Stage device, exposure apparatus using the same, and device production method

• US 6,002,465 A
• Filed: 10/10/1997
• Issued: 12/14/1999
• Est. Priority Date: 10/15/1996
• Status: Expired due to Term

• Current Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Original Assignee: Canon Kabushiki Kaisha (Canon Inc.)
• Inventors: Korenaga, Nobushige
• Primary Examiner(s): Metjahic, Safet
• Assistant Examiner(s): NGUYEN, HUNG
• Application Number:
  US08/948,821
• Time in Patent Office: 795 Days
• Field of Search: 355/53, 355/67, 355/77, 355/72, 355/75, 356/399, 356/400, 356/401, 250/548, 318/640, 318/687
• US Class Current: 355/53
• CPC Class Codes: G03B 27/62 Holders for the original G03B27/53 takes precedence ; for electrophotographic copiers G03G15/60
• CPC Class Codes: G03F 7/70691 Handling of masks or workpieces

Abstract

A stage device includes a table, a first stage movable in a first direction on the table, a first linear motor for driving the first stage, the first linear motor including a movable portion and a stationary portion, a second stage movable in a second direction with respect to the first stage, a second linear motor for driving the second stage, the second linear motor including a movable portion and a stationary portion and a third linear motor for driving the first stage, the third linear motor being disposed between the movable portion of the first linear motor and the first stage.

Claims

1. A stage device, comprising:

a table;

a first stage movable in a first direction on said table;

a first linear motor for driving said first stage, said first linear motor including a movable portion and a stationary portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor for driving said second stage, said second linear motor including a movable portion and a stationary portion; and

a third linear motor for driving said first stage, said third linear motor being disposed between said movable portion of said first linear motor and said first stage.

2. A stage device according to claim 1, further comprising supporting means, provided independently of said table, for supporting the stationary portion of said first linear motor.

3. A stage device according to claim 1, wherein said stationary portion of said second linear motor is directly supported by said movable portion of said first linear motor.

4. A stage device according to claim 1, further comprising a static pressure bearing for supporting said first stage and said second stage above said table in a direction of the center of gravity of said stage device.

5. A stage device, comprising:

a table;

a first stage movable in a first direction on said table;

a first linear motor for driving said first stage, said first linear motor including a stationary portion and a movable portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor for driving said second stage; and

means for counter-balancing a weight of said first stage and a weight of said second stare to compensate for shifting of a center of gravity of said first stage or a center of gravity of said second stage.

6. A stage device according to claim 5, further comprising a stationary member provided independently of said table, wherein said counter-balancing means comprises at least one of a first mechanism for causing a force to act in a direction of the center of gravity of said first stage between said stationary member and said first stage and a second mechanism for causing a force to act in a direction of the center of gravity of said second stage between the movable portion of said first linear motor and said second stage.

7. A stage device according to claim 6, wherein said first mechanism or said second mechanism includes magnetic means for generating magnetic attraction force.

8. A stage device according to claim 5, further comprising a static pressure bearing which supports each of said first stage and said second stage above said table in a direction of the center of gravity of said stage device.

9. An exposure apparatus comprising means for exposing a substrate to exposure light, and a stage for positioning the substrate for exposure, wherein said stage comprises:

a table;

a first stage movable in a first direction on said table;

a first linear motor for driving said first stage, said first linear motor including a movable portion and a stationary portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor for driving said second stage, said second linear motor including a movable portion and a stationary portion; and

driving power transmitting means for providing non-contact concurrent movement of the first stage and the second stage.

10. An exposure apparatus comprising means for exposing a substrate to exposure light, and a stage for positioning the substrate for exposure, wherein said stage comprises:

a table;

a first stage movable in a first direction on said table;

a first linear motor for driving said first stage, said first linear motor including a stationary portion and a movable portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor for driving said second stage; and

means for counter-balancing a weight of said first stage and a weight of said second stare to compensate for shifting of a center of gravity of said first stage or a center of gravity of said second stage.

11. A method of producing a device using an exposure apparatus in which a substrate is positioned by means of a stage for exposure of the substrate, wherein said exposure apparatus comprises means for exposing the substrate to exposure light and a stage device for positioning the substrate for exposure, the stage device comprising:

a table;

a first stage movable in a first direction on the table;

a first linear motor, for driving said first stage, including a movable portion and a stationary portion;

a second stage movable in a second direction with respect to the first stage;

a second linear motor, for driving said second stage, including a movable portion and a stationary portion; and

driving power transmitting means for providing non-contact concurrent movement of the first stage and the second stage, wherein said method comprises the steps of;

(i) positioning the substrate prior to exposure with exposure light, comprising the steps of;

placing the substrate on the stage;

activating the first linear motor to drive the first stage in the first direction by movement of the movable portion thereof;

activating the second linear motor to drive the second stage in the second direction by movement of the movable portion of the second linear motor; and

providing non-contact concurrent movement of the first stage and the second stage using the driving power transmitting means when the first linear motor is activated; and

(ii) exposing the substrate to the exposure light.

