Aluminum nitride sintered body, metal embedded article, electronic functional material and electrostatic chuck

• US 6,001,760 A
• Filed: 03/25/1997
• Issued: 12/14/1999
• Est. Priority Date: 03/29/1996
• Status: Expired due to Term

• Current Assignee: NGK Insulators Limited
• Original Assignee: NGK Insulators Limited
• Inventors: Bessho, Yuki, Katsuda, Yuji, Takahashi, Michio, Mori, Yukimasa
• Primary Examiner(s): MARCHESCHI, MICHAEL A
• Application Number:
  US08/824,560
• Time in Patent Office: 994 Days
• Field of Search: 501/152, 501/98.4, 501/98.6, 501/98.5, 361/234, 279/128, 269/8, 428/689, 428/698
• US Class Current: 501/98.4
• CPC Class Codes: C04B 35/581 based on aluminium nitride
• CPC Class Codes: H01L 21/6833 Details of electrostatic chucks
• CPC Class Codes: Y10T 279/23 with magnetic or electrostatic means

Abstract

In AlN crystal grains constituting a sintered body, is contained: 150 ppm-0.5 wt. %, preferably at most 0.1 wt.%, of at least one rare earth element (as oxide thereof); at most 900 ppm, preferably at most 500 ppm of at least one metal impurity except rare earth elements; and preferably at least 0.5 wt. % of oxygen measured by an electron probe X-ray microanalyzer. The grains have an average grain diameter of preferably at least 3.0 μm and show a main peak in the wavelength range of 350-370 nm of spectrum obtained by a cathode luminescence method. The sintered body composed of AlN crystal grains has a volume resistivity at room temperature of at most 1.0×10¹² Ω·cm.

Claims

1. An aluminum nitride sintered body comprising at least one rare earth element in a total amount (as oxide thereof) of between 150 ppm and 0.5%, by weight, at least one metal impurity except rare earth elements in a total amount of not more than 900 ppm, carbon in a total amount of not more than 0.05% by weight, and oxygen in an amount such that the difference between the total oxygen content in the aluminum nitride sintered body and the oxygen content in one or more oxides converted from said rare earth element is between 0.5% and 2.0% , by weight, in which the aluminum nitride sintered body has a relative density of not less than 98.5%, exhibiting only peaks based on AlN single phase detected by an X-ray diffraction method, and exhibiting a main peak in a wavelength range between 350 nm and 370 nm in a spectrum obtained by a cathode luminescence method, and a volume resistivity at room temperature of between 1.0×

10⁶ and 1.0×

10¹² Ω

·

cm.

2. The aluminum nitride sintered body according to claim 1, further comprising constituent aluminum nitride crystal grains having an average grain diameter of not less than 3.0 μ

m.

3. The aluminum nitride sintered body according to claim 2, wherein said constituent aluminum nitride crystal grains have an average grain diameter between 5 μ

m and 20 μ

m.

4. The aluminum nitride sintered body according to claim 1, wherein the amount of said rare earth element is not more than 0.1% by weight.

5. The aluminum nitride sintered body according to claim 1, wherein the amount of said metal impurity is not more than 500 ppm.

6. The aluminum nitride sintered body according to claim 1, wherein said main peak is generated from inside of said constituent aluminum nitride crystal grains.

7. The aluminum nitride sintered body according to claim 1, wherein said volume resistivity at room temperature is not more than 1.0×

10¹¹ Ω

·

cm.

8. The aluminum nitride sintered body according to claim 2, wherein said oxygen concentration in said constituent aluminum nitride crystal grains is measured by an electron probe X-ray microanalyzer.

9. The aluminum nitride sintered body according to claim 2, wherein said rare earth element is not substantially present inside the aluminum nitride crystal grains, but is present at a grain boundary of adjacent two aluminum nitride crystal grains.

10. The aluminum nitride sintered body according to claim 9, wherein said rare earth element does not form a crystalline phase at said grain boundary.

11. The aluminum nitride sintered body according to claim 9, wherein a crystal lattice constituting each aluminum nitride crystal grain comprises a disordered portion having a width of not more than 1 nm at said grain boundary.

12. The aluminum nitride sintered body according to claim 9, wherein the rare earth element is not substantially present in a crystalline phase at a triple point of the aluminum nitride sintered body, but present on a surface or near the surface of each crystal grain facing said triple point.

13. The aluminum nitride sintered body according to claim 1, wherein unpaired electron of aluminum in a spectrum obtained by an electron spin resonance method has a g-value of not more than 2.000.

14. The aluminum nitride sintered body according to claim 13, wherein an amount of spin per unit mg of aluminum obtained from a spectrum by an electron spin resonance method is not less than 1×

10¹³ spins/mg.

15. An article comprising the aluminum nitride sintered body according to claim 1, which is in a bulk form.

16. An article comprising the aluminum nitride sintered body according to claim 15 and a metal member embedded therein.

17. An electronic functional material comprising the aluminum nitride sintered body according to claim 1.

18. An electrostatic chuck having an attracting surface for attracting and holding a semiconductor, which comprises a substrate comprising the aluminum nitride sintered body according to claim 15, a plate-shaped electrode embedded in said substrate and a power source for supplying said plate-shaped electrode with a DC power.

19. The aluminum nitride sintered body according to claim 1, wherein said body has a thermal conductivity in the range of 60-120 W/mK.