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Vertical cavity surface emitting laser for high power single mode operation and method of fabrication

  • US 6,021,147 A
  • Filed: 11/04/1997
  • Issued: 02/01/2000
  • Est. Priority Date: 11/04/1997
  • Status: Expired due to Term
First Claim
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1. A vertical cavity surface emitting laser device comprising:

  • a substrate having a surface;

    a first stack of distributed Bragg reflectors disposed on the surface of the substrate;

    an active region disposed on the first stack of distributed Bragg reflectors;

    a second stack of distributed Bragg reflectors disposed on the active region; and

    an isolation layer disposed on the second stack of distributed Bragg reflectors, the isolation layer including one of amorphous silicon or polysilicon and having an index of refraction greater than an index of refraction of the first and second stacks of distributed Bragg reflectors.

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