Nonvolatile semiconductor memory device and writing and erasing method of the same
First Claim
1. A nonvolatile semiconductor memory device comprising a plurality of memory elements formed in the vicinity of the surface of a substrate, a plurality of word lines for driving the memory elements, and a plurality of bit lines, each of said plurality of memory elements including:
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate,a source region in contact with the channel forming region in the vicinity of the surface of the substrate,a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate,a gate insulating film including a tunnel insulating film formed on the channel forming region,a conductive gate electrode formed on the gate insulating film, anda charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines;
the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the plurality of word lines and intersecting the word lines; and
said memory device further comprising;
a write inhibit voltage applying means for applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region; and
a non-selected word line biasing means for applying a voltage to a non-selected word line in the polarity of the reverse bias state to the channel forming region when writing data and biasing the gate electrode to the channel forming region to a value less than the write inhibit voltage.
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Abstract
A nonvolatile semiconductor memory device and writing method of the same having a planarly dispersed charge storing means, which improve the programming disturbance characteristic, wherein gate electrodes of a plurality of memory elements are connected to a plurality of word lines, source regions or drain regions are connected with a common line (for example, a bit line or a source line) which crosses the word lines in an electrically insulated state, and the memory device includes a write inhibit voltage supplying means for supplying a source region and/or drain region of a memory element connected to the selected word line with a reverse bias voltage placing the source/drain region in a reverse bias state to the channel forming region via the common line and a non-selected word line biasing means for supplying a non-selected word line with a voltage in the polarity placing the non-selected word, line in a reverse bias state to the channel forming region.
325 Citations
52 Claims
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1. A nonvolatile semiconductor memory device comprising a plurality of memory elements formed in the vicinity of the surface of a substrate, a plurality of word lines for driving the memory elements, and a plurality of bit lines, each of said plurality of memory elements including:
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a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film; the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the plurality of word lines and intersecting the word lines; and said memory device further comprising; a write inhibit voltage applying means for applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region; and a non-selected word line biasing means for applying a voltage to a non-selected word line in the polarity of the reverse bias state to the channel forming region when writing data and biasing the gate electrode to the channel forming region to a value less than the write inhibit voltage. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A writing method in a nonvolatile semiconductor memory device in which a plurality of memory elements formed in the vicinity of the surface of a substrate are arranged in a word line direction and a bit line direction, each of the plurality of memory elements in the nonvolatile semiconductor memory device comprising:
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; and
the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the word lines and intersecting the word lines;the writing method in the nonvolatile semiconductor memory device including the steps of; applying a voltage to a non-selected word line in the polarity by which the non-selected word line becomes in a reverse bias state to the channel forming region when writing data; and applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region to thereby reduce write and/or erase inhibit disturb with respect to the non-selected memory element wherein the absolute value of at least the reverse bias voltage applied to the drain region is higher than the absolute value of the voltage supplied to the non-selected word line. - View Dependent Claims (26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 51)
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
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44. A nonvolatile semiconductor memory device comprising a plurality of memory elements formed in the vicinity of the surface of a substrate, a plurality of word lines for driving the memory elements, and a plurality of bit lines, each of said plurality of memory elements including:
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a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film; the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the plurality of word lines and intersecting the word lines; a plurality of bit direction line shaped element isolation regions arranged at predetermined intervals from each other in the surface of the substrate; the common line being arranged in a detouring manner over the element isolation regions so as to be connected on one of the source regions or drain regions and to avoid the other of the source regions or drain regions; and said memory device further comprising; a write inhibit voltage applying means for applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region; and a non-selected word line biasing means for applying a voltage to a non-selected word line in the polarity of the reverse bias state to the channel forming region when writing data. - View Dependent Claims (45)
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46. A writing method in a nonvolatile semiconductor memory device in which a plurality of memory elements formed in the vicinity of the surface of a substrate are arranged in a word line direction and a bit line direction, each of the plurality of memory elements in the nonvolatile semiconductor memory device comprising:
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; and
the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the word lines and intersecting the word lines;
the source regions and the drain regions formed with contact holes self-aligned by side wall insulation layers formed on side wall of the word lines;
a plurality of bit line direction shaped element isolation regions formed at intervals from each other in the surface of the substrate, the plurality of element isolation regions forming parallel stripes in shape; and
the common line arranged in a detouring manner over the element isolation regions so as to be connected to one of the source regions and drain regions and avoid the other regions and the common line arranged being meander placed while commonly connecting the one regions;the writing method in the nonvolatile semiconductor memory device including the steps of; applying a voltage to a non-selected word line in the polarity which becomes the non-selected word line in a reverse bias state to the channel forming region when writing data; and applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region to thereby reduce write and/or erase inhibit disturb with respect to the non-selected memory element.
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
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47. A writing method in a nonvolatile semiconductor memory device in which a plurality of memory elements formed in the vicinity of the surface of a substrate are arranged in a word line direction and a bit line direction, each of the plurality of memory elements in the nonvolatile semiconductor memory device comprising:
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; and
the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the word lines and intersecting the word lines;
the charge storing means not having conductivity as an overall plane facing the channel forming region at least when there is no movement of charge to or from the charge storing means;the writing method in the nonvolatile semiconductor memory device including the steps of; applying a voltage to a non-selected word line in the polarity which becomes the non-selected word line in a reverse bias state to the channel forming region when writing data; and applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region to thereby reduce write and/or erase inhibit disturb with respect to the non-selected memory element. - View Dependent Claims (48, 49, 50)
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
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52. A writing method in a nonvolatile semiconductor memory device in which a plurality of memory elements formed in the vicinity of the surface of a substrate are arranged in a word line direction and a bit line direction, each of the plurality of memory elements in the nonvolatile semiconductor memory device comprising:
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
the gate electrodes of the plurality of memory elements being respectively connected to the plurality of word lines; and
the source region or the drain region of each of the memory elements being connected to a common line in the bit direction electrically insulated from each of the word lines and intersecting the word lines;the writing method in the nonvolatile semiconductor memory device including the steps of; applying a voltage to a non-selected word line in the polarity which becomes the non-selected word line in a reverse bias state to the channel forming region when writing data; applying a reverse bias voltage via the common line to the source region and/or drain region of the memory element having a gate electrode connected to a word line selected when writing data, the reverse bias voltage being a voltage by which the source region and/or drain region becomes reverse biased relative to the channel forming region to thereby reduce write and/or erase inhibit disturb with respect to the non-selected memory element; supplying the non-selected word line with a voltage becoming the non-selected word line in the reverse bias state; supplying the source region and/or drain region of the memory element connected to the selected word line with the reverse bias voltage through the common line; and supplying the selected word line with a programming voltage.
- a semiconductor channel forming region formed in the vicinity of the surface of the substrate, a source region in contact with the channel forming region in the vicinity of the surface of the substrate, a drain region in contact with the channel forming region at a position facing the source region in the vicinity of the surface of the substrate, a gate insulating film including a tunnel insulating film formed on the channel forming region, a conductive gate electrode formed on the gate insulating film, and a charge storing means which is provided on the tunnel insulating film and in the gate insulating film and is planarly discrete to the other neighboring charge storing means in the gate insulating film;
Specification