Reconfigurable compound diffraction grating

• US 5,999,319 A
• Filed: 04/29/1998
• Issued: 12/07/1999
• Est. Priority Date: 05/02/1997
• Status: Expired due to Fees

• Current Assignee: Inter Science GmbH
• Original Assignee: Inter Science GmbH
• Inventors: Castracane, James
• Primary Examiner(s): HENRY, JON W
• Application Number:
  US09/069,502
• Time in Patent Office: 587 Days
• Field of Search: 359/573, 359/572, 359/291, 359/295, 359/855, 359/224
• US Class Current: 359/573
• CPC Class Codes: G01J 3/02 Details
• CPC Class Codes: G01J 3/0235 using means for replacing an element by another, for replacing a filter or a grating
• CPC Class Codes: G01J 3/0256 Compact construction
• CPC Class Codes: G01J 3/1804 Plane gratings
• CPC Class Codes: G02B 5/1828 having means for producing variable diffraction controlling the direction of light by means of one or more diffracting elements G02B26/0808; acousto-optical elements G02F1/11, G02F1/33; electro- or magneto-optical diffraction G02F1/292, G02F1/2955
• CPC Class Codes: G02B 6/29314 by moving or modifying the diffractive element, e.g. deforming

Abstract

A reconfigurable compound diffraction grating is fabricated using microelectomechanical systems (MEMS) technology. The compound grating structure can be viewed as the superposition of two separately configured gratings. A common lower electrode is placed beneath selected beam elements, known as deflectable beams, to achieve the desired grating configuration (i.e. every other, every third, every fifth, etc.) of the beams in the primary grating. These deflectable beams alone comprise a secondary, lower resolution grating structure. The beam elements are linked to a common upper electrode. Voltage applied across the electrodes creates an electrostatic force that pulls the selected beams down toward the underlying electrode. Changing the vertical position of the selected beams with respect to the other stationary beams presents a different ruling spacing distribution to the incoming radiation. By changing this distribution, the diffracted power among individual diffraction orders of the wavelengths is altered. Controlling the diffracted signal in this way allows for specific diffraction passbands to be fixed on a particular detector or a particular area of a detector. Automated adjustments to the rulings can be very rapidly, which would significantly simplify and reduce the time necessary for complete spectral analysis previously achieved by mechanical movement of diffraction gratings.

Claims

1. An array of reconfigurable diffraction gratings comprising at least one diffraction grating, each said diffraction grating comprising:

a plurality of substantially parallel diffraction beams further comprising a plurality of stationary beams and a plurality of deflectable beams;

in an initial position, said stationary beams substantially residing within a stationary beam plane and said deflectable beams substantially residing within a deflectable beam plane slightly elevated with respect to said stationary beam plane; and

said deflectable beams occupying regular, periodic positions among said diffraction beams and separated from one another within each such period by at least one successive stationary beam;

a plurality of lower electrode extension beam means each associated with, substantially parallel to, and beneath, one of said deflectable beams; and

voltage differential means applying a selected voltage differential between each of said lower electrode extension beam means and its associated deflectable beam thereby moving said deflectable beams and hence said deflectable beam plane by a selected distance, from said initial position.

2. The grating array of claim 1, each said diffraction grating of said grating array further comprising:

a plurality of second lower electrode extension beam means each associated with, substantially parallel to, and beneath, one of said stationary beams; and

second voltage differential means applying a second selected voltage differential between each of said second lower electrode extension beam means and its associated stationary beam thereby moving said stationary beams and hence said stationary beam plane into said initial position and enabling selection of said initial position.

3. The grating array of claim 2, wherein for each said diffraction grating of said grating array:

the selected voltage differential applied between each lower electrode extension beam means and its associated deflectable beam, and the second selected voltage differential applied between each second lower electrode extension beam means and its associated stationary beam, is individually controllable;

whereby

the separation of said deflectable beams from one another within each said period by said at least one successive stationary beam may be actively, electronically reconfigured.

4. The grating array of claim 1, wherein said deflectable beams of at least one diffraction grating of said grating array are so-separated from one another by exactly one stationary beam.

5. The grating array of claim 1, wherein said deflectable beams of at least one diffraction grating of said grating array are so-separated from one another by exactly two stationary beams.

