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Vapor phase low molecular weight lubricants

  • US 6,004,912 A
  • Filed: 06/05/1998
  • Issued: 12/21/1999
  • Est. Priority Date: 06/05/1998
  • Status: Expired due to Term
First Claim
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1. A method of lubricating a micro machine comprising the step of applying a lubricant to the micro machine wherein the lubricant is a compound having a permanent electric dipole moment.

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