Micromechanical potentiometric sensors

• US 6,016,686 A
• Filed: 03/16/1998
• Issued: 01/25/2000
• Est. Priority Date: 03/16/1998
• Status: Expired due to Fees

• Current Assignee: Lockheed Martin Energy Research Corporation (Martin Marietta Corporation)
• Original Assignee: Lockheed Martin Energy Research Corporation (Martin Marietta Corporation)
• Inventors: Thundat, Thomas G.
• Primary Examiner(s): BROCK, MICHAEL J
• Application Number:
  US09/042,601
• Time in Patent Office: 680 Days
• Field of Search: 73/24.06, 73/23.2, 73/53.01, 73/61.41, 422/82.01, 422/68.1, 422/83, 436/163
• US Class Current: 73/23.2
• CPC Class Codes: B81B 3/0021 Transducers for transforming electrical into mechanical energy or vice versa dynamo-electric machines H02K99/00; electrostatic machines H02N1/00; piezoelectric devices H10N30/00
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01N 19/00 Investigating materials by mechanical methods G01N3/00 - G01N17/00 take precedence
• CPC Class Codes: G01N 2203/0286 Miniature specimen; Testing on microregions of a specimen

Abstract

A microcantilever potentiometric sensor utilized for detecting and measuring physical and chemical parameters in a sample of media is described. The microcantilevered spring element includes at least one chemical coating on a coated region, that accumulates a surface charge in response to hydrogen ions, redox potential, or ion concentrations in a sample of the media being monitored. The accumulation of surface charge on one surface of the microcantilever, with a differing surface charge on an opposing surface, creates a mechanical stress and a deflection of the spring element. One of a multitude of deflection detection methods may include the use of a laser light source focused on the microcantilever, with a photo-sensitive detector receiving reflected laser impulses. The microcantilevered spring element is approximately 1 to 100 μm long, approximately 1 to 50 μm wide, and approximately 0.3 to 3.0 μm thick. An accuracy of detection of deflections of the cantilever is provided in the range of 0.01 nanometers of deflection. The microcantilever apparatus and a method of detection of parameters require only microliters of a sample to be placed on, or near the spring element surface. The method is extremely sensitive to the detection of the parameters to be measured.

Claims

1. An apparatus for detecting and measuring physical and chemical parameters in a sample of monitored media, comprising:

a transducer base;

at least one cantilevered spring element secured to said base, said spring element comprising;

at least one surface having a coated region;

at least one chemical attached on said coated region, wherein said at least one chemical accumulates a first surface charge in response to said parameters in said sample, said sample placed on or in close proximity to said coated region; and

a second surface on said spring element having a surface charge different than said first surface charge; and

a means for measuring a deflection of said spring element due to mechanical stresses established by said surface charge on said surface of said spring element.

2. The apparatus as described in claim 1, wherein said at least one chemical accumulates said surface charge in response to hydrogen ion concentrations in said sample of media placeable on or in close proximity to said coated region.

3. The apparatus as described in claim 2, wherein said at least one chemical is selected from the group consisting of silicon nitride, silicon oxide, iridium oxide, aluminum oxide, tantalum pentoxide, and pH sensitive polymers.

4. The apparatus as described in claim 1, wherein said at least one chemical accumulates said surface charge in response to a redox potential in said sample of media placeable on or in close proximity to said coated region.

5. The apparatus as described in claim 4, wherein said at least one chemical further comprises a layer of metal coated on said surface having a coated region, said metal selected from the group consisting of gold, platinum, and noble metals.

6. The apparatus as described in claim 5, wherein said at least one chemical further comprises an active insulator between said metal layer and said surface, said active insulator being selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, tantalum pentoxide, and iridium oxide.

7. The apparatus as described in claim 1, wherein said at least one chemical further comprises an ion selective membrane material, said membrane material coated on said at least one surface, said membrane material allowing ions from said sample to selectively pass through said membrane material to said coated region, where said surface charge accumulates in response to ions on said coated region.

8. The apparatus described in claim 7, wherein said coated region further comprises an active insulator between said membrane material and said at least one surface, said active insulator being selected from the group consisting of silicon oxide, silicon nitride, iridium oxide, aluminum oxide, and tantalum pentoxide.

9. The apparatus as described in claim 1, wherein said at least one cantilevered spring element further comprises at least one microcantilever, said microcantilever having a length of about 1 to about 200 μ

m, a width of about 1 to about 50 μ

m, and a thickness of about 0.3 to about 3.0 μ

m.

10. The apparatus as described by claim 1, wherein said at least one cantilevered spring element further comprises a cylindrical microcantilever having a length of about 1 to about 200 μ

m, and a diameter of about 1 to about 50 μ

m.

11. The apparatus as described by claim 10, wherein said cylindrical microcantilever comprises a tubular microcantilever having a wall thickness of about 0.3 to about 3.0 μ

m.

12. The apparatus as described in claim 1, wherein said at least one cantilevered spring element is composed of a material selected from the group consisting of ceramics, polymers, silicon oxide, silicon nitride, germanium, germanium dioxide, zinc oxide, gallium arsenide, and silicon compounds.

13. The apparatus as described in claim 1, wherein said deflection measuring means comprises:

a reflective region on said spring element;

a laser light source, said source positioned to direct light at said spring element;

a light sensitive detector, said detector positioned to receive reflected light from said cantilevered spring element; and

a microprocessor for determining the deflection of said cantilevered spring element.

