Method of manufacturing spatial light modulator and electronic device employing it
First Claim
1. A spatial light modulator having a conductive silicon mirror substrate doped with impurities and an electrode substrate are bonded integrally wherein said silicon mirror substrate, comprises:
- a plurality of micromirrors arranged in one of a line and matrix and having reflective layers formed on one surface; and
a torsion bar coupling said micromirrors in one direction;
at least one said electrode substrate comprises;
a depression in a central region thereof;
a rim around the periphery thereof;
sets of electrodes formed within said depression in positions corresponding to said micromirrors and driving said micromirrors in an inclining manner by means of a coulomb force; and
pillars projecting from said depression in positions corresponding to an interval between two of said micromirrors adjacent in said one direction; and
whereinat least intermediate portions of said at least one torsion bar on said silicon mirror substrate are opposite said pillars of said electrode substrate, and said silicon mirror substrate and said electrode substrate are bonded.
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Accused Products
Abstract
A spatial light modulator is constructed from a conductive silicon mirror substrate and a glass electrode substrate including sodium, anode-bonded together. The silicon mirror substrate has micromirrors arranged in a matrix, torsion bars coupling these micromirrors in the x-direction, and a frame coupled to both ends of the torsion bars. A glass electrode substrate has a central depression, a rim around the periphery thereof, pillars projecting from within the depression, and electrodes and wiring driving micromirrors formed within the depression in an inclining manner. Both ends of the torsion bars are bonded to the rim of the frame portion, and intermediate portions of the torsion bars are bonded to the pillars. Both ends of the torsion bars are cut away from the frame portion during dicing.
216 Citations
15 Claims
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1. A spatial light modulator having a conductive silicon mirror substrate doped with impurities and an electrode substrate are bonded integrally wherein said silicon mirror substrate, comprises:
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a plurality of micromirrors arranged in one of a line and matrix and having reflective layers formed on one surface; and a torsion bar coupling said micromirrors in one direction; at least one said electrode substrate comprises; a depression in a central region thereof; a rim around the periphery thereof; sets of electrodes formed within said depression in positions corresponding to said micromirrors and driving said micromirrors in an inclining manner by means of a coulomb force; and pillars projecting from said depression in positions corresponding to an interval between two of said micromirrors adjacent in said one direction; and
whereinat least intermediate portions of said at least one torsion bar on said silicon mirror substrate are opposite said pillars of said electrode substrate, and said silicon mirror substrate and said electrode substrate are bonded. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A spatial light modulator, comprising:
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a glass substrate on which at least one conductive torsion bar coupling a plurality of conductive micromirrors in one direction is supported by pillars, and on which a conductive frame portion fixing both ends of said at least one torsion bar is formed; and a circuit substrate on which a plurality of pairs of electrodes opposite each of said micromirrors and a circuit element energizing said plurality of pairs of electrodes are formed; and wherein said frame portion of said glass substrate and said circuit substrate are bonded. - View Dependent Claims (13, 14, 15)
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Specification