Drive electrodes for microfabricated torsional cantilevers

• US 6,000,280 A
• Filed: 03/23/1998
• Issued: 12/14/1999
• Est. Priority Date: 07/20/1995
• Status: Expired due to Term

• Current Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Original Assignee: Cornell Research Foundation Incorporated (Cornell University)
• Inventors: Turner, Kimberly L., Miller, Scott A., MacDonald, Noel C.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US09/045,573
• Time in Patent Office: 631 Days
• Field of Search: 73/105
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01B 5/28 for measuring roughness or irregularity of surfaces
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 15/131 with electrostatic counterbalancing means
• CPC Class Codes: G01P 2015/0831 the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

A comb-type actuator for movable microelectromechanical structures includes first and second asymmetric sets of interdigitated fingers. Asymmetry is obtained by fabricating on set of fingers to have a greater height than the other set, or by providing electrically insulating segments in one set. Application of a voltage across the sets produces an asymmetric field between them and produces relative motion.

Claims

1. A comb-type actuator for microelectromechanical structures, comprising:

a first set of fingers mounted on a substrate;

a second set of fingers mounted on a movable structure for relative motion with respect to said first set of fingers, the fingers of said first set being interdigitated with the fingers of said second set, said first and said second sets of fingers being asymmetrical; and

a voltage source connected to produce an electric field between said first and said second sets of fingers to thereby produce a predetermined relative motion between said sets of fingers.

2. The actuator of claim 1, wherein said first and second sets of fingers lie in a common plane, and wherein said relative motion is in a direction perpendicular to said plane.

3. The actuator of claim 2, wherein one of said first and second sets of fingers incorporates electrically insulating segments in its fingers to cause said first and second sets of fingers to be asymmetrical and to thereby produce an asymmetrical electric field therebetween.

4. The actuator of claim 2, wherein said first and second sets of fingers are single crystal silicon, and wherein one of said sets incorporates electrically insulating segments in its fingers to cause said fingers to be asymmetrical to produce an asymmetric electrical field between said sets of fingers.

5. The actuator of claim 2, wherein each finger of said first set has a predetermined first height, and wherein each finger of said second set has a predetermined second height.

6. The actuator of claim 5, wherein said first height is greater than said second height.

7. The actuator of claim 5, wherein said second height is greater than said first height.

8. The actuator of claim 5, wherein said fingers of said first and second sets have substantially the same width.

9. The actuator of claim 8, wherein said first set of fingers is mounted on a single crystal silicon substrate, and wherein said fingers of said first and second sets are single crystal silicon.

10. The actuator of claim 2, wherein said first set of fingers is integral with said substrate, and wherein said second set of fingers is integral with a microelectromechanical structure mounted for motion with respect to said substrate.

11. The actuator of claim 10, wherein said voltage source is variable to provide controlled relative motion between said first and second sets of fingers to thereby provide controlled motion of said microelectromechanical structure with respect to said substrate.

12. The actuator of claim 11, wherein said substrate and said first and second sets of fingers are single crystal silicon.

13. The actuator of claim 12, wherein each finger of said first set has a predetermined first height and each finger of said second set has a predetermined second height.

14. The actuator of claim 13, wherein said first height is greater than said second height.

15. The actuator of claim 13, wherein said second height is greater than said first height.

16. The actuator of claim 13, wherein the fingers of said first and second sets of fingers have substantially the same width.

17. The actuator of claim 13, wherein each of the fingers of said first and second sets has a high aspect ratio.

18. The actuator of claim 17, where each of the fingers of said first set has a height of between 10 and 20 μ

m, and each of the fingers of said second set has a height of about 1 μ

m less than the height of the fingers in said first set.