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Semiconductor device having inductor element made of first conductive layer of spiral configuration electrically connected to second conductive layer of insular configuration

  • US 6,002,161 A
  • Filed: 11/26/1996
  • Issued: 12/14/1999
  • Est. Priority Date: 12/27/1995
  • Status: Expired due to Fees
First Claim
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1. A semiconductor device, comprising:

  • an inductor element formed on a semiconductor substrate and including a first conductive film of a spiral configuration, and a second conductive film of an insular configuration.wherein the insular configuration of said second conductive film includes a plurality of conductive elements that are electrically isolated from one another but are electrically connected to said first conductive film respectively through a plurality of contacts formed in an inter-layer insulation film disposed between the first and second conductive films.

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