Closed loop resonant rotation rate sensor
First Claim
1. A sensor comprising:
- a piezoelectric structure;
pickup electrodes disposed on the piezoelectric structure to detect an AC pickup signal from the piezoelectric structure in response to motion induced pickup mode and quadrature displacements of the piezoelectric structure;
pickup/control electronics coupled to the pickup electrodes to generate an AC control signal in response to the pickup signal;
the pickup electrodes also being coupled to the pickup/control electronics and disposed on the piezoelectric structure to apply the control signal to the piezoelectric structure so that the motion induced pickup mode and quadrature displacements of the piezoelectric structure are canceled.
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Accused Products
Abstract
A closed loop sensor that utilizes a piezoelectric structure. In one embodiment, drive/non-control electrodes apply drive voltages to the piezoelectric structure and drive/control electrodes apply drive/control voltages to the piezoelectric structure to cause drive mode displacement of the piezoelectric structure and cancel motion induced pickup mode and quadrature displacements of the piezoelectric structure. In another embodiment, pickup/control electrodes detect a pickup signal from the piezoelectric structure corresponding to the motion induced pickup mode and quadrature displacements and apply a control signal to the piezoelectric structure so as to cancel these displacements. In still another embodiment of the invention, an optical sensing device optically senses the motion induced pickup mode and quadrature displacements and control electrodes apply a control signal to the piezoelectric structure so as to cancel them.
28 Citations
10 Claims
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1. A sensor comprising:
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a piezoelectric structure; pickup electrodes disposed on the piezoelectric structure to detect an AC pickup signal from the piezoelectric structure in response to motion induced pickup mode and quadrature displacements of the piezoelectric structure; pickup/control electronics coupled to the pickup electrodes to generate an AC control signal in response to the pickup signal; the pickup electrodes also being coupled to the pickup/control electronics and disposed on the piezoelectric structure to apply the control signal to the piezoelectric structure so that the motion induced pickup mode and quadrature displacements of the piezoelectric structure are canceled. - View Dependent Claims (2, 3, 4, 5)
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6. A rotation rate sensor comprising:
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a piezoelectric tuning fork having drive tines and pickup tines; pickup electrodes disposed on the pickup tines to detect an AC pickup signal from the pickup tines in response to rotation induced pickup mode and quadrature vibrations of the pickup tines; and pickup/control electronics coupled to the pickup/control electrodes and responsive to the pickup signal to generate an AC control signal; the pickup electrodes also being coupled to the pickup/control electronics and disposed on the pickup tines to apply the control signal to the pickup tines so that the rotation induced pickup mode and quadrature vibrations of the pickup tines are canceled. - View Dependent Claims (7, 8, 9, 10)
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Specification