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Micromachined rate and acceleration sensor

  • US 6,023,972 A
  • Filed: 07/11/1997
  • Issued: 02/15/2000
  • Est. Priority Date: 02/08/1991
  • Status: Expired due to Fees
First Claim
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1. An angular rate sensor comprising:

  • a) a generally planar substrate, having an angular rate sensing axis and a vibration axis normal to each other and parallel to a plane of said substrate;

    b) a mounting frame formed in said substrate;

    c) a first accelerometer formed in said substrate and located within said mounting frame on a first side of said angular rate sensing axis, said first accelerometer includinga first accelerometer frame,a first proof mass located within said first accelerometer frame,a first flexure rotatably attaching a first end of said first proof mass to said first accelerometer frame,a first suspension member connecting a second end of said first proof mass to said first accelerometer frame, anda first force detector connected between said first proof mass and said first accelerometer frame;

    d) a second accelerometer formed in said substrate, located within said mounting frame on a second side of said angular rate sensing axis, said second accelerometer includinga second accelerometer frame,a second proof mass located within said second accelerometer frame,a second flexure rotatable attaching a first end of said second proof mass to said second accelerometer frame,a second suspension member connecting a second end of said second proof mass to said second accelerometer frame and a second force detector connected between said second proof mass and said second accelerometer frame;

    e) a first and second frame flexure connecting said first and second accelerometer frames to said mounting frame;

    f) a link member mechanically coupling said first accelerometer to said second accelerometer;

    g) vibration means for vibrating said first and second accelerometers along said vibration axis at a predetermined frequency; and

    h) processing means responsive to said first and second force detectors for generating an angular rotation signal representing the angular rotation of the sensor about said angular rate axis.

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