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Liquid precursor delivery system

  • US 6,007,330 A
  • Filed: 03/12/1998
  • Issued: 12/28/1999
  • Est. Priority Date: 03/12/1998
  • Status: Expired due to Fees
First Claim
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1. A method for delivering a liquid precursor material from the liquid state at or near atmospheric pressure to a reduced pressure in which the precursor material exists as a vapor, the method comprising the following steps:

  • providing a system comprising means for containing the liquid precursor material, means for vaporizing the liquid precursor material, and means for transporting the liquid precursor material to the means for vaporizing in which liquid precursor which is transported into the vaporizer canister is vaporized and drawn off through an outlet into a process chamber;

    determining the pressure of the system at a point adjacent the outlet of the vaporizer canister; and

    maintaining the pressure of the system as determined at the point adjacent the outlet of the vaporizer canister at a setpoint by dispensing a predetermined amount of liquid precursor into the vaporizer when the determined pressure is below the setpoint.

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