Semiconductor device having inductor element made of first conductive layer of spiral configuration electrically connected to second conductive layer of insular configuration
First Claim
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1. A semiconductor device, comprising:
- an inductor element formed on a semiconductor substrate and including a first conductive film of a spiral configuration, and a second conductive film of an insular configuration.wherein the insular configuration of said second conductive film includes a plurality of conductive elements that are electrically isolated from one another but are electrically connected to said first conductive film respectively through a plurality of contacts formed in an inter-layer insulation film disposed between the first and second conductive films.
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Abstract
The semiconductor device includes an inductor element which includes a first conductive film pattern of a spiral configuration formed on a major face of a semiconductor substrate, and second conductive film patterns of an insular configuration electrically connected only to the first conductive film pattern through contact holes formed in an inter-layer insulation film and extending in an overlapping relationship with the first conductive film pattern.
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Citations
27 Claims
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1. A semiconductor device, comprising:
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an inductor element formed on a semiconductor substrate and including a first conductive film of a spiral configuration, and a second conductive film of an insular configuration. wherein the insular configuration of said second conductive film includes a plurality of conductive elements that are electrically isolated from one another but are electrically connected to said first conductive film respectively through a plurality of contacts formed in an inter-layer insulation film disposed between the first and second conductive films. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A semiconductor device comprising:
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a semiconductor substrate; an inductor element formed on the semiconductor substrate and including a first conductive film and a second conductive film; and an insulation layer disposed between the first and second conductive films, wherein the first conductive film has a spiral configuration and the second conductive film has a plurality of conductive elements that are electrically isolated from one another but are electrically connected to the first conductive film respectively through a plurality of contacts formed in the insulator layer. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A semiconductor device comprising:
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a semiconductor substrate; an inductor element formed on the semiconductor substrate and including a first conductive film of a contiguous spiral configuration and a second conductive film of a non-contiguous spiral configuration; and an insulation layer disposed between the first and second conductive films, wherein non-contiguous elements of the second conductive film are electrically connected to the first conductive film respectively through a plurality of contacts formed in the insulator layer. - View Dependent Claims (26, 27)
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Specification