Micromachined peristaltic pumps

• US 6,007,309 A
• Filed: 12/08/1997
• Issued: 12/28/1999
• Est. Priority Date: 12/13/1995
• Status: Expired due to Fees

• Current Assignee: Frank T. Hartley
• Original Assignee: Frank T. Hartley
• Inventors: Hartley, Frank T.
• Primary Examiner(s): Thorpe, Timothy S.
• Assistant Examiner(s): Gartenberg, Ehud
• Application Number:
  US08/986,363
• Time in Patent Office: 750 Days
• Field of Search: 417/472, 417/473, 417/474, 417/475, 417/322, 417/413.1, 417/413.3
• US Class Current: 417/322
• CPC Class Codes: F04B 43/043 Micropumps
• CPC Class Codes: F04B 43/12 having peristaltic action
• CPC Class Codes: F04B 43/14 having plate-like flexible members
• CPC Class Codes: F15C 5/00 Manufacture of fluid circuit elements; Manufacture of assemblages of such elements integrated circuits
• CPC Class Codes: F16K 2099/0074 using photolithography, e.g. etching
• CPC Class Codes: F16K 2099/0084 Chemistry or biology, e.g. "lab-on-a-chip" technology
• CPC Class Codes: F16K 2099/0086 Medical applications
• CPC Class Codes: F16K 2099/0094 Micropumps
• CPC Class Codes: F16K 99/0001 Microvalves microdevices B81B1/00; manufacture or treatment of devices or systems in or on a substrate B81C1/00; microfluidic structures B01L3/5027; micropumps F04B19/006
• CPC Class Codes: F16K 99/0015 Diaphragm or membrane valves
• CPC Class Codes: F16K 99/0051 using electrostatic means
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence

Abstract

Micromachined pumps including a channel formed between a first membrane and a substrate or between first and second flexible membranes. A series of electrically conductive strips is applied to a surface of the substrate or one of the membranes. Application of a sequential voltage to the series of strips causes a region of closure to progress down the channel to achieve a pumping action.

Claims

1. A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising;

a flexible membrane;

means attached to said membrane for forming a fluid-tight channel therewith; and

means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.

2. The structure of claim 1 wherein said means for forming comprises a second flexible membrane.

3. The structure of claim 2 wherein said means for attracting includes a series of conductor strips formed on a surface of one of said flexible membranes.

4. The structure of claim 3 wherein said surface is an exterior surface.

5. The structure of claim 3 wherein said surface is an interior surface.

6. The structure of claim 3 wherein said means for attracting further includes a continuous conductive surface formed on a surface of the other of said flexible membranes.

7. The structure of claim 2 wherein said second flexible membrane comprises a flexible conductive metal foil.

8. The structure of claim 3 wherein each of said conductive strips is rectangular.

9. The structure of claim 3 wherein each of said conductor strips is wedge-shaped such that said one membrane is pulled together more on one side than the other upon activating a said conductor strip so as to effect a fishtail traveling compression of said channel.

10. The structure of claim 6 wherein said surface of the other of said flexible membranes is an interior surface.

11. The structure of claim 6 wherein said surface of the other of said flexible membranes is an exterior surface.

20. The structure of claim 1 further including a hydrophobic layer applied to the interior of said channel.

22. The pump structure of claim 1 wherein said membrane comprises an elastomeric non-crinkling material.

23. The pump structure of claim 1 further including means for maintaining a portion of said channel in a normally closed state.

24. The pump structure of claim 23 wherein said means comprises an electret.

12. A stack of pump structures, each pump structure comprising at least part of a respective pump, each pump structure comprising:

a flexible membrane;

means attached to said membrane for forming a fluid-tight channel therewith; and

means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.

13. The structure of claim 12 wherein said means for forming comprises a second flexible membrane.

14. The structure of claim 13 further including a series of conductor strips formed on a surface of one of said flexible membranes.

15. The structure of claim 14 wherein said surface is an exterior surface.

16. The structure of claim 14 wherein said surface is an interior surface.

17. The structure of claim 14 further including a continuous conductive surface found on a surface of a second of said flexible membranes.

18. The pump structure of claim 13 wherein said second flexible membrane comprises a flexible conductive metal foil.

19. The structure of claim 14 wherein said conductive strips are each rectangular.

21. A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising:

a first flexible membrane;

means including a second flexible membrane attached to said first membrane for forming a fluid-tight channel therewith; and

means for attracting said first and second membrane toward one another so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.

25. A microminiature tube structure comprising:

a first flexible membrane;

means including a second flexible membrane attached to said first membrane for forming a fluid-tight channel therewith; and

means for attracting said first and second membranes toward one another so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to cause said tube structure to move over a surface.

26. A microminiature pump structure forming at least part of a microminiature pump, said pump structure comprising:

a fluid tight channel including a flexible membrane; and

means for attracting said membrane into said channel so as to close a region of said channel and for causing the closed region of said channel to move down said channel so as to create a pumping action.

27. The structure of claim 26 wherein said fluid tight channel comprises a second flexible membrane.

28. The structure of claim 27 wherein said means for attracting includes a series of conductor strips formed on a surface of one of said flexible membranes.

29. The structure of claim 28 wherein said surface is an exterior surface.

30. The structure of claim 28 wherein said surface is an interior surface.

31. The structure of claim 28 wherein said means for attracting further includes a continuous conductive surface formed on a surface of the other of said flexible membranes.

32. The structure of claim 27 wherein said second flexible membrane comprises a flexible conductive metal foil.

33. The structure of claim 28 wherein each of said conductive strips is rectangular.

34. The structure of claim 28 wherein each of said conductor strips is wedge-shaped such that said one of said flexible membranes is pulled together more on one side than the other upon activating a said conductor strip so as to effect a fishtail traveling compression of said channel.

35. The structure of claim 31 wherein said surface of the other of said flexible membranes is an interior surface.

36. The structure of claim 31 wherein said surface of the other of said flexible membranes is an exterior surface.

37. The pump structure of claim 27 wherein said first and second flexible membranes form a flexible tube.