Substrate processing apparatus

• US 6,012,192 A
• Filed: 04/14/1998
• Issued: 01/11/2000
• Est. Priority Date: 04/21/1997
• Status: Expired due to Term

• Current Assignee: SCREEN Holdings Co., Ltd.
• Original Assignee: Dainippon Screen Manufacturing Company Limited (SCREEN Holdings Co., Ltd.)
• Inventors: Sawada, Atsushi, Komatsubara, Shouji, Okuda, Yasuhiko
• Primary Examiner(s): Spisich, Mark
• Assistant Examiner(s): Snider, Theresa T.
• Application Number:
  US09/059,897
• Time in Patent Office: 637 Days
• Field of Search: 15/77, 15/88.2, 15/88.3, 15/97.1, 15/102, 134/153, 134/902, 414/433, 414/936
• US Class Current: 15/77
• CPC Class Codes: H01L 21/67046 using mainly scrubbing means, e.g. brushes
• CPC Class Codes: H01L 21/67051 using mainly spraying means, e.g. nozzles
• CPC Class Codes: H01L 21/68707 the wafers being placed on a robot blade, or gripped by a gripper for conveyance
• CPC Class Codes: Y10S 134/902 Semiconductor wafer
• CPC Class Codes: Y10S 414/136 including wafer orienting means

Abstract

A substrate processing apparatus which includes a substrate retention mechanism having retention rollers, including a plurality of driving rollers, for holding a substrate by abutting the retention rollers against different peripheral edge portions of the substrate, and a rotative driving mechanism for rotating the plurality of driving rollers. The plurality of driving rollers preferably include a pair of driving rollers generally opposed to each other diametrically of the substrate to be held. Further, the retention rollers preferably all serve as the driving rollers.

Claims

1. A substrate processing apparatus, comprising:

a substrate retention mechanism having at least three rotatable retention rollers, including a plurality of driving rollers, for holding a generally circular substrate by abutting the retention rollers against different peripheral edge portions of the substrate and a pair of retention hands for rotatable supporting the at least three retention rollers, at least one of the pair of retention hands being retractable with respect to the other retention hand, the pair of retention hands each adapted to support at least one of the driving rollers; and

a rotative driving mechanism coupled to the plurality of driving rollers for rotating the plurality of driving rollers.

2. A substrate processing apparatus as set forth in claim 1, wherein the plurality of driving rollers include a pair of driving rollers generally opposed to each other diametrically of a substrate to be held.

3. A substrate processing apparatus as set forth in claim 1, wherein the at least three retention rollers all serve as the driving rollers.

4. A substrate processing apparatus as set forth in claim 1, wherein the plurality of driving rollers are disposed in such positions that a resultant force of driving forces applied to the substrate from the respective driving rollers are maintained at substantially zero.

5. A substrate processing apparatus as set forth in claim 1, wherein the plurality of driving rollers are disposed in positions corresponding to vertexes of a phantom regular polygon in a plane parallel with the circular substrate held by the substrate retention mechanism.

6. A substrate processing apparatus as set forth in claim 1, wherein the at least three retention rollers include a plurality of following rollers to be rotated by the rotation of the substrate, the plurality of following rollers being disposed in such positions that a resultant force of friction resistant forces exerted on the substrate by the respective following rollers are maintained at substantially zero.

7. A substrate processing apparatus as set forth in claim 1, further comprising a double-side cleaning mechanism for cleaning opposite surfaces of the substrate held by the substrate retention mechanism.