Electrically tunable low secondary electron emission diamond-like coatings and process for depositing coatings

• US 6,013,980 A
• Filed: 05/09/1997
• Issued: 01/11/2000
• Est. Priority Date: 05/09/1997
• Status: Expired due to Term

• Current Assignee: Sulzer Metaplas GmbH
• Original Assignee: Advanced Refractory Technologies, Inc.
• Inventors: Goel, Arvind, Outten, Craig Anthony
• Primary Examiner(s): Patel, Ashok
• Application Number:
  US08/853,929
• Time in Patent Office: 977 Days
• Field of Search: 313/495, 313/497, 313/292, 313/283, 313/288, 313/309, 313/310, 313/336, 313/351, 313/422, 313/106, 313/107
• US Class Current: 313/495
• CPC Class Codes: H01J 2329/88 Coatings on walls of the vessels H01J2329/18, H01J2329/868, H01J2329/89 take precedence
• CPC Class Codes: H01J 31/127 using large area or array sources, i.e. essentially a source for each pixel group
• CPC Class Codes: H01J 9/146 Surface treatment, e.g. blackening, coating H01J9/144 takes precedence
• CPC Class Codes: H01J 9/20 Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
• CPC Class Codes: Y10S 977/891 Vapor phase deposition
• CPC Class Codes: Y10S 977/892 Liquid phase deposition
• CPC Class Codes: Y10S 977/939 Electron emitter, e.g. spindt emitter tip coated with nanoparticles

Abstract

A diamond-like carbon-containing material useful as a coating for electronic devices including field emission devices and color television tubes, the coatings having both low secondary electron emission coefficients of less than unity and electrical resistivity tunable over a range of from about 10 e^-2 to about 10 e¹⁶.

Claims

1. In a device having an electron source and a target arranged so that electrons from the source impinge on the target, and a passive element operationally positioned with respect to either the source or the target so that electrons from the source may impinge on the passive element and secondary electrons emitted from the passive element impinge on the target, the improvement comprising:

a coating comprising carbon and silicon on a surface of the passive element for reducing the secondary electron emission coefficient of the surface to less than about one.

2. The device according to claim 1, further comprising the coating on the target.

21. A color picture tube comprising:

at least one electron source;

a viewing screen arranged so that electrons emitting from the at least one source impinge on the screen;

a perforated shadow mask operationally positioned between the at least one source and the screen so that electrons emitting from the source may impinge on the shadow mask; and

a coating made from the material of claim 1 disposed on the shadow mask, whereby formation of secondary electrons is substantially suppressed as electrons impinge on the shadow mask.

22. A field emission display comprising:

a baseplate;

a phosphor coated plate spaced apart from the baseplate;

an electron emitting array formed on the baseplate and positioned so that electrons emitted from the array impinge on the phosphor coating;

at least one spacer operationally positioned between and separating the baseplate and the phosphor coated plate; and

a coating made from the material of claim 1 disposed on the at least one spacer, whereby formation of secondary electrons is substantially suppressed as electrons impinge on the at least one spacer.

23. A color picture tube comprising:

at least one electron source;

a viewing screen arranged so that electrons emitting from the at least one source impinge on the screen;

a grill having at least one slit operationally positioned between the at least one source and the screen so that electrons emitting from the at least one source may impinge on the grill; and

a coating made from the material of claim 1 disposed on the grill, whereby formation of secondary electrons is substantially suppressed as electrons impinge on the grill.

3. In a device having an electron source, a target arranged so that electrons from the source impinge on the target, and a passive element positioned so that electrons from the source may impinge on the passive element and secondary electrons emitted from the passive element impinge on the target, the improvement comprising:

a coating comprising carbon and silicon on a surface of the passive element for reducing the secondary electron emission coefficient of the surface to less than about one, wherein the coating has a thickness of from about 0.02 to about 0.15 microns.

4. The device according to claim 3, wherein the source comprises an electron gun.

5. The device according to claim 3, wherein the target comprises an cathodoluminescent screen.

6. The device according to claim 3, wherein the passive element comprises a spacer disposed between the source and the target.

7. The device according to claim 3, wherein the secondary electron emission coefficient is from about 1.0 to about 0.45.

8. The device according to claim 3, wherein the secondary electron emission coefficient is from about 0.90 to about 0.45.

9. The device according to claim 3, wherein the secondary electron emission coefficient is from about 0.9 to about 0.8.

10. The device according to claim 3, wherein the coating has a tunable electrical resistivity range over a range of from about 10^-2 to about 10¹⁶ ohm-cm.

11. The device according to claim 3, wherein the coating has a tunable electrical resistivity range over a range of from about 10⁶ to about 10¹⁰ ohm-cm.

12. The device according to claim 3, wherein the coating comprises a diamond-like carbon-containing material comprising carbon, hydrogen, silicon and oxygen.

13. The device according to claim 12, wherein the carbon, silicon, hydrogen and oxygen are obtained from the decomposition of an organosiloxane having from about 1 to about 10 silicon atoms.

14. The device according to claim 13, wherein the organosiloxane is a polyphenylmethylsiloxane.

15. The device according to claim 3, wherein the coating further comprises dopant elements or dopant compounds containing elements from Groups 1-7b of the periodic table.

16. The device according to claim 15, wherein the dopant elements are selected from the group consisting of Ti, Zr, Cr, Re, Hf, Cu, Al, N, Ag, and Au.

17. The device according to claim 3, wherein the carbon content of the coating is from about 40 atomic % to about 98 atomic %.

18. The device according to claim 3, wherein the carbon content of the coating is from about 50 atomic % to about 98 atomic %.

19. The device according to claim 3, wherein the carbon to silicon atomic ratio of the coating is from about 2:

1 to about 8;

1.

20. The device according to claim 3 wherein the silicon to oxygen atomic ratio of the coating is from about 0.5:

1 to about 3;

1.