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Method of manufacturing spatial light modulator and electronic device employing it

  • US 5,999,306 A
  • Filed: 11/26/1996
  • Issued: 12/07/1999
  • Est. Priority Date: 12/01/1995
  • Status: Expired due to Fees
First Claim
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1. A spatial light modulator having a conductive silicon mirror substrate doped with impurities and an electrode substrate are bonded integrally wherein said silicon mirror substrate, comprises:

  • a plurality of micromirrors arranged in one of a line and matrix and having reflective layers formed on one surface; and

    a torsion bar coupling said micromirrors in one direction;

    at least one said electrode substrate comprises;

    a depression in a central region thereof;

    a rim around the periphery thereof;

    sets of electrodes formed within said depression in positions corresponding to said micromirrors and driving said micromirrors in an inclining manner by means of a coulomb force; and

    pillars projecting from said depression in positions corresponding to an interval between two of said micromirrors adjacent in said one direction; and

    whereinat least intermediate portions of said at least one torsion bar on said silicon mirror substrate are opposite said pillars of said electrode substrate, and said silicon mirror substrate and said electrode substrate are bonded.

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