Laser assisted polishing
First Claim
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1. A method for laser assisted polishing of a material layer to a desired surface, the method comprising the steps of:
- (a) setting up a laser beam to ablate spurious material from the material layer at the desired surface and thereabove;
(b) scanning the laser beam across the material layer such that consecutive laser beam pulses irradiate substantially non-overlapping portions of the material layer and laser beam pulses from substantially different directions successively irradiate a given area of the material layer; and
(c) repeating steps (a) and (b) for two or more consecutively lower altitudes above the desired surface whereupon the laser beam has an average emergent fluence substantially equal to the laser ablation threshold of the material layer, at least the lowermost altitude coinciding with the desired surface.
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Abstract
A method for laser assisted polishing of a material layer to a desired surface, the method including the steps of setting up a laser beam in an XYZ coordinate system to ablate spurious material from the material layer at the desired surface and thereabove and scanning the laser beam across the material layer such that consecutive laser beam irradiate at least partially non-overlapping portions of the material layer and laser beam pulses from different directions in the XYZ coordinate system successively irradiate a given area of the material layer.
60 Citations
8 Claims
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1. A method for laser assisted polishing of a material layer to a desired surface, the method comprising the steps of:
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(a) setting up a laser beam to ablate spurious material from the material layer at the desired surface and thereabove; (b) scanning the laser beam across the material layer such that consecutive laser beam pulses irradiate substantially non-overlapping portions of the material layer and laser beam pulses from substantially different directions successively irradiate a given area of the material layer; and (c) repeating steps (a) and (b) for two or more consecutively lower altitudes above the desired surface whereupon the laser beam has an average emergent fluence substantially equal to the laser ablation threshold of the material layer, at least the lowermost altitude coinciding with the desired surface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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Specification