Pressure sensor

• US 6,003,381 A
• Filed: 03/29/1999
• Issued: 12/21/1999
• Est. Priority Date: 10/16/1998
• Status: Expired due to Fees

• Current Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Original Assignee: Mitsubishi Denki Kabushiki Kaisha (Mitsubishi Electric Corporation)
• Inventors: Kato, Hajime
• Primary Examiner(s): Fuller, Benjamin R.
• Assistant Examiner(s): AW MUSSE, ABDULLAHI H
• Application Number:
  US09/277,767
• Time in Patent Office: 267 Days
• Field of Search: 73/715, 73/717, 73/718, 73/719, 73/720, 73/756, 73/708, 73/721
• US Class Current: 73/721
• CPC Class Codes: G01L 19/146 using flexible element between the transducer and the support
• CPC Class Codes: G01L 19/147 Details about the mounting of the sensor to support or covering means
• CPC Class Codes: H01L 2224/48091 Arched
• CPC Class Codes: H01L 2924/00014 the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Abstract

A pressure sensor including a pressure sensor element, a pedestal having a through-hole defined therein for guiding an external pressure to the pressure sensor element and a header, all of which are successively tightly bonded together. The pressure sensor also includes a cap for covering the pressure sensor element and the pedestal and mounted tightly on the header. A region of the header ranging from a joint between the cap and the header to a joint between the pedestal and the header is stepped.

Claims

1. A pressure sensor which comprises:

a pressure sensor element;

a pedestal having a through-hole defined therein for guiding an external pressure to the pressure sensor element, said pressure sensor element being tightly mounted on the pedestal; and

a header, said pedestal being tightly mounted on the header; and

a cap for covering the pressure sensor element and the pedestal and mounted tightly on the header so as to enclose the pressure sensor element and the pedestal;

wherein a region of the header ranging from a joint between the cap and the header to a joint between the pedestal and the header is stepped so as to form a projection inside said cap and a recess opposite said projection.

2. A pressure sensor which comprises:

a pressure sensor element;

a pedestal having a through-hole defined therein for guiding an external pressure to the pressure sensor element, said pressure sensor element being tightly mounted on the pedestal; and

a header, said pedestal being tightly mounted on the header; and

a cap for covering the pressure sensor element and the pedestal and mounted tightly on the header so as to enclose the pressure sensor element and the pedestal;

wherein a region of the header ranging from a joint between the cap and the header to a joint between the pedestal and the header is stepped; and

wherein said region of the header is stepped to provide a substantially cylindrical projection defined at a center portion of the header so as to protrude inside the cap, said cylindrical projection having a diameter greater than a diameter of the through-hole, but smaller than a diameter of an imaginary circle that inscribes the pedestal.

3. A pressure sensor according to claim 2, wherein the header has an outer surface opposite to the cap, said outer surface having an annular groove formed therein, said annular groove being positioned radially inwardly of a joint between the cap and the header and having a diameter greater than a diameter of the cylindrical projection.

4. A pressure sensor which comprises:

a pressure sensor element;

a pedestal having a through-hole defined therein for guiding an external pressure to the pressure sensor element, said pressure sensor element being tightly mounted on the pedestal; and

a header, said pedestal being tightly mounted on the header; and

a cap for covering the pressure sensor element and the pedestal and mounted tightly on the header so as to enclose the pressure sensor element and the pedestal;

wherein a region of the header ranging from a joint between the cap and the header to a joint between the pedestal and the header is stepped; and

wherein the header has an outer peripheral region set back a predetermined distance to a level below the remaining portion of the header to define an annular counter-flange where the cap is welded to the header.