Nitride-based semiconductor element and method for manufacturing the same

• US 6,015,979 A
• Filed: 08/28/1998
• Issued: 01/18/2000
• Est. Priority Date: 08/29/1997
• Status: Expired due to Term

• Current Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Original Assignee: Kabushiki Kaisha Toshiba (Toshiba Corporation)
• Inventors: Nunoue, Shinya, Onomura, Masaaki, Yamamoto, Masahiro, Ishikawa, Masayuki, Sugiura, Lisa
• Primary Examiner(s): Meier, Stephen D.
• Application Number:
  US09/143,560
• Time in Patent Office: 508 Days
• Field of Search: 257/86, 257/103, 257/913, 257/631
• US Class Current: 257/86
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/025 Physical imperfections, e.g. particular concentration or distribution of impurities

Abstract

Nitride-based semiconductor element comprises a first layer, a mask formed on the first layer and has a plurality of opening portions, a nitride-based compound semiconductor layer formed on the mask, the nitride-based compound semiconductor layer including a first region having threading dislocations produced in such a manner that, in approximately a middle portion between two adjacent ones of the plurality of opening portions in the mask, a plurality of dislocations extend in a vertical direction to a surface of the mask, and a second region which comprises portions other than the middle portions and free from the dislocations, and a desired element structure formed on the semiconductor layer.

Claims

1. A nitride-based semiconductor element comprising:

a first layer;

a mask formed on said first layer, said mask having a plurality of opening portions;

a nitride-based compound semiconductor layer formed on said mask, said nitride-based semiconductor layer including;

a first region which has threading dislocations produced in such a manner that, in approximately a middle portion between two adjacent opening portions of said plurality of opening portions in said mask, a plurality of dislocations extend vertically to a surface of said mask; and

a second region which comprises portions other than said middle portions and free from said dislocations; and

a desired element structure formed above said mask having said plurality of opening portions.

2. The nitride-based semiconductor element according to claim 1, wherein said desired element structure is formed substantially on said second region.

3. The nitride-based semiconductor element according to claim 1, wherein material of said mask is inactive at a high temperature of 1000°

C. or higher in an atmosphere comprising at least one of hydrogen, nitrogen and ammonia.

4. The nitride-based semiconductor element according to claim 1, wherein

said first layer comprises one selected from a group consisting of AlGaN, InGaN, AlN, GaN, and materials obtained by adding B to the foregoing, Si, SiC, sapphire and a laminated film made of the foregoing.

5. The nitride-based semiconductor element according to claim 1, wherein said plurality of opening portions in said mask are each formed into a stripe-like shape extending in a direction perpendicular to an a-axis <

11-20>

of said nitride-based compound semiconductor layer.

6. The nitride-based semiconductor element according to claim 1, wherein a density of said threading dislocations in said nitride-based compound semiconductor layer ranges from 10³ cm^-2 to 10⁷ cm^-2 inclusive.

7. The nitride-based semiconductor element according to claim 1, wherein

said nitride-based compound semiconductor layer includes a third region in which a plurality of dislocations extending along the surface of said mask from said plurality of opening portions in said mask, and

said second region exists on said third region.

8. The nitride-based semiconductor element according to claim 1, wherein a surface of said nitride-based compound semiconductor layer on said mask is substantially flat.

9. The nitride-based semiconductor element according to claim 1, wherein said nitride-based compound semiconductor layer is composed of Ga_x In_y Al_z B_1-x-y-z N (wherein 0≦

x, y, z≦

1).

10. The nitride-based semiconductor element according to claim 1, wherein

said mask is constituted in such a manner that, on said first layer, either of a plurality of opening portions which are each triangular or hexagonal in shape and a plurality of un-opened portions are periodically formed,

said nitride-based compound semiconductor layer comprises:

said first region which is formed on said un-opened portions of said mask and in which said threading dislocations are contained in a state extending in a vertical direction to the surface of said mask;

a third region which is formed on said opening portions and said un-opened portions of said mask and, in which said dislocations extend along the surface of said mask; and

said second region which is formed on said third region and free from said dislocations.

11. The nitride-based semiconductor element according to claim 1, wherein

said first layer has a plurality of projections periodically formed on a surface thereof,

on surfaces of said projections, said un-opened portions of said mask are formed, and

in said opening portions of said mask, said underlying layer forms a junction with said nitride-based compound semiconductor layer.

18. The nitride-based semiconductor element according to claim 7, wherein said desired element structure is a light-emitting element including an active layer sandwiched between two clad layers.

12. A nitride-based light emitting element comprising:

a first layer;

a mask formed on said first layer, said mask having a plurality of opening portions;

a nitride-based compound semiconductor layer formed on said mask, said nitride-based semiconductor layer including;

a first region which has threading dislocations produced in such a manner that, in approximately a middle portion between two adjacent opening portions of said plurality of opening portions in said mask, a plurality of dislocations extend vertically to a surface of said mask; and

a second region which comprises portions other than said middle portions and free from said dislocations; and

a light-emitting layer formed above said mask having said plurality of opening portions, said light-emitting layer being sandwiched between current injection layers.

13. The nitride-based light-emitting element according to claim 12, wherein material of said mask is inactive at a high temperature of 1000°

C. or higher in an atmosphere comprising at least one of hydrogen, nitrogen and ammonia.

14. The nitride-based light-emitting element according to claim 12, wherein said first layer is composed of one selected from a group consisting of AlGaN, InGaN, AlN, GaN, materials resulting from adding B into the foregoing, Si, SiC, sapphire and a laminate film made of the foregoing.

15. The nitride-based light-emitting element according to claim 12, wherein said plurality of opening portions in said mask are each formed into a stripe-like shape extending in a direction perpendicular to an a-axis <

11-20>

of said nitride-based compound semiconductor layer.

16. The nitride-based light-emitting element according to claim 12, wherein a density of said threading dislocations in said nitride-based compound semiconductor layer ranges from 10³ cm^-2 to 10⁷ cm^-2 inclusive.

17. A nitride-based semiconductor element comprising:

a first layer;

a mask formed on said first layer, said mask having a plurality of opening portions;

a nitride-based flattening semiconductor layer formed on said mask; and

a desired element structure formed on said mask with said nitride-based flattening semiconductor layer interposed therebetween.