Low-voltage long life electrostatic microelectromechanical system switches for radio-frequency applications

• US 6,020,564 A
• Filed: 06/04/1998
• Issued: 02/01/2000
• Est. Priority Date: 06/04/1998
• Status: Expired due to Fees

• Current Assignee: Wang Electro-Opto Corporation
• Original Assignee: Wang Electro-Opto Corporation
• Inventors: Thompson, Gregory T., Wang, Johnson J. H.
• Primary Examiner(s): SCOTT, JAMES R
• Application Number:
  US09/090,702
• Time in Patent Office: 607 Days
• Field of Search: 200/61.45 R, 200/61.48-61.51, 200/181, 333/101-108, 333/262
• US Class Current: 200/181
• CPC Class Codes: H01H 1/20 Bridging contacts for circuit breakers H01H73/045
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 2001/0084 with perpendicular movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01P 1/127 Strip line switches

Abstract

A micro-electromechanical switch which comprises a flexible longitudinal beam disposed adjacent to first and second contact members which form a gap in, for example, a radio frequency transmission line to control the flow of the radio frequency signal. At least one actuating beam is attached to at least one end of the flexible longitudinal beam. Also an actuating member is disposed adjacent to the actuating beam so as to generate an electrostatic force therebetween upon the application of a voltage across the actuating beam and the actuating member. When the voltage is applied, the actuating beam bends and thus applies a longitudinal force and torque on the joint between the actuating beam and the flexible longitudinal beam. This longitudinal force and torque cause the flexible longitudinal beam to bend laterally toward the first and second contact members, thereby completing the electrical circuit attached to the first and second contact members. In this invention, a small movement in the actuating beam causes a large lateral bending of the longitudinal beam; allowing good electrical performance, high isolation and low insertion loss with a small actuating voltage.

Claims

1. A micro-electromechanic switch, comprising:

a flexible longitudinal beam having a first end and a second end, said flexible longitudinal beam disposed to electrically complete an electric circuit by way of a lateral bending motion of the flexible longitudinal beam upon the application of a force to at least one of said first and second ends, thereby causing an electrical contact between the flexible longitudinal beam and at least one electrode, wherein the electrical circuit is completed by the electrical contact;

means for applying a force to at least one of said ends, said means comprising;

at least one actuating beam connected to at least said one end; and

at least one actuating member adjacent to said actuating beam for moving said actuating beam upon application of an electrostatic actuating force between said actuating beam and said actuating member.

2. The micro-electromechanic switch of claim 1, wherein said flexible longitudinal beam is disposed with a predetermined initial bend in the absence of a force.

3. The micro-electromechanic switch of claim 1, wherein said first end of said longitudinal beam is insulatably connected to said actuating beam and said second end of said longitudinal beam is attached to a substrate.

4. The micro-electromechanic switch of claim 1, wherein said actuating member is an electrode and said electrostatic actuating force is generated by the application of a voltage between said actuation beam and said electrode.

5. The micro-electromechanic switch of claim 4, wherein said flexible longitudinal beam and said actuating beam form an angle of less than 90°

.

6. The micro-electromechanic switch of claim 4, wherein said at least one actuating beam is connected to said at least one end of said flexible longitudinal beam with an angled member, said angled member being attached to both said flexible longitudinal beam and said actuating beam at angles of greater than 90°

.

7. The micro-electromechanic switch of claim 4, wherein said flexible longitudinal beam is structurally anisotropic in the direction of said lateral bending motion, said flexible longitudinal beam being predisposed to bend in a predetermined direction.

8. The micro-electromechanic switch of claim 4, further comprising a pair of said actuating beams and a pair of said electrodes disposed adjacent thereto, each said actuating beam having a moveable end connected to one of said first and second ends of said longitudinal beam, respectively, and, each said actuating beam having a fixed end attached to a substrate.

9. The micro-electromechanic switch of claim 4, said actuating beam having a fixed end, a moveable end, and a center portion therebetween, said fixed end and said moveable end having a cross-section less than a cross-section of said center portion.

