Miniature scanning confocal microscope
First Claim
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1. A microscanning apparatus, comprising:
- a semiconductor substrate;
a pivot plate coupled to the semiconductor substrate and pivotable about an axis relative to the substrate, the pivot plate including;
an external face having a first terminal coupled thereto;
an internal face positioned between the external face and the substrate;
a depletion region between the external and internal faces formed during an application of voltage wherein said application of voltage between said first terminal and said substrate causes the plate to pivot; and
a reflective surface that is pivotable in response to pivoting of the pivot plate.
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Abstract
A scanning optical microscope which includes an optical fiber which serves as a point source of light and for collecting reflected light is disclosed. A lens for focusing the light from the optical fiber onto an image plane and for gathering light reflected from the image plane and focusing it into the optical fiber is also disclosed, together with a scanning mechanism for scanning the light to scan a field of view.
75 Citations
23 Claims
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1. A microscanning apparatus, comprising:
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a semiconductor substrate; a pivot plate coupled to the semiconductor substrate and pivotable about an axis relative to the substrate, the pivot plate including; an external face having a first terminal coupled thereto; an internal face positioned between the external face and the substrate; a depletion region between the external and internal faces formed during an application of voltage wherein said application of voltage between said first terminal and said substrate causes the plate to pivot; and a reflective surface that is pivotable in response to pivoting of the pivot plate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A mirror for a microscanning device, comprising:
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a plate of a semiconductive material pivotably coupling to a supporting structure, the plate including a reflective surface positioned for exposure when the plate is coupled to the supporting structure; a semiconductor junction formed in the plate; and wherein said plate is formed in a wafer of semiconductor material of one conductivity type by micromachining and a region of opposite conductivity type is formed in said plate to form said semiconductor junction and hinges pivotably support said plate on said wafer. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A electrically actuated scanner, comprising:
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a substrate; a mirror body having a first semiconductor region having a first set of electrical properties, a second semiconductor region having a second set of electrical properties different from first set, and a barrier region disposed between the first and second regions, the barrier region forming a barrier to limit electron flow between the first and second regions; a hinge coupled between the substrate and the mirror body and configured to pivotably couple the mirror plate to the substrate; and first and second terminals coupled to the first semiconductor region and to the substrate respectively. - View Dependent Claims (16, 17, 18)
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19. A micromechanical device comprising:
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a base; a movable assembly linked to the base, the movable assembly including a first member having an integral first region of a first material and an integral second region of a second material, wherein the first region has a first composition including a first semiconductor material and the second region has a second composition different from the first composition, the first and second compositions having different electrical properties, the movable assembly being responsive to periodic electrostatic forces to move in a predetermined periodic pattern relative to the base; and a first section in the base having a terminal for electrical control, the first section being aligned with the movable assembly and positioned to produce an electric field extending from the first section to the first or second regions. - View Dependent Claims (20, 21, 22, 23)
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Specification