Substrate holding device and exposing apparatus using the same
First Claim
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1. A substrate holding device comprising:
- a holding surface for holding a substrate;
a hollow member surrounding at least a portion of said holding surface and movable between a position in which said hollow member protrudes from said holding surface and a position in which said hollow member does not protrude from said holding surface;
vacuum supplying means for supplying a vacuum inside said hollow member; and
moving means for providing relative movement between said hollow member and said holding surface.
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Abstract
A substrate holding device includes a vacuum supplying device for supplying a vacuum to a holding surface to hold a substrate, a hollow member surrounding at least a portion of the holding surface and movable between a position in which the holding member protrudes from the holding surface and a position in which the hollow member does not protrude from the holding surface, and a moving mechanism for relatively moving between the hollow member and the holding surface.
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Citations
16 Claims
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1. A substrate holding device comprising:
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a holding surface for holding a substrate; a hollow member surrounding at least a portion of said holding surface and movable between a position in which said hollow member protrudes from said holding surface and a position in which said hollow member does not protrude from said holding surface; vacuum supplying means for supplying a vacuum inside said hollow member; and moving means for providing relative movement between said hollow member and said holding surface. - View Dependent Claims (2, 3, 4, 5)
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6. A substrate holding device comprising:
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first holding means having a first holding surface for holding a substrate; second holding means having a second holding surface for holding the substrate; and moving means for moving the first holding surface of said first holding means relative to the second holding surface of said second holding means in a predetermined direction, wherein both said first holding means and said second holding means hold the substrate after said moving means moves the first holding surface holding the substrate relative to the second holding surface. - View Dependent Claims (7, 8, 9, 10, 11, 12, 13)
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14. A method of handling a substrate, said method comprising:
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providing relative movement between a first holding surface of first holding means and a second holding surface of second holding means so that the first holding surface protrudes from the second holding surface; holding a substrate by the first holding surface; moving the first holding surface relative to the second holding surface in a direction parallel to the first holding surface; providing relative movement between the first holding surface and the second holding means in a direction perpendicular to the first holding surface so that the first holding surface does not protrude from the second holding surface; and holding a substrate by the second holding surface. - View Dependent Claims (15, 16)
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Specification