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Magnetic filter for ion source

  • US 6,016,036 A
  • Filed: 01/28/1998
  • Issued: 01/18/2000
  • Est. Priority Date: 01/28/1998
  • Status: Expired due to Fees
First Claim
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1. A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall;

  • said magnetic filter comprising;

    a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), said plurality of elongated magnets being oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ

    as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50).

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