Semiconductor nonvolatile memory device and method of production of same
First Claim
1. A semiconductor nonvolatile memory device in which memory transistors having charge storing layers are connected,said semiconductor nonvolatile memory device formed with a plurality of thin film transistors, each transistor comprisinga semiconductor layer having a channel formation region formed in an insulating substrate of glass or plastic,a charge storing layer formed in the semiconductor layer,a control gate formed at an upper layer of the charge storing layer, andsource and drain regions formed in the semiconductor layer and connected to the channel formation region,each thin film transistor acting as a memory transistor.
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Abstract
A semiconductor nonvolatile memory device capable of lowering an operation voltage such as an erase voltage and capable of lowering costs and a method of production of the same, wherein a thin film transistor acting as the memory transistor is formed with a semiconductor layer 31b having a channel formation region formed on an insulating substrate 10 made of glass or plastic, a charge storing layer 32a formed on the semiconductor layer, a control gate 33a formed above the charge storing layer, and source and drain regions formed connected to the channel formation region.
157 Citations
76 Claims
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1. A semiconductor nonvolatile memory device in which memory transistors having charge storing layers are connected,
said semiconductor nonvolatile memory device formed with a plurality of thin film transistors, each transistor comprising a semiconductor layer having a channel formation region formed in an insulating substrate of glass or plastic, a charge storing layer formed in the semiconductor layer, a control gate formed at an upper layer of the charge storing layer, and source and drain regions formed in the semiconductor layer and connected to the channel formation region, each thin film transistor acting as a memory transistor.
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29. A semiconductor nonvolatile memory device in which memory transistors having charge storing layers are connected,
said semiconductor nonvolatile memory device formed with a plurality of thin film transistors, each transistor comprising a semiconductor layer formed by quasi single crystal silicon having a channel formation region formed in an insulating substrate of a silicon substrate covered on its surface with a silicon oxide film, a charge storing layer formed in the semiconductor layer, a control gate formed at an upper layer of the charge storing layer, and source and drain regions formed in the semiconductor layer and connected to the channel formation region, each thin film transistor acting as a memory transistor.
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44. A semiconductor nonvolatile memory device in which memory transistors having charge storing layers are connected,
said semiconductor nonvolatile memory device formed with a plurality of thin film transistors, each transistor comprising a semiconductor layer formed by polycrystalline silicon having a channel formation region formed in an insulating substrate of a silicon substrate coated on its surface with a silicon oxide film, a charge storing layer formed in the semiconductor layer, a control gate formed at an upper layer of the charge storing layer, and source and drain regions formed in the semiconductor layer and connected to the channel formation region, each thin film transistor acting as a memory transistor, the substrate comprising a peripheral circuit transistor, the gate width of the gate of the peripheral circuit transistor being larger than the gate length of the gate and the average particle size of the polycrystalline silicon forming the semiconductor layer.
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57. A method of production of a semiconductor nonvolatile memory device in which memory transistors having charge storing layers are connected,
said method of production of a semiconductor nonvolatile memory device comprising forming a thin film transistor acting as a memory transistor by a step of forming a semiconductor layer having a channel formation region on an insulating substrate of glass or plastic; -
a step of forming a charge storing layer at an upper layer of the semiconductor layer; a step of forming a control gate at an upper layer of the charge storing layer; and a step of forming source and drain regions connected to the channel formation region. - View Dependent Claims (58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72)
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73. A method of production of a semiconductor nonvolatile memory device comprising a first transistor acting as a memory transistor having a charge storing layer and a second transistor for a peripheral circuit,
said method of production of a semiconductor nonvolatile memory device comprising: -
a step of forming a first semiconductor layer having a first channel formation region for the first transistor in a first transistor forming region and forming a second semiconductor layer having a second channel formation region for the second transistor in a second transistor forming region on an insulating substrate of a silicon substrate coated on its surface with a silicon oxide film or on an insulating substrate of glass or plastic; a step of forming a charge storing layer at an upper layer of the first semiconductor layer and forming a gate insulating film at an upper layer of the second semiconductor layer; a step of forming a control gate at an upper layer of the charge storing layer and forming a gate electrode at an upper layer of the gate insulating film; and a step of forming first source and drain regions connected to a first channel formation region and second source and drain regions connected to a second channel formation region. - View Dependent Claims (74, 75)
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76. A method of production of a semiconductor nonvolatile memory device comprising a first transistor having a charge storing layer and a second transistor for a peripheral circuit,
said method of production of a semiconductor nonvolatile memory device comprising: -
a step of forming an erase gate in a first transistor forming region on an insulating substrate of a silicon substrate coated on its surface with a silicon oxide film or on an insulating substrate of glass or plastic; a step of forming a lower gate insulating film at an upper layer of the erase gate; a step of forming a first semiconductor layer having a first channel formation region for the first transistor at an upper layer of the lower gate insulating film and forming a second semiconductor layer having a second channel formation region for the second transistor in a second transistor forming region on the substrate; a step of forming a charge storing layer at an upper layer of the first semiconductor layer and forming a gate insulating film at an upper layer of the second semiconductor layer; a step of forming a control gate at an upper layer of the charge storing layer and forming a gate electrode at an upper layer of the gate insulating film; and a step of forming first source and drain regions connected to the first channel formation region and second source and drain regions connected to the second channel formation region.
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Specification