Yaw rate detector and method for detecting yaw rate

• US 6,009,752 A
• Filed: 09/02/1997
• Issued: 01/04/2000
• Est. Priority Date: 09/03/1996
• Status: Expired due to Fees

• Current Assignee: Kabushiki Kaisha Tokai RIKA Denki Seisakusho
• Original Assignee: Kabushiki Kaisha Tokai RIKA Denki Seisakusho
• Inventors: Iwata, Hitoshi
• Primary Examiner(s): Patel, Harshad
• Assistant Examiner(s): CLARK, ROBIN C
• Application Number:
  US08/923,763
• Time in Patent Office: 854 Days
• Field of Search: 73/504.05, 73/514.03, 73/514.09, 73/514.05, 73/514.06, 73/514.11, 73/512, 73/488, 73/727, 73/740, 338/36
• US Class Current: 73/514.09
• CPC Class Codes: G01P 3/22 transferred to the indicator by electric or magnetic means

Abstract

A yaw rate detector and method of detecting yaw rate. The detector includes a sensor surrounded by a uniformly distributed gel-like material. The gel-like material is retained in a certain shape by a pair of parallel surfaces. The pressure of the gel-like material is affected by centrifugal force, which is sensed by the sensor. The sensor simultaneously detects pressure changes in the gel-like material on opposite sides of the sensor, which permits the detector to sense the angular velocity of rotation of the sensor. The sensor is a semi-conductor pressure sensor formed on a circuit substrate.

Claims

1. A yaw rate detector for detecting the angular velocity of a traveling object, wherein the yaw rate detector comprises:

an actuator substance having a predetermined shape and uniform density when at rest, wherein pressure changes are produced in the actuator substance when the detector is subjected to centrifugal force;

a body for retaining the actuator substance, the body comprising a flat circuit substrate for supporting the actuator substance and an upper housing cooperating with the circuit substrate to determine the thickness of the actuator substance;

a sensor located centrally within the actuator substance for reacting to pressure changes in the actuator substance, the sensor having a central axis, wherein the sensor simultaneously reacts to pressure changes at two points located in the actuator substance, wherein the two points are located on a center-line of the detector, on opposite sides of the central axis of the sensor, and at equal distances from the central axis of the sensor, the sensor being mounted on the circuit substrate and including a thin portion serving as a diaphragm wherein a diaphragm surface of the sensor is located half-way between the circuit substrate and the upper housing.

2. The yaw rate detector as set forth in claim 1, wherein pressure changes in the actuator substance are converted to a physical quantity by the sensor and are electrically transmitted from the sensor.

3. The yaw rate detector as set forth in claim 2, wherein strain produced by pressure acting on the sensor varies an electric signal from the sensor.

4. The yaw rate detectors set forth in claim 1, wherein the actuator substance is a gel-like material.

5. The yaw rate detector as set forth in claim 4, wherein solid particles are dispersed in the gel-like material.

6. A yaw rate detector for detecting the angular velocity of a traveling object, wherein the yaw rate detector comprises:

an actuator substance having a symmetrical shape and uniform density when at rest, wherein pressure changes are produced in the actuator substance when the detector is subjected to centrifugal force;

a body for retaining the actuator substance;

a sensor located centrally within the actuator substance for reacting to pressure changes in the actuator substance, the sensor having a central axis, wherein the sensor simultaneously reacts to pressure changes in the actuator substance that occur at any two points in the actuator substance located on opposite sides of the sensor and at equal distances from the central axis of the sensor; and

a slider located on each of two opposite sides of the sensor such that one side of each slider contacts the actuator substance wherein each slider is free to move along an axis.

7. The yaw rate detector as set forth in claim 6, wherein the body has a pair of parallel planar surfaces contacting the actuator substance, and wherein the actuator substance has a generally flat shape with a predetermined thickness, which is maintained by the planar surfaces, wherein planar surfaces permit the actuator substance to be displaced only in a direction that is parallel to the planar surfaces, and wherein the sensor is deformed by pressure changes produced in the actuator substance in accordance with centrifugal force.

8. The yaw rate detector as set forth in claim 7, wherein a diaphragm surface of the sensor is located half-way between the planar surfaces.

9. The yaw rate detector as set forth in claim 6, wherein, the body includes:

a flat circuit substrate for supporting the actuator substance, wherein the sensor is mounted on the circuit substrate;

an upper housing cooperating with the circuit substrate to determine the thickness of the actuator substance; and

a spacer arranged between the circuit substrate and the upper housing for separating the circuit substrate and the upper housing by a uniform distance.

10. The yaw rate detector as set forth in claim 9, wherein the circuit substrate includes a vent hole, and wherein the sensor is mounted on the circuit substrate to surround and enclose the vent.

11. The yaw rate detector as set forth in claim 6, wherein the sensor includes a diaphragm-type semiconductor pressure sensitive chip, and wherein pressure changes in the actuator substance are converted to a physical quantity by the sensor and are electrically transmitted from the sensor.

12. The yaw rate detector as set forth in claim 11, wherein the sensor is formed by anisotropically etching a bottom portion of a rectangular parallelepiped silicon base material to define a pyramidal trapezoid, and wherein a thin portion serving as a diaphragm is arranged above the etched portion.

13. A method for detecting angular velocity, the method comprising:

locating a sensor with a diaphragm surface in the center of an actuator substance to form a detector, wherein the actuator substance has a predetermined shape, thickness and a uniform density when at rest, the diaphragm surface being located at a position one half the entire thickness of the actuator substance;

retaining the actuator substance in a body to permit displacement of the actuator substance only in predetermined directions when the detector is moved;

deforming the sensor by pressure changes in the actuator, wherein the pressure changes are caused by motion of the detector;

simultaneously detecting pressure changes in the actuator substance at two points in the actuator substance, upon motion of the detector, wherein the two points are located on a center-line of the detector, on opposite sides of the sensor, and at equal distances from the sensor.