6. The grating array of claim 1, wherein said deflectable beams of at least one diffraction grating of said grating array are so-separated from one another by exactly four stationary beams.

7. The grating array of claim 1, said grating array comprising exactly one said diffraction grating.

8. The grating array of claim 1, said grating array comprising at least two of said diffraction gratings, wherein the periodic position separations of said deflectable beams of at least one of said diffraction gratings is different than the periodic position separations of said deflectable beams of at least another one of said diffraction gratings.

9. The grating array of claim 1, further comprising a reflective coating on at least an upper surface of said diffraction beams of at least one of said diffraction gratings and on at least an upper surface of a base of said at least one of said diffraction gratings.

10. The grating array of claim 1, wherein said grating is fabricated using microelectromechanical systems technology.

11. The grating array of claim 1 in combination with a spectrometer, wherein said grating is incorporated into said spectrometer and used for controlling grating spacing for said spectrometer.

12. The grating array of claim 1 in combination with a laser, wherein said grating is incorporated into said laser and used for tuning laser line sequencing of said laser.

13. The grating array of claim 1, wherein a ratio of spacing between each successive diffraction beam to a width of each said diffraction beam is substantially between 1/4 to 1 and 2 to 1.

14. A method for reconfiguring an array of reconfigurable diffraction gratings comprising at least one diffraction grating, comprising the steps of, for each said diffraction grating of said grating array:

applying a selected voltage differential between a plurality of substantially parallel deflectable beams and a plurality of lower electrode extension beam means each associated with, substantially parallel to, and beneath, one of said deflectable beams; and

moving thereby, said deflectable beams and hence a deflectable beam plane within which said deflectable beams reside, by a selected distance, from an initial position slightly elevated with respect to a plurality of stationary beams substantially residing within a stationary beam plane;

a plurality of substantially parallel diffraction beams comprising said plurality of deflectable beams and said plurality of stationary beams; and

said deflectable beams occupying regular, periodic positions among said diffraction beams and being separated from one another within each such period by at least one successive stationary beam.

15. The method of claim 14, comprising the further steps of, for each said diffraction grating of said grating array:

applying a second selected voltage differential between each of said stationary beams and a plurality of second lower electrode extension beam means each associated with, substantially parallel to, and beneath, one of said stationary beams; and

moving thereby, said stationary beams and hence said stationary beam plane into said initial position and enabling selection of said initial position.

16. The method of claim 15, comprising the further step of, for each said diffraction grating of said grating array:

individually controlling the selected voltage differential applied between each lower electrode extension beam means and its associated deflectable beam, and the second selected voltage differential applied between each second lower electrode extension beam means and its associated stationary beam;

whereby

the separation of said deflectable beams from one another within each said period by said at least one successive stationary beam may be actively, electronically reconfigured.

17. The method of claim 14, further comprising so-separating said deflectable beams of at least one grating of said grating array from one another by exactly one stationary beam.

18. The method of claim 14, further comprising so-separating said deflectable beams of at least one grating of said grating array from one another by exactly two stationary beams.

19. The method of claim 14, further comprising so-separating said deflectable beams of at least one grating of said grating array from one another by exactly four stationary beams.

20. The method of claim 14, said grating array comprising exactly one said diffraction grating.

21. The method of claim 14, said grating array comprising at least two of said diffraction gratings, the periodic position separations of said deflectable beams of at least one of said diffraction gratings being different than the periodic position separations of said deflectable beams of at least another one of said diffraction gratings.

22. The method of claim 14, further comprising providing a reflective coating on at least an upper surface of said diffraction beams of at least one grating of said grating array and on at least an upper surface of a base of said at least one grating of said grating array.

23. The method of claim 14, comprising the further step of fabricating said grating array using microelectromechanical systems technology.

24. The method of claim 14, comprising the further steps of incorporating said grating array into a spectrometer and using said grating array for controlling grating spacing for said spectrometer.

25. The method of claim 14, comprising the further steps of incorporating said grating array into a laser and using said grating array for tuning laser line sequencing of said laser.

26. The method of claim 14, comprising the further step of providing a ratio of spacing between each successive diffraction beam to a width of each said diffraction beam substantially between 1/4 to 1 and 2 to 1.