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System and method for controlling pressure

  • US 6,022,483 A
  • Filed: 03/10/1998
  • Issued: 02/08/2000
  • Est. Priority Date: 03/10/1998
  • Status: Expired due to Term
First Claim
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1. A method of controlling pressure in a chamber, the chamber having an exhaust valve having an associated position, the method comprising the steps of:

  • (a) defining a pressure setpoint;

    (b) measuring the pressure in the chamber;

    (c) computing, as a linear function of the measured pressure and the pressure setpoint, a control variable representing a desired exhaust gas flow from the chamber;

    (d) computing, as a function of the control variable and the measured pressure, a desired valve position using an inverse conductance curve function;

    (e) adjusting the position of the exhaust valve based on the desired valve position so as to establish a chamber pressure associated with the pressure setpoint.

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