Vibration type angular velocity detector
First Claim
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1. A vibration type angular velocity detector comprising:
- a movable body comprising an axis in a direction corresponding to a z-axis, in a rectangular coordinate system established by an x-axis, a y-axis, and the z-axis;
driving piezoelectric elements affixed to said movable body for vibrating said movable body in a direction of the x-axis;
at least one reference piezoelectric element affixed to said movable body for detecting a vibration of said movable body in the x-axis direction and outputting a reference output in response to the vibration of said movable body in the x-direction;
at least one detecting piezoelectric element affixed to said movable body for detecting the vibration of said movable body in the y-axis direction in response to an angular velocity acting on said movable body where said movable body is vibrating in the x-axis direction;
a control mechanism for driving said driving piezoelectric elements to have opposite phases so that said movable body vibrates in the x-axis direction based on said reference output from said at least one reference piezoelectric element, said control mechanism comprising;
an exciting force generator for generating a y-axis direction exciting force based on said reference output so that a phase of the vibration of said movable body in the x-axis direction is shifted; and
an angular velocity detector for detecting the angular velocity based on said reference output and an output of said at least one detecting piezoelectric element indicative of the vibration of said movable body in the y-axis direction,wherein said control mechanism applies said y-axis direction exciting force to said movable body by driving said driving piezoelectric elements.
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Abstract
The output of a synchronous detector is made precise by reducing the offset included in the outputs of detecting piezoelectric elements. This is carried out by applying one y-axis direction exciting force to one movable piece from one pair of driving piezoelectric elements and another y-axis direction exciting force to another movable piece from another pair of driving piezoelectric elements.
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Citations
16 Claims
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1. A vibration type angular velocity detector comprising:
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a movable body comprising an axis in a direction corresponding to a z-axis, in a rectangular coordinate system established by an x-axis, a y-axis, and the z-axis; driving piezoelectric elements affixed to said movable body for vibrating said movable body in a direction of the x-axis; at least one reference piezoelectric element affixed to said movable body for detecting a vibration of said movable body in the x-axis direction and outputting a reference output in response to the vibration of said movable body in the x-direction; at least one detecting piezoelectric element affixed to said movable body for detecting the vibration of said movable body in the y-axis direction in response to an angular velocity acting on said movable body where said movable body is vibrating in the x-axis direction; a control mechanism for driving said driving piezoelectric elements to have opposite phases so that said movable body vibrates in the x-axis direction based on said reference output from said at least one reference piezoelectric element, said control mechanism comprising; an exciting force generator for generating a y-axis direction exciting force based on said reference output so that a phase of the vibration of said movable body in the x-axis direction is shifted; and an angular velocity detector for detecting the angular velocity based on said reference output and an output of said at least one detecting piezoelectric element indicative of the vibration of said movable body in the y-axis direction, wherein said control mechanism applies said y-axis direction exciting force to said movable body by driving said driving piezoelectric elements. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A vibration type angular velocity detector comprising:
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a movable body comprising an axis in a direction corresponding to a z-axis, in a rectangular coordinate system established by an x-axis, a y-axis, and the z-axis; driving piezoelectric elements affixed to said movable body for vibrating said movable body in said x-axis direction; at least one reference piezoelectric element affixed to said movable body for detecting a vibration of said movable body in the x-axis direction and for outputting a reference output in response to the vibration of said movable body in the x-axis direction; at least one detecting piezoelectric element affixed to said movable body for detecting the vibration of said movable body in the y-axis direction in response to an angular velocity acting on said movable body where said movable body is vibrating in the x-axis direction; a control mechanism for driving said driving piezoelectric elements to have opposite phases so that said movable body vibrates in the x-axis direction based on said reference output from said at least one reference piezoelectric element, said control mechanism comprising; an exciting force generator for generating a y-axis direction exciting force based on said reference output so that an offset included in a detecting element output of said at least one detecting piezoelectric element is reduced; and an angular velocity detector for detecting the angular velocity based on said reference output and said detecting element output, wherein said control mechanism applies said y-axis direction exciting force to said movable body by driving said driving piezoelectric elements. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A vibration type angular velocity detector comprising:
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a movable body comprising an axis in a direction corresponding to a z-axis, in a rectangular coordinate system established by an x-axis, a y-axis, and the z-axis; driving piezoelectric elements affixed to said movable body for vibrating said movable body in a direction of the x-axis; at least one reference piezoelectric element affixed to said movable body for detecting a vibration of said movable body in the x-axis direction and outputting a reference output in response to the vibration of said movable body in the x-direction; at least one detecting piezoelectric element affixed to said movable body for detecting the vibration of said movable body in the y-axis direction in response to an angular velocity acting on said movable body where said movable body is vibrating in the x-axis direction; control means for driving said driving piezoelectric elements to have opposite phases so that said movable body vibrates in the x-axis direction based on said reference output from said at least one reference piezoelectric element, said control means comprising; exciting force generating means for generating a y-axis direction exciting force based on said reference output so that a phase of the vibration of said movable body in the x-axis direction is shifted; and angular velocity detecting means for detecting the angular velocity based on said reference output and an output of said at least one detecting piezoelectric element indicative of the vibration of said movable body in the y-axis direction, wherein said control means applies said y-axis direction exciting force to said movable body by driving said driving piezoelectric elements.
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16. A vibration type angular velocity detector comprising:
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a movable body comprising an axis in a direction corresponding to a z-axis, in a rectangular coordinate system established by an x-axis, a y-axis, and the z-axis; driving piezoelectric elements affixed to said movable body for vibrating said movable body in said x-axis direction; at least one reference piezoelectric element affixed to said movable body for detecting a vibration of said movable body in the x-axis direction and for outputting a reference output in response to the vibration of said movable body in the x-axis direction; at least one detecting piezoelectric element affixed to said movable body for detecting the vibration of said movable body in the y-axis direction in response to an angular velocity acting on said movable body where said movable body is vibrating in the x-axis direction; control means for driving said driving piezoelectric elements to have opposite phases so that said movable body vibrates in the x-axis direction based on said reference output from said at least one reference piezoelectric element, said control means comprising; exciting force generating means for generating a y-axis direction exciting force based on said reference output so that an offset included in a detecting element output of said at least one detecting piezoelectric element is reduced; and angular velocity detecting means for detecting the angular velocity based on said reference output and said detecting element output, wherein said control means applies said y-axis direction exciting force to said movable body by driving said driving piezoelectric elements.
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Specification