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Substrate processing apparatus

  • US 6,012,192 A
  • Filed: 04/14/1998
  • Issued: 01/11/2000
  • Est. Priority Date: 04/21/1997
  • Status: Expired due to Term
First Claim
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1. A substrate processing apparatus, comprising:

  • a substrate retention mechanism having at least three rotatable retention rollers, including a plurality of driving rollers, for holding a generally circular substrate by abutting the retention rollers against different peripheral edge portions of the substrate and a pair of retention hands for rotatable supporting the at least three retention rollers, at least one of the pair of retention hands being retractable with respect to the other retention hand, the pair of retention hands each adapted to support at least one of the driving rollers; and

    a rotative driving mechanism coupled to the plurality of driving rollers for rotating the plurality of driving rollers.

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