10. The micro-electromechanic switch of claim 4, further comprising a dielectric member disposed between said actuating beam and said electrode.

11. The micro-electromechanic switch of claim 8, each said actuating beam having a center portion disposed between said fixed and moveable ends, said fixed ends and said moveable ends having a cross-section less than a cross-section of said center portions.

12. A micro-electromechanic switch, comprising:

a first contact member and a second contact member having a gap therebetween;

a flexible longitudinal beam adjacent to said first and second contact members, said flexible longitudinal beam having a first end and a second end and being characterized by a lateral bending that electrically bridges said gap upon the application of a force to at least one of said first and second ends;

at least one actuating beam connected to at least one of said first and second ends; and

at least one fixed actuating electrode disposed adjacent to said actuating beam sufficiently close thereto to create an electrostatic attraction between said actuating beam and said actuating electrode upon the application of a voltage therebetween.

13. The micro-electromechanic switch of claim 12, further comprising a dielectric material disposed between said actuating beam and said actuating electrode.

14. The micro-electromechanic switch of claim 12, said flexible longitudinal beam having a predetermined initial bend in the absence of said force.

15. The micro-electromechanic switch of claim 12, wherein said flex longitudinal beam is further characterized by arc-like lateral bending.

16. The micro-electromechanic switch of claim 12, wherein said flexible longitudinal beam is disposed with at least one weakened point between said first and second ends, resulting in multiple-arc bends.

17. The micro-electromechanic switch of claim 12, wherein said first and second contact members are adapted to be electrically interposed in a radio frequency (RF) transmission line.

18. A micro-electromechanic switch, comprising:

a first contact member and a second contact member having a gap therebetween, said first and second contact members being attached to a substrate;

a flexible longitudinal beam adjacent to said first and second contact members, said flexible longitudinal beam having a first end and a second end and being characterized by a lateral bending that electrically bridges said gap upon the application of a force to said first end, said second end being attached to said substrate;

an actuating beam having a moveable end and a fixed end, said moveable end being insulatably attached to said first end, and said fixed end being attached to said substrate; and

an electrode attached to said substrate adjacent to said actuating beam sufficiently close thereto to create an electrostatic attraction between said actuating beam and said electrode upon the application of a voltage therebetween.

19. A micro-electromechanic switch, comprising:

a first contact member and a second contact member having a gap therebetween, said first and second contact members being attached to a substrate;

a flexible longitudinal beam adjacent to said first and second contact members, said flexible longitudinal beam having a first end and a second end and being characterized by a lateral bending that electrically bridges said gap upon the application of a force to said first and second ends;

a first actuating beam having a first moveable end and a first fixed end, said first moveable end being insulatably attached to said first end of the longitudinal beam, and said first fixed end being attached to said substrate;

a second actuating beam having a second moveable end and a second fixed end, said second moveable end being insulatably attached to said second end of the longitudinal beam, and said second fixed end being attached to said substrate;

a first electrode attached to said substrate adjacent to said first actuating beam; and

a second electrode attached to said substrate adjacent to said second actuating beam, said first and second electrodes being sufficiently close to said first and second actuating beams to create an electrostatic attraction between respective said first and second actuating beams and said first and second electrodes upon the application of a voltage across said first and second actuating beams and said first and second electrodes.

20. A micro-electromechanic switch, comprising:

a first contact member and a second contact member having a gap therebetween, said first and second contact members being attached to a substrate;

a flexible longitudinal beam adjacent to said first and second contact members, said flexible longitudinal beam having a first end and a second end and being characterized by a lateral bending that electrically bridges said gap upon the application of a force to said first end, said second end being attached to said substrate;

an actuating beam attached to said first end;

a first electrode insulatably disposed on said actuating beam; and

a second electrode attached to said substrate adjacent to said first electrode and sufficiently close thereto to create an electrostatic attraction between said first and second electrodes upon the application of a voltage therebetween.