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Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications

  • US 6,020,564 A
  • Filed: 06/04/1998
  • Issued: 02/01/2000
  • Est. Priority Date: 06/04/1998
  • Status: Expired due to Fees
First Claim
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1. A micro-electromechanic switch, comprising:

  • a flexible longitudinal beam having a first end and a second end, said flexible longitudinal beam disposed to electrically complete an electric circuit by way of a lateral bending motion of the flexible longitudinal beam upon the application of a force to at least one of said first and second ends, thereby causing an electrical contact between the flexible longitudinal beam and at least one electrode, wherein the electrical circuit is completed by the electrical contact;

    means for applying a force to at least one of said ends, said means comprising;

    at least one actuating beam connected to at least said one end; and

    at least one actuating member adjacent to said actuating beam for moving said actuating beam upon application of an electrostatic actuating force between said actuating beam and said actuating member.

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