12. A method of producing a device in which a substrate is positioned by means of a stage for exposure of the substrate, wherein said stage comprises:

a table;

a first stage movable in a first direction above said table;

a first linear motor, for driving said first stage, including a stationary portion and a movable portion;

a second stage movable in a second direction with respect to the first stage;

a second linear motor for driving the second stage; and

means for counter-balancing a weight of the first stage and a weight of the second stage to compensate for shifting of a center of gravity of the first stage or a center of gravity of the second stage, wherein said method comprises the steps of;

(i) positioning the substrate prior to exposure with exposure light, comprising the steps of;

placing the substrate on the stage;

activating the first linear motor to drive the first stage in the first direction by movement of the movable portion thereof;

activating the second linear motor to drive the second stage in the second direction; and

counter-balancing the weight of the first stage and the weight of the second stage to compensate for any shifting that occurs in a position of a center of gravity of the first stage or in a position of a center of gravity of the second stage; and

(ii) exposing the substrate to the exposure light.

13. A stage device, comprising:

a table;

a first stage movable in a first direction on said table;

a first linear motor for driving said first stage, said first linear motor including a stationary portion and a movable portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor for driving said second stage;

a stationary member provided independently of said table; and

compensating means for compensating for shifting of a center of gravity of said first stage or a center of gravity of said second stage caused by movement of said first stage or said second stage, wherein said compensating means comprises at least one of a first mechanism for causing a force to act in a direction of the center of gravity of said first stage between said stationary member and said first stage and a second mechanism for causing a force to act in a direction of the center of gravity of said second stage between the movable portion of said first linear motor and said second stage.

14. A stage device according to claim 13, wherein said first mechanism comprises magnetic means for generating a magnetic attraction force.

15. A stage device according to claim 13, wherein said second mechanism comprises magnetic means for generating a magnetic attraction force.

16. A stage device comprising:

a table;

a first stage movable in a first direction on said table;

a first linear motor including a movable portion and a stationary portion;

a second stage movable in a second direction with respect to said first stage;

a second linear motor including a movable portion and a stationary portion, said movable portion of said second linear motor being fixed to said second stage and said stationary portion of said second linear motor being fixed to said movable portion of said first linear motor; and

a third linear motor for driving said first stage in the first direction.

17. A stage device according to claim 16, wherein said third linear motor comprises a movable portion and a stationary portion, said movable portion being fixed to said first stage and said stationary portion being fixed to said movable portion of first linear motor.

18. A stage device according to claim 16, further comprising a static pressure bearing for supporting said first stage and said second stage above said table.

19. An exposure apparatus comprising:

means for exposing a substrate to exposure light; and

a stage for positioning the substrate for exposure, said stage comprising;

(i) a table;

(ii) a first stage movable in a first direction on said table;

(iii) a first linear motor including a movable portion and a stationary portion;

(iv) a second stage movable in a second direction with respect to said first stage;

(v) a second linear motor including a movable portion and a stationary portion, said movable portion of said second linear motor being fixed to said second stage and said stationary portion of said second linear motor being fixed to said movable portion of said first linear motor; and

(vi) a third linear motor for driving said first stage.

20. A method of producing a device using an exposure apparatus in which a substrate is positioned by means of a stage for exposure of the substrate, wherein the exposure apparatus comprises means for exposing the substrate to exposure light and a stage device for positioning the substrate for exposure, the stage device comprising a table, a first stage movable in a first direction on the table, a first linear motor including a movable portion and a stationary portion, a second stage movable in a second direction with respect to the first stage, a second linear motor including a movable portion and a stationary portion, the movable portion of the second linear motor fixed to the second stage and the stationary portion of the second linear motor fixed to the movable portion of the first linear motor, and a third linear motor for driving the first stage, said method comprising the steps of:

(i) positioning the substrate prior to exposure with exposure light, comprising the steps of;

placing the substrate on the stage device;

activating the first linear motor to drive the stationary portion of the second linear motor in the first direction by movement of the movable portion of the first linear motor;

activating the second linear motor to drive the second stage in the second direction by movement of the movable portion of the second linear motor;

activating the third linear motor to drive the first stage in the first direction by movement of a movable portion of the third linear motor when the stationary portion of the second linear motor is activated in the first direction; and

(ii) exposing the substrate to the exposure light.