Substrate holding device and exposing apparatus using the same

• US 5,999,589 A
• Filed: 08/26/1998
• Issued: 12/07/1999
• Est. Priority Date: 09/25/1992
• Status: Expired due to Fees

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Tanaka, Yutaka, Hara, Shinichi, Marumo, Mitsuji, Kurosawa, Hiroshi, Matsui, Shin, Iwamoto, Kazunori, Chiba, Yuji, Mizusawa, Nobutoshi
• Primary Examiner(s): Porta, David P.
• Application Number:
  US09/140,679
• Time in Patent Office: 468 Days
• Field of Search: 378/34, 378/208, 378/209, 269/21, 250/491.1
• US Class Current: 378/34
• CPC Class Codes: G03F 7/707 Chucks, e.g. chucking or un-chucking operations or structural details
• CPC Class Codes: H01J 2237/20 Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
• CPC Class Codes: H01J 2237/3175 Lithography
• CPC Class Codes: H01L 21/6838 with gripping and holding devices using a vacuum; Bernoulli devices
• CPC Class Codes: Y10T 279/11 Vacuum

Abstract

A substrate holding device includes a vacuum supplying device for supplying a vacuum to a holding surface to hold a substrate, a hollow member surrounding at least a portion of the holding surface and movable between a position in which the holding member protrudes from the holding surface and a position in which the hollow member does not protrude from the holding surface, and a moving mechanism for relatively moving between the hollow member and the holding surface.

Claims

1. A substrate holding device comprising:

a holding surface for holding a substrate;

a hollow member surrounding at least a portion of said holding surface and movable between a position in which said hollow member protrudes from said holding surface and a position in which said hollow member does not protrude from said holding surface;

vacuum supplying means for supplying a vacuum inside said hollow member; and

moving means for providing relative movement between said hollow member and said holding surface.

2. A substrate holding device according to claim 1, further comprising exposing means for effecting exposure on a substrate held on the holding surface.

3. A substrate holding device according to claim 1, further comprising means for controlling a vacuum clamp force provided in a portion of the holding surface and a vacuum clamp force provided in the remaining portion of the holding surface discretely from each other.

4. A substrate holding device according to claim 1, further comprising a mechanism for rotating said hollow member.

5. A substrate holding device according to claim 1, wherein an elastic member is provided on an end surface of said hollow member in a direction in which said hollow member protrudes.

6. A substrate holding device comprising:

first holding means having a first holding surface for holding a substrate;

second holding means having a second holding surface for holding the substrate; and

moving means for moving the first holding surface of said first holding means relative to the second holding surface of said second holding means in a predetermined direction,

wherein both said first holding means and said second holding means hold the substrate after said moving means moves the first holding surface holding the substrate relative to the second holding surface.

7. A device according to claim 6, wherein the predetermined direction comprises a direction perpendicular to the first holding surface.

8. A device according to claim 6, wherein the predetermined direction comprises a direction parallel to the first holding surface.

9. A device according to claim 8, wherein the predetermined direction comprises a rotational direction in a surface parallel to the first holding surface.

10. A device according to claim 6, further comprising exposing means for exposing the substrate held by said holding device with radiation.

11. A device according to claim 10, further comprising a liquid flow path for circulating temperature adjusting liquid.

12. A device according to claim 11, further comprising means for independently controlling the flow of liquid through said first holding means and said second holding means, on the basis of the exposure performed by said exposing means.

13. A device according to claim 6, further comprising a mirror for reflecting a light beam for measuring positional information regarding said second holding means.

14. A method of handling a substrate, said method comprising:

providing relative movement between a first holding surface of first holding means and a second holding surface of second holding means so that the first holding surface protrudes from the second holding surface;

holding a substrate by the first holding surface;

moving the first holding surface relative to the second holding surface in a direction parallel to the first holding surface;

providing relative movement between the first holding surface and the second holding means in a direction perpendicular to the first holding surface so that the first holding surface does not protrude from the second holding surface; and

holding a substrate by the second holding surface.

15. A method according to claim 14, further comprising exposing the held substrate with radiation.

16. A method according to claim 15, further comprising independently controlling flow of a temperature adjusting liquid through the first holding means and the second holding means, on the basis of the exposure in said exposing step.