Acceleration sensor including an acceleration detection element bonded to a circuit substrate with a conductive bonding material

• US 6,021,671 A
• Filed: 08/05/1998
• Issued: 02/08/2000
• Est. Priority Date: 08/06/1997
• Status: Expired due to Term

• Current Assignee: Murata Manufacturing Co Limited
• Original Assignee: Murata Manufacturing Co Limited
• Inventors: Kami, Keiichi, Tabota, Jun
• Primary Examiner(s): Williams, Hezron
• Assistant Examiner(s): Kwok, Helen C.
• Application Number:
  US09/129,494
• Time in Patent Office: 552 Days
• Field of Search: 73/514.34, 73/514.16, 73/431, 73/654, 73/493, 73/497, 310/315, 310/319, 310/329, 310/311, 310/333
• US Class Current: 73/514.34
• CPC Class Codes: G01P 15/0915 of the shear mode type

Abstract

An acceleration sensor includes a circuit substrate and an acceleration detection element. The acceleration detection element is mounted on the circuit substrate and formed by using a piezoelectric body and is constructed so as to detect an acceleration which acts in a shearing direction. An electrode formed on the circuit substrate and an electrode on the bottom surface of the acceleration detection element are bonded together via a conductive bonding material so that they do not have direct contact with each other.

Claims

1. An acceleration sensor, comprising:

a circuit substrate; and

an acceleration detection element mounted on said circuit substrate and including a piezoelectric body, said acceleration detection element being constructed so as to detect an acceleration which acts in a shearing direction,

wherein an electrode formed on said circuit substrate and an electrode on the bottom surface of said acceleration detection element are bonded together via a conductive bonding material so that said electrodes do not have direct contact with each other, said conductive bonding material having a thickness in a range of 40 to 1,000 μ

m.

8. An acceleration sensor according to claim 1 or 2, wherein said conductive bonding material is made of a conducive paste.

2. An acceleration sensor, comprising:

a circuit substrate; and

an acceleration detection element, said acceleration detection element including first and second piezoelectric elements, each of the first and second piezoelectric elements including a piezoelectric body, a first electrode formed on the top surface of the piezoelectric body, a second electrode formed on the bottom surface and a polarization direction, the polarization directions of the piezoelectric bodies of the first and second piezoelectric elements being parallel to the top surface and the bottom surface of the piezoelectric body, and the polarization direction of the piezoelectric body of the first piezoelectric element and the polarization direction of the piezoelectric body of the second piezoelectric element being opposite to each other, the first electrode of the first piezoelectric element and the first electrode of the second piezoelectric element being electrically connected to each other, and the second electrodes of the first and second piezoelectric elements being bonded to respective electrodes on said circuit substrate by conductive bonding material such that there is no contact between said second electrodes and said electrodes on said circuit substrate, said conductive bonding material having a thickness in a range of 40 to 1,000 μ

m.

3. An acceleration sensor according to claim 2, further comprising:

weights fixed onto the first and second piezoelectric elements.

4. An acceleration sensor according to claim 2, further including insulating bonding material between said first and second piezoelectric elements and said circuit substrate.

5. An acceleration sensor according to claim 2, wherein said conductive bonding material comprises first and second non-conductive elements having a conductive film.

6. An acceleration sensor according to claim 5, wherein the first and second non-conductive elements each have at least one hole extending from a surface thereof in contact with one of said second electrodes to a surface in contact with one of said electrodes on said circuit substrate and conductive material in said hole to electrically connect such second electrode and such electrode on said circuit substrate.

7. An acceleration sensor according to claim 2, wherein the bottom surfaces of said first and second piezoelectric elements have adjacent cut-out portions and said second electrodes are not on said adjacent cut-out portions.

9. An acceleration sensor, comprising:

a circuit substrate having a pair of electrodes thereon;

an acceleration detection element, including first and second piezoelectric elements, each of the first and second piezoelectric elements including a piezoelectric body, a second electrode formed on the bottom surface and a polarization direction, the polarization directions of the piezoelectric bodies of the first and second piezoelectric elements being parallel to the top surface and the bottom surface of the piezoelectric body, and

the polarization direction of the piezoelectric body of the first piezoelectric element and the polarization direction of the piezoelectric body of the second piezoelectric element being opposite to each other, a first electrode of the first piezoelectric element and a first electrode of the second piezoelectric element being electrically connected to each other,

a conductive paste bonding the second electrodes of the first and second piezoelectric elements to the pair of electrodes on the circuit substrate such that the second electrodes and the pair of electrodes do not have direct contact with each other; and

an insulating bonding material being provided at a periphery of the conductive paste,

wherein each of the first and second piezoelectric elements has cut-out portions provided so as to prevent a short-circuit between the second electrodes of the first and second piezoelectric elements.

10. An acceleration sensor according to claim 9, further comprising weights fixed onto the first and second piezoelectric elements.

11. An acceleration sensor according to claim 9, wherein said cut-out portions are disposed adjacent each other so as to face each other at the bottom surfaces of said first and second piezoelectric elements and said second electrodes are not on said adjacent cut-out portions.