving electrodes positioned on said resonant arms.

60. The vibratory gyroscope of claim 59, further comprising detecting electrodes positioned on said bending vibration piece.

61. The vibratory gyroscope of claim 38, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

62. The vibratory gyroscope of claim 61, further comprising detecting electrodes positioned on said resonant arms.

63. The vibratory gyroscope of claim 33, wherein said base part and said bending vibration piece are formed from a piezoelectric single crystal selected from the group consisting of quartz, LiTaO₃, LiNbO₃, and Li(Nb,Ta)O₃.

153. The vibratory gyroscope of claim 38, wherein said resonant arms extend in directions that intersect, within said fixing part, a longitudinal extension of said base part.

64. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane substantially perpendicular to said axis of rotation, (ii) a base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one substantially straight bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a free second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detecting means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detecting means is positioned on said bending vibration piece.

65. The vibratory gyroscope of claim 64, wherein said first end of said bending vibration piece is attached to said base part at said second end thereof.

66. The vibratory gyroscope of claim 65, wherein said bending vibration piece comprises a pair of pieces, the first end of each piece being attached to said base part at said second end thereof so that said bending vibration pieces are symmetrical about a longitudinal axis of said base part.

67. The vibratory gyroscope of claim 65, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

68. The vibratory gyroscope of claim 66, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

69. The vibratory gyroscope of claim 64, further comprising at least one pair of resonant arms arranged within said plane and extending from said fixing part, wherein said resonant arms resonate with vibration of said base part.

70. The vibratory gyroscope of claim 69, wherein said resonant arms extend substantially parallel to said base part.

71. The vibratory gyroscope of claim 70, wherein portions of said fixing part positioned between said base part and said resonant arms extend along said base part and said resonant arms a predetermined distance beyond a remaining portion of said fixing part.

72. The vibratory gyroscope of claim 71, wherein said predetermined distance ranges from 1.0 mm to 6.0 mm.

73. The vibratory gyroscope of claim 64, wherein said bending vibration piece has a through hole passing therethrough in a direction substantially perpendicular to said plane.

74. The vibratory gyroscope of claim 69, wherein each of said resonant arms has a through hole passing therethrough in a direction substantially perpendicular to said plane.

75. The vibratory gyroscope of claim 64, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

76. The vibratory gyroscope of claim 65, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

77. The vibratory gyroscope of claim 66, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

78. The vibratory gyroscope of claim 75, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

79. The vibratory gyroscope of claim 76, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

80. The vibratory gyroscope of claim 77, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

81. The vibratory gyroscope of claim 64, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of 45°

to 135°

.

82. The vibratory gyroscope of claim 64, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of about 90°

.

83. The vibratory gyroscope of claim 64, wherein said excitation means comprises at least one driving electrode positioned on said base part.

84. The vibratory gyroscope of claim 83, further comprising detecting electrodes positioned on said bending vibration piece.

85. The vibratory gyroscope of claim 64, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

86. The vibratory gyroscope of claim 85, further comprising detecting electrodes positioned on said base part.

87. The vibratory gyroscope of claim 75, wherein said excitation means comprises at least one driving electrode positioned on said resonant arm.

88. The vibratory gyroscope of claim 87, further comprising detecting electrodes positioned on said bending vibration piece.

89. The vibratory gyroscope of claim 75, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

90. The vibratory gyroscope of claim 89, further comprising detecting electrodes positioned on said resonant arm.

91. The vibratory gyroscope of claim 69, wherein said excitation means comprises driving electrodes positioned on said resonant arms.

92. The vibratory gyroscope of claim 91, further comprising detecting electrodes positioned on said bending vibration piece.

93. The vibratory gyroscope of claim 69, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

94. The vibratory gyroscope of claim 93, further comprising detecting electrodes positioned on said resonant arms.

95. The vibratory gyroscope of claim 64, wherein said base part and said bending vibration piece are formed from a piezoelectric single crystal selected from the group consisting of quartz, LiTaO₃, LiNbO₃, and Li(Nb,Ta)O₃.