14. The apparatus as described in claim 1, wherein said deflection measuring means further comprises one of a laser detection means, a piezoresistive detection means, a piezoelectric detection means, a capacitive detection means, and a electron tunneling detection means.

15. The apparatus as described by claim 1, wherein said at least one cantilevered spring element further comprises:

a plurality of cantilevered spring elements attached to said base, each of said spring elements comprising;

a surface having at least one coated region;

at least one chemical on said at least one coated region, said at least one chemical accumulates a first surface charge in response to said parameters in said sample, said sample placeable on or in close proximity to said at least one coated region; and

a second surface on each of said spring elements having a surface charge different than said first surface charge; and

a plurality of means for measuring deflections, each associated with a respective one of said plurality of cantilevered spring elements.

16. A method for detecting and measuring chemical and physical parameters in a sample of monitored media, comprising the steps of:

providing a transducer base comprising;

at least one cantilevered spring element attached to said base; and

at least one surface having a coated region on said spring element;

providing at least one material, said material accumulates a surface charge by ionizing in response to said parameters in said sample placeable on or in close proximity to said coated region;

coating said at least one material on said coated region;

exposing said at least one material to said sample, said sample placed on or in close proximity to said coated region;

providing a means for detecting a deflection of said cantilevered spring element due to mechanical stresses established by said surface charge on said at least one material on said surface of said spring element; and

detecting said deflection of said spring element.

17. The method as described in claim 16, wherein the step of providing a transducer base comprising at least one spring element further comprises providing a microcantilever, said microcantilever having a length of about 1 to about 200 μ

m, a width of about 1 to about 50 μ

m, and a thickness of about 0.3 to about 3.0 μ

m.

18. The method as described in claim 16, wherein the step of providing a transducer base comprising at least one spring element further comprises providing at least one cylindrical microcantilever having a length of about 1 to about 200 μ

m, and a diameter of about 1 to about 50 μ

m.

19. The method as described in claim 18, wherein said step of providing at least one cylindrical microcantilever further comprises providing a tubular microcantilever, said tubular microcantilever having a wall thickness of about 0.3 to about 3.0 μ

m.

20. The method as described in claim 16, wherein the step of providing a transducer base comprising at least one spring element further further comprises providing said spring element composed of a material selected from the group consisting of ceramics, polymers, silicon nitride, germanium, germanium dioxide, zinc oxide, gallium arsenide, silicon oxide, and silicon compounds.

21. The method as described in claim 16, wherein the step of providing at least one material further comprises selecting said at least one material from the group consisting of silicon nitride, silicon oxide, iridium oxide, aluminum oxide, tantalum pentoxide, and pH sensitive polymers.

22. The method as described in claim 16, wherein the step of coating further comprises providing a layer of metal coated on said at least one surface having a coated region, said metal selected from the group consisting of gold, platinum, and noble metals.

23. The method as described in claim 22, wherein said step of coating further comprises coating an active insulator between said layer of metal and said at least one surface, said active insulator being selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, tantalum pentoxide, and iridium oxide.

24. The method as described in claim 16, wherein the step of coating further comprises coating an ion selective membrane on said at least one surface, said membrane selectively allowing ions to move through said membrane to said material on said coated region.

25. The method as described in claim 24, wherein said step of coating further comprises coating an active insulator between said membrane coating and said first surface, said active insulator being selected from the group consisting of silicon oxide, silicon nitride, aluminum oxide, tantalum pentoxide, and iridium oxide.

26. The method as described in claim 16, wherein the step of providing said deflection measuring means further comprises:

providing a reflective area on said spring element;

providing a laser light source, said source directing light at said reflective area;

positioning a light sensitive detector to receive light from said reflected area;

measuring reflected light from said reflective area;

providing a microprocessor for analyzing information from said positioning step and said measuring step;

estimating deflections of said spring element; and

correlating said deflections of said spring element with said parameters within said sample.

27. The method as described in claim 16, wherein the step of providing said deflection measuring means further comprises selecting from the group consisting of a laser detection means, a piezoresistive detection means, a piezoelectric detection means, a capacitive detection means, and a electron tunneling detection means, said detection means determines changes in deflection of said cantilever.

28. An apparatus for detecting and measuring physical and chemical parameters in a sample of monitored media, comprising:

a transducer base;

a plurality of cantilevered spring elements attached to said base, each of said spring elements comprising;

a surface having at least one coated region;

at least one material on said at least one coated region, said material accumulates a first surface charge in response to said parameter in said sample placed on or in close proximity to said coated region; and

a second surface on said spring element having a surface charge different than said first surface charge; and

a plurality of means for detecting deflections of each of said spring elements due to mechanical stresses established by different surface charges on said spring element surfaces, each means for detecting deflections associated with a respective one of said spring elements.

29. The apparatus as described by claim 28, wherein said at least one material further comprises at least one chemical that accumulates said surface charge in response to hydrogen ions in said sample of media.

30. The apparatus as described by claim 28, wherein said at least one material further comprises at least one chemical that accumulates said surface charge in response to a redox potential in said sample of media.

31. The apparatus as described by claim 28, wherein said at least one material further comprises an ion selective membrane, said membrane coated on said surface, said membrane allowing ions from said sample to selectively pass through said membrane to said material on said coated region, where said surface charge accumulates in response to ions on said coated region.

32. The apparatus as described by claim 28, wherein each of said plurality of cantilevered spring elements comprises a microcantilever having a different length of about 1 to about 200 μ

m, a width of about 1 to about 50 μ

m, and a thickness of about 0.3 to about 3.0 μ

m.