Method for etching Pt film of semiconductor device

• US 6,004,882 A
• Filed: 01/30/1998
• Issued: 12/21/1999
• Est. Priority Date: 02/05/1997
• Status: Expired due to Fees

• Current Assignee: Samsung Electronics Co. Ltd.
• Original Assignee: Samsung Electronics Co. Ltd.
• Inventors: Yoo, Won-jong, Nam, Byeong-yun, Kim, Hyoun-woo, Ju, Byong-sun
• Primary Examiner(s): Kunemund, Robert
• Assistant Examiner(s): Okoro, Bernadine
• Application Number:
  US09/016,022
• Time in Patent Office: 690 Days
• Field of Search: 438/710, 438/712, 438/714, 438/722, 438/736, 438/720, 438/742, 438/650, 438/643, 438/653
• US Class Current: 438/706
• CPC Class Codes: H01L 21/28512 on semiconductor bodies comprising elements of Group IV of the Periodic Table
• CPC Class Codes: H01L 21/32136 using plasmas

Abstract

A method for etching a platinum (Pt) layer of a semiconductor device is provided which improves the etching slope of a sidewall of the platinum layer used as a storage node of the semiconductor device. The semiconductor device consists of a semiconductor substrate including a bottom layer on which various other layers are formed. Specifically, according to this invention, a Pt layer is formed on a bottom layer of a semiconductor substrate. An adhesive layer is then formed on the Pt layer while a mask layer is formed on the adhesive layer. After formation of the various layers, the mask layer and adhesive layer are patterned using an etching process to form a mask pattern and an adhesive layer mask pattern, respectively. The semiconductor substrate is then heated and an etching process is performned on the Pt layer using the mask pattern and the adhesive layer mask pattern to form etching slope sidewalls of the Pt layer having etching slopes close to vertical. Accordingly, the Pt electrodes of the semiconductor device of the present invention have a finer pattern than those of the prior art. Finally, overetching is done to remove the mask pattern.

Claims

1. A method for etching a Pt layer of a semiconductor device, comprising:

forming the Pt layer on a semiconductor substrate where a bottom layer is formed;

forming an adhesive layer of titanium on the Pt layer;

forming a mask layer on the adhesive layer;

patterning the mask layer to form a mask pattern;

patterning the adhesive layer using the mask pattern to form an adhesive layer mask pattern;

heating the semiconductor substrate;

etching the Pt layer with an etching gas containing at least 50% oxygen by flow rate using the mask pattern and the adhesive layer mask pattern, wherein during etching of the Pt layer the adhesive mask pattern is oxidized into TiO_x ; and

removing the mask pattern.

2. The method according to claim 1, wherein a barrier layer is formed on the bottom layer before forming the Pt layer.

3. The method according to claim 2, wherein the barrier layer is formed using titanium nitride (TiN) or a material containing TiN.

4. The method according to claim 1, wherein the semiconductor substrate is heated in a plasma etching apparatus while no plasma is excited.

5. The method according to claim 1, wherein the semiconductor substrate is heated to a temperature of approximately 120˜

300°

C.

6. The method according to claim 1, wherein the etching gas is a mixture of oxygen (O₂) and another gas selected from a group consisting of hydrogen bromide (HBr), bromine (Br₂), and argon (Ar).

7. The method of claim 1, wherein removing the mask pattern comprises overetching to remove the mask pattern.

8. The method of claim 7, wherein overetching comprises extending an etching time by an additional 0.5˜

1.5 times the etching time required to etch up to an etching end point of the Pt layer.

9. The method of claim 2, wherein the barrier layer is patterned after removing the mask pattern.

10. The method of claim 1, wherein the etching gas is about 80 percent O₂ by flow rate.