154. The vibratory gyroscope of claim 69, wherein said resonant arms extend in directions that intersect, within said fixing part, a longitudinal extension of said base part.

96. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane substantially perpendicular to said axis of rotation, (ii) a base part arranged in said plane and having a first end attached to said fixing part and a free second end opposed thereto in the longitudinal direction of said base part, and (iii) at least one substantially straight bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a free second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part at an angle of 45°

to 135°

, wherein said base part and said bending vibration piece both vibrate in a bending vibration mode substantially within said plane using said first ends thereof, respectively, as their fulcrum;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detecting means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detecting means is positioned on said bending vibration piece.

97. The vibratory gyroscope of claim 96, wherein said first end of said bending vibration piece is attached to said base part at said second end thereof.

98. The vibratory gyroscope of claim 97, wherein said bending vibration piece comprises a pair of pieces, the first end of each piece being attached to said base part at said second end thereof so that said bending vibration pieces are symmetrical about a longitudinal axis of said base part.

99. The vibratory gyroscope of claim 97, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

100. The vibratory gyroscope of claim 99, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

101. The vibratory gyroscope of claim 96, further comprising at least one pair of resonant arms arranged within said plane and extending from said fixing part, wherein said resonant arms resonate with vibration of said base part.

102. The vibratory gyroscope of claim 101, wherein said resonant arms extend substantially parallel to said base part.

103. The vibratory gyroscope of claim 102, wherein portions of said fixing part positioned between said base part and said resonant arms extend along said base part and said resonant arms a predetermined distance beyond a remaining portion of said fixing part.

104. The vibratory gyroscope of claim 103, wherein said predetermined distance ranges from 1.0 mm to 6.0 mm.

105. The vibratory gyroscope of claim 96, wherein said bending vibration piece has a through hole passing therethrough in a direction substantially perpendicular to said plane.

106. The vibratory gyroscope of claim 101, wherein each of said resonant arms has a through hole passing therethrough in a direction substantially perpendicular to said plane.

107. The vibratory gyroscope of claim 96, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

108. The vibratory gyroscope of claim 97, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

109. The vibratory gyroscope of claim 98, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

110. The vibratory gyroscope of claim 107, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

111. The vibratory gyroscope of claim 108, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

112. The vibratory gyroscope of claim 109, further comprising a pair of resonant arms arranged in said plane and extending in said first direction.

113. The vibratory gyroscope of claim 96, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of about 90°

.

114. The vibratory gyroscope of claim 96, wherein said excitation means comprises at least one driving electrode positioned on said base part.

115. The vibratory gyroscope of claim 114, further comprising detecting electrodes positioned on said bending vibration piece.

116. The vibratory gyroscope of claim 96, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

117. The vibratory gyroscope of claim 116, further comprising detecting electrodes positioned on said base part.

118. The vibratory gyroscope of claim 107, wherein said excitation means comprises at least one driving electrode positioned on said resonant arm.

119. The vibratory gyroscope of claim 118, further comprising detecting electrodes positioned on said bending vibration piece.

120. The vibratory gyroscope of claim 107, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

121. The vibratory gyroscope of claim 120, further comprising detecting electrodes positioned on said resonant arm.

122. The vibratory gyroscope of claim 101, wherein said excitation means comprises driving electrodes positioned on said resonant arms.

123. The vibratory gyroscope of claim 122, further comprising detecting electrodes positioned on said bending vibration piece.

124. The vibratory gyroscope of claim 101, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

125. The vibratory gyroscope of claim 124, further comprising detecting electrodes positioned on said resonant arms.

126. The vibratory gyroscope of claim 96, wherein said base part and said bending vibration piece are formed from a piezoelectric single crystal selected from the group consisting of quartz, LiTaO₃, LiNbO₃, and Li(Nb,Ta)O₃.

155. The vibratory gyroscope of claim 101, wherein said resonant arms extend in directions that intersect, within said fixing part, a longitudinal extension of said base part.

