Temperature regulation in a CMP process
First Claim
1. A belt polishing apparatus, comprising:
- a continuous belt of compliant polishing material disposed to travel in a first direction; and
a heat transfer source configured to transfer heat between said belt and said source, such that a specified temperature distribution is maintained across said belt in a second direction different from said first direction.
3 Assignments
0 Petitions
Accused Products
Abstract
Heat is transferred between a linear CMP belt and an adjacent heat transfer source, providing a predetermined lateral temperature distribution across the belt. Temperature sensors generate feedback signals to control the heat transfer sources. Alternatively, process monitoring sensors provide feedback signals. The heat transfer source can include multiple selectively controllable individual heat transfer sources having differing temperatures, which can be above or below ambient temperature. The mechanism of heat transfer can include one or more of convection, conduction, and radiation. The configuration provides substantial flexibility to establish and maintain selective non-uniform temperature distributions across the polishing belt. This in turn permits precise control and stability of the polishing process. Heat transfer sources can include pulleys, slurry dispensers, polishing pad conditioners or conditioner back supports, fluid nozzles, and sealed fluid cavity belt supports.
81 Citations
32 Claims
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1. A belt polishing apparatus, comprising:
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a continuous belt of compliant polishing material disposed to travel in a first direction; and a heat transfer source configured to transfer heat between said belt and said source, such that a specified temperature distribution is maintained across said belt in a second direction different from said first direction. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
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16. A method of providing a specified temperature distribution in a moving continuous belt, comprising:
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controlling a heat transfer source disposed proximate to a surface of said belt; and transferring heat between said belt and said heat transfer source in response to said controlling. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of controlling the rate of polishing an object in a belt polishing apparatus including a moving continuous belt of compliant polishing material, comprising:
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controlling a heat transfer source disposed proximate to a surface of said belt; and transferring heat between said belt and said heat transfer source in response to said controlling, such that said heat transfer source provides a specified lateral temperature distribution across said belt. - View Dependent Claims (32)
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Specification