Magnetic filter for ion source

• US 6,016,036 A
• Filed: 01/28/1998
• Issued: 01/18/2000
• Est. Priority Date: 01/28/1998
• Status: Expired due to Fees

• Current Assignee: Axcelis Technologies Incorporated
• Original Assignee: Eaton Corp. (Wisconsin) (Eaton Corporation PLC.)
• Inventors: Brailove, Adam A.
• Primary Examiner(s): Bettendorf, Justin P.
• Application Number:
  US09/014,472
• Time in Patent Office: 720 Days
• Field of Search: 315/111.71, 315/111.81, 315/111.91, 290/423 R, 290/492.21, 290/492.3
• US Class Current: 315/111.71
• CPC Class Codes: H01J 27/024 Extraction optics, e.g. grids
• CPC Class Codes: H01J 27/04 using reflex discharge, e.g. Penning ion sources electron bombardment ion sources H01J27/08
• CPC Class Codes: H01J 49/48 using electrostatic analysers, e.g. cylindrical sector, Wien filter

Abstract

A magnetic filter (90) for an ion source (26) is provided. The ion source comprises a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material. The housing includes a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma. The plurality of elongated openings are oriented substantially parallel to each other and to a first axis (66) which lies within the planar wall the first axis being substantially orthogonal to a second axis (68) which also lies within the planar wall. The magnetic filter (90) is disposed within the plasma confinement chamber (76). The magnetic filter separates the plasma confinement chamber into a primary region (86) and a secondary region (88). The magnetic filter comprises a plurality of parallel elongated magnets (90a-90n), oriented at an angle θ as measured from the second axis (68), and lying in a plane which is generally parallel to the generally planar wall (50).

Claims

1. A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall;

said magnetic filter comprising;

a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), said plurality of elongated magnets being oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ

as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50).

2. The magnetic filter (90) of claim 1, wherein each of said plurality of elongated aperture openings (64) comprises a plurality of linearly arranged smaller circular openings.

3. The magnetic filter (90) of claim 1, wherein said elongated magnets (90a-90n) are positioned within elongated tubes (94) which are filled with a cooling fluid (96).

4. The magnetic filter (90) of claim 3, wherein said cooling fluid (96) is water.

5. The magnetic filter (90) of claim 1, wherein said acute angle θ

is approximately 25°

.

6. An ion source (26), comprising:

a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and

a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ

as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50).

7. The ion source (26) of claim 6, wherein the ion source outputs a ribbon ion beam.

8. The ion source (26) of claim 7, wherein a width of the ion beam output by the ion source is made adjustable by selecting the number and width of apertures (64).

9. The ion source (26) of claim 8, wherein each of said elongated apertures (64) has an aspect ratio of at least 50:

1.

10. The ion source (26) of claim 6, wherein said elongated magnets (90a-90n) are positioned within elongated tubes (94) which are filled with a cooling fluid (96).

11. The ion source (26) of claim 6, wherein said plasma confinement chamber (76) is provided with a plurality of elongated bar magnets (72) positioned adjacent the exterior surfaces thereof, for urging plasma contained therein toward the center thereof.

12. The ion source (26) of claim 6, wherein said acute angle θ

is approximately 25°

.

13. The ion source (26) of claim 6, wherein said plasma confinement chamber (76) has an interior surface which is lined with graphite.

14. The ion source (26) of claim 6, wherein the source material ionized within the ion source housing is phosphine (PH₃) gas diluted with hydrogen (H), wherein the plasma comprises PH_n⁺ ions, P⁺ ions, and H_n⁺ ions, and wherein the magnetic filter (90) generally confines a higher proportion of PH_n⁺ ions and P⁺ ions in the secondary region (88) of the plasma confinement chamber than in the primary region (86).

15. A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall;

said magnetic filter comprising;

a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), each of said plurality of magnets being oriented at an angle θ

as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50);

wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ

being generally defined by the equation;

L/D=N×

(tan θ

).

16. The magnetic filter (90) of claim 15, wherein L/D is approximately 1.4, N=3, and θ

=25°

.

17. An ion source (26), comprising:

a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and

a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) each oriented at an angle θ

as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50);

wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ

being generally defined by the equation;

L/D=N×

(tan θ

).

18. The ion source (26) of claim 17, wherein L/D is approximately 1.4, N=3, and θ

=25°

.