127. A vibratory gyroscope for detecting a turning angular rate about an axis of rotation, said vibratory gyroscope comprising:

a vibrator comprising (i) a fixing part arranged in a plane substantially perpendicular to said axis of rotation, (ii) a base part arranged in said plane and having a first end attached to said fixing part and a second end opposed thereto in the longitudinal direction of said base part, (iii) at least one substantially straight bending vibration piece arranged in said plane and having a first end attached to a portion of said base part other than said first end of said base part, and a second end distal from said first end in a longitudinal direction of said bending vibration piece, the longitudinal direction of said bending vibration piece intersecting the longitudinal direction of said base part, and (iv) at least one pair of resonant arms arranged within said plane and extending from said fixing part, said resonant arms resonating with vibration of said base part;

excitation means for exciting vibration of one of said base part and said bending vibration piece in said plane; and

detecting means for detecting bending vibration of said vibrator generated by Coriolis force within said vibrator as a result of said vibrator being rotated around said axis of rotation;

wherein one of said excitation means and said detecting means is positioned on said bending vibration piece.

128. The vibratory gyroscope of claim 127, wherein said resonant arms extend substantially parallel to said base part.

129. The vibratory gyroscope of claim 127, wherein said first end of said bending vibration piece is attached to said base part at said second end thereof.

130. The vibratory gyroscope of claim 129, wherein said bending vibration piece comprises a pair of pieces, the first end of each piece being attached to said base part at said second end thereof so that said bending vibration pieces are symmetrical about a longitudinal axis of said base part.

131. The vibratory gyroscope of claim 129, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

132. The vibratory gyroscope of claim 130, further comprising a projection piece arranged within said plane and extending from said second end of said base part in a direction substantially parallel with a longitudinal axis of said base part.

133. The vibratory gyroscope of claim 127, wherein said bending vibration piece has a through hole passing therethrough in a direction substantially perpendicular to said plane.

134. The vibratory gyroscope of claim 127, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

135. The vibratory gyroscope of claim 129, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

136. The vibratory gyroscope of claim 130, wherein said base part extends in a first direction away from said fixing part, and said vibrator further comprises a resonant arm arranged in said plane and extending in a second direction, diametrically opposed to said first direction, away from said fixing part.

137. The vibratory gyroscope of claim 129, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of 45°

to 135°

.

138. The vibratory gyroscope of claim 129, wherein the longitudinal direction of said bending vibration piece intersects the longitudinal direction of said base part at an angle of about 90°

.

139. The vibratory gyroscope of claim 129, wherein said excitation means comprises at least one driving electrode positioned on said base part.

140. The vibratory gyroscope of claim 139, further comprising detecting electrodes positioned on said bending vibration piece.

141. The vibratory gyroscope of claim 129, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

142. The vibratory gyroscope of claim 141, further comprising detecting electrodes positioned on said base part.

143. The vibratory gyroscope of claim 134, wherein said excitation means comprises at least one driving electrode positioned on said resonant arm.

144. The vibratory gyroscope of claim 143, further comprising detecting electrodes positioned on said bending vibration piece.

145. The vibratory gyroscope of claim 134, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

146. The vibratory gyroscope of claim 145, further comprising detecting electrodes positioned on said resonant arm.

147. The vibratory gyroscope of claim 133, wherein said excitation means comprises driving electrodes positioned on said resonant arms.

148. The vibratory gyroscope of claim 147, further comprising detecting electrodes positioned on said bending vibration piece.

149. The vibratory gyroscope of claim 133, wherein said excitation means comprises at least one driving electrode positioned on said bending vibration piece.

150. The vibratory gyroscope of claim 149, further comprising detecting electrodes positioned on said resonant arms.

151. The vibratory gyroscope of claim 127, wherein said base part and said bending vibration piece are formed from a piezoelectric single crystal selected from the group consisting of quartz, LiTaO₃, LiNbO₃, and Li(Nb,Ta)O₃.

156. The vibratory gyroscope of claim 127, wherein said resonant arms extend in directions that intersect, within said fixing part, a longitudinal extension of said base part.