Micro-viscosity sensor and lubrication analysis system employing the same
First Claim
1. A micro-viscosity sensor for sensing the viscosity of a fluid, comprising:
- at least one sensing element on a semiconductor base exposed to the fluid, the at least one sensing element adapted to be oscillated over a range of frequencies as driven by an electrical power applied thereto;
wherein the viscosity of the fluid is determined as a function of the power required to maintain oscillation of the at least one sensing element at a predetermined frequency, the predetermined frequecy being different than a natural resonant frequency of the at least one sensing element.
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Abstract
A micro-viscosity sensor for measuring the viscosity of a lubricant. The micro-viscosity sensor including at least one finger-like element or an array of finger-like elements vertically extending from the surface of a semiconductor base, the at least one finger-like element being oscillated at a desired frequency. The power required to oscillate the at least one-finger-like element is monitored because the power required is a function of the viscosity of the lubricant. The sensor also includes a temperature detector, wherein the thermal conductivity of the temperature detector varies in correspondence with the temperature of the lubricant. A first set of electrical contacts provides for electrical connection to the at least one finger-like element; and a second set of electrical contacts provides for electrical connection to the temperature detector. The viscosity of the lubricant is determined based on the temperature of the lubricant correlated with the power required to oscillate the at least one-finger like element at a particular frequency.
115 Citations
36 Claims
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1. A micro-viscosity sensor for sensing the viscosity of a fluid, comprising:
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at least one sensing element on a semiconductor base exposed to the fluid, the at least one sensing element adapted to be oscillated over a range of frequencies as driven by an electrical power applied thereto; wherein the viscosity of the fluid is determined as a function of the power required to maintain oscillation of the at least one sensing element at a predetermined frequency, the predetermined frequecy being different than a natural resonant frequency of the at least one sensing element. - View Dependent Claims (2, 3, 4)
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5. A micro-viscosity sensor for sensing the viscosity of a fluid, comprising:
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an array of finger-like elements vertically extending from the surface of a semiconductor base, the array of finger-like elements being oscillated at a pre-determined frequencies driven by an electrical power appleid thereto; wherein the power required to maintain oscillation of the array of finger-like elements at the pre-determined frequency corresponds to the viscosity of the fluid. - View Dependent Claims (6, 7, 8, 9, 10)
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11. A lubricant analysis system, comprising:
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at least one micro-viscosity sensor, including; an array of finger-like elements extending perpendicular to the surface of a semiconductor base, the array of finger-like elements being oscillated at a predetermined frequency as driven by an electrical power applied thereto, wherein the power required to maintain oscillation of the array of finger-like elements at the pre-determined frequency corresponds to the viscosity of the fluid, the pre-determined frequency being different than a natural resonant frequency of the finger-like elements; a lubrication analyzer, including; a processor operatively coupled to the at least one micro-viscosity sensor, the processor adapted to process data output from the at least one micro-viscosity sensor to determine the viscosity of the fluid. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19)
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20. A method for fabricating a micro-viscosity sensor, comprising the steps of:
etching a semiconductor substrate to form an array of finger-like elements which extend perpendicularly from a base of the substrate, the array of finger-like elements adapted to oscillate over a range of frequencies as driven by an electrical power apllied thereto, wherein the power required to maintain oscillation of the array of finger-like elements at a particular frequency corresponds to the viscosity of a fluid being sensed, the particular frequency being different than a natural resonant frequency of the array of finger-ike elements. - View Dependent Claims (21, 22, 23, 24, 25)
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26. A micro-viscosity sensor for measuring the viscosity of a lubricant, comprising:
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at least one finger-like element extending from the surface of a semiconductor base, the at least one finger-like element operative to be oscillated over a range of frequencies as driven by an electrical power applied thereto; a temperature detector, wherein the conductivity of the temperature detector varies in correspondence with the temperature of the lubricant; a first set of electrical contacts for providing electrical connection to the at least one finger-like element; and a second set of electrical contacts for providing electrical connection to the temperature detector; wherein the power required to maintain oscillation of the at least one finger-like element at a particular frequency corresponds to the viscosity of the fluid being sensed, the particular freqency being different than a natural resonant frequency of the at least one finger-like element. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34)
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35. A method for sensing the viscosity of a fluid, comprising the steps of:
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oscillating at least one element extending from the surface of a semiconductor base, the at least one element operative to be oscillated over a range of frequencies as driven by an electrical power applied thereto; using a temperature detector to measure the temperature of the fluid, wherein the conductivity of the temperature detector varies in correspondence with the temperature of the lubricant; and determining the power required to maintain oscillation of the at least one element at a particular frequency, the particular frequency being different than a natural resonant frequency of the at least one element; wherein the power required is a function of the viscosity of the fluid.
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36. A viscosity sensing system, comprising:
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at least one micro-viscosity sensor, including; an array of finger-like elements extending from the surface of a semiconductor base, the array of elements finger-like being oscillated at a predetermined frequency, wherein the power required to maintain oscillation of the array of finger-like elements at the pre-determined frequency corresponds to the viscosity of the fluid; a lubrication analyzer, including; a processor operatively coupled to the at least one micro-viscosity sensor, the processor adapted to process data output from the at least one micro-viscosity sensor to determine the viscosity of the fluid wherein the integrated viscosity sensing system provides for in situ monitoring of the fluid.
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Specification