Method for etching silicon oxynitride and inorganic antireflection coatings

• US 6,013,582 A
• Filed: 12/08/1997
• Issued: 01/11/2000
• Est. Priority Date: 12/08/1997
• Status: Expired due to Fees

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Kim, Sung Ho, Li, Dean, Ionov, Pavel
• Primary Examiner(s): Breneman, Bruce
• Assistant Examiner(s): OLSEN, ALLAN W
• Application Number:
  US08/986,911
• Time in Patent Office: 764 Days
• Field of Search: 438/695, 438/696, 438/700, 438/710, 438/717, 438/718, 438/723, 438/724, 438/738, 438/743, 438/744, 216/37, 216/41, 216/47, 216/67, 216/72, 216/74
• US Class Current: 438/738
• CPC Class Codes: H01L 21/0276 using an anti-reflective coating anti-reflective coating for lithography in general G03F7/09
• CPC Class Codes: H01L 21/32139 using masks

Abstract

The present disclosure pertains to a method for plasma etching a semiconductor patterning stack. The patterning stack includes at least one layer comprising either a dielectric-comprising antireflective material or an oxygen-comprising material. In many instances the dielectric-comprising antireflective material will be an oxygen-comprising material, but it need not be limited to such materials. In one preferred embodiment of the method, the chemistry enables the plasma etching of both a layer of the dielectric-comprising antireflective material or oxygen-comprising material and an adjacent or underlying layer of material. In another preferred embodiment of the method, the layer of dielectric-comprising antireflective material or oxygen-comprising material is etched using one chemistry, while the adjacent or underlying layer is etched using another chemistry, but in the same process chamber. Of particular interest is silicon oxynitride, an oxygen-comprising material which functions as an antireflective material. A preferred embodiment of the method provides for the use of a source of carbon and an appropriate halogen-comprising plasma, to achieve selective etch of one oxygen-containing material compared with another material which contains a more limited amount of oxygen.

Claims

1. A method for improving selectivity in plasma etching of a semiconductor film stack including at least one oxygen-comprising layer, said method comprising:

using an etchant gas including at least one compound comprising fluorine and carbon, wherein the ratio of fluorine to carbon in said etchant gas is adjusted to provide selectivity of etching among materials in said film stack on the basis of the relative oxygen content of said materials.

2. The method of claim 1, wherein said etchant gas forms a fluorine-comprising polymer or species which deposits on exposed surfaces within said film stack in an amount which is proportional to the oxygen content present on said surfaces, whereby the etch rate of said surfaces containing a lower atomic percentage of oxygen is lower than the etch rate of surfaces containing a higher atomic percentage of oxygen.

3. The method of claim 1 or claim 2, wherein said at least one oxygen-comprising layer is silicon oxynitride.

4. The method of claim 3, wherein said silicon oxynitride is SiO_x N_y H_z, where x ranges from 0 to about 2, y ranges from about 0 to about 1, and z ranges from 0 to about 1.

5. The method of claim 4, wherein x, y, and z range between about 0.2 and about 0.5.

6. The method of claim 3, wherein an exposed surface adjacent said silicon oxynitride comprises a photoresist.

7. The method of claim 6, wherein said photoresist is a DUV photoresist.

8. The method of claim 1, or claim 2, wherein said plasma etching is carried out in an apparatus which enables independent control of a plasma density and of a source of bias power which affects an ion bombardment energy of a substrate surface.

9. The method of claim 3, wherein said plasma etching is carried out in an apparatus which enables independent control of a plasma density and of a source of bias power which affects an ion bombardment energy of a substrate surface.

10. The method of claim 8, wherein plasma-generated ions are directed toward a surface of said oxygen-comprising layer in a manner which activates oxygen contained on said layer surface to react with carbon adjacent to or in contact with said surface.

11. The method of claim 2, wherein said etchant gas includes an assisting gas which is used to increase an etching rate by controlling the rate of deposition of said fluorine-comprising polymer or species on said stack surface.

12. The method of claim 11, wherein said assisting gas is selected from the group consisting of Cl₂, F₂, HF, HCl, NF₃, SF₆, and combinations thereof.

13. The method of claim 11, wherein said etchant gas compound comprising fluorine and carbon is selected from the group consisting of CHF₃, CF₄, CF₃ Cl, C₂ F₄, C₂ F₆, and combinations thereof.

14. The method of claim 13, wherein said compound is CHF₃, CF₄, or a combination thereof.

15. The method of claim 13, wherein said assisting gas is selected from the group consisting of Cl₂, F₂, HF, HCl, NF₃, SF₆, and combinations thereof.

16. The method of claim 15, wherein said assisting gas is chlorine, and wherein an atomic ratio of fluorine to chlorine in said etchant gas ranges between about 3:

1 and about 1;

2.

17. The method of claim 1 or claim 2, wherein said oxygen-comprising layer and a metal-comprising layer are both etched using a single etchant gas mixture.

18. The method of claim 1 or claim 2, wherein said oxygen-comprising layer and said metal-comprising layer are both etched in a single processing chamber.

19. The method of claim 2, wherein said etchant gas mixture does not contain free oxygen.

20. A method for plasma etching a silicon oxynitride-comprising layer in a semiconductor film stack, said method comprising:

using an etchant gas mixture comprising chlorine and at least one compound comprising fluorine and carbon, wherein the atomic ratio of fluorine to chlorine in said etchant gas ranges between about 3;

1 and about 1;

2.

21. The method of claim 20, wherein said etchant gas forms a fluorine-comprising polymer or species which deposits on exposed surfaces adjacent to said silicon oxynitride-comprising layer in an amount sufficient to reduce the etch rate of said adjacent material while permitting the etching of said silicon oxynitride-comprising layer.

22. The method of claim 21, wherein a material having an exposed surface adjacent said silicon oxynitride-comprising layer comprises a photoresist.

23. The method of claim 22, wherein said photoresist is a DUV photoresist.

24. The method of claim 21, or claim 22, or claim 23, wherein said plasma etching is carried out in an apparatus which enables independent control of a plasma density and of a source of bias power which affects an ion bombardment energy of a substrate surface.

25. The method of claim 20, wherein said etchant gas compound comprising fluorine and carbon is selected from the group consisting of CHF₃, CF₄, CF₃ Cl, C₂ F₄, C₂ F₆, and combinations thereof.

26. The method of claim 25, wherein said etchant gas includes an assisting gas which is used to increase the rate of etching by controlling the rate of deposition of said fluorine-comprising polymer or species on said stack surface, wherein said assisting gas is selected from the group consisting of F₂, HF, HCl, NF₃, SF₆, and combinations thereof.

27. The method of claim 20 or claim 21, wherein said oxygen-comprising layer and a metal-comprising layer are both etched using a single etchant gas mixture.

28. The method of claim 20 or claim 21, wherein said oxygen-comprising layer and said metal-comprising layer are both etched in a single processing chamber.

29. The method of claim 21, wherein said etchant gas mixture does not contain free oxygen.