Pressure transducer with error compensation from cross-coupling outputs of two sensors
DCFirst Claim
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1. A pressure transducer comprising:
- a first sensor; and
a second sensor;
the first and second sensors having substantially similar error characteristics, each of the first and second sensors being arranged to be subjected to at least one of a first pressure and a second pressure and to provide an output indicative of the pressure exerted thereon, the outputs of the sensors being electrically cross-coupled to each other so that an error in the first sensor is compensated with a substantially similar error in the second sensor.
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Abstract
A pressure transducer that includes at least two sensors having substantially similar or substantially identical error characteristics, wherein each sensor is arranged to be subjected to an applied pressure and the outputs of the sensors are electrically coupled so that errors associated with one sensor are compensated by errors associated with the other sensor. The sensors may be substantially identical silicon sensors formed in close proximity on the same wafer.
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Citations
40 Claims
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1. A pressure transducer comprising:
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a first sensor; and a second sensor; the first and second sensors having substantially similar error characteristics, each of the first and second sensors being arranged to be subjected to at least one of a first pressure and a second pressure and to provide an output indicative of the pressure exerted thereon, the outputs of the sensors being electrically cross-coupled to each other so that an error in the first sensor is compensated with a substantially similar error in the second sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A pressure transducer comprising:
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a first base member; a second base member; a first sensor and a second sensor having substantially similar error characteristics, the first sensor being disposed on the first base member and the second sensor being disposed on the second base member; an interface member disposed between the first base member and the second base member to define a first cavity about the first sensor; and a cover disposed on the second base member to define a second cavity about the second sensor; the first and second sensors being fluidly and electrically coupled so that an error in the first sensor is compensated with a substantially similar error in the second sensor. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30)
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31. A method of forming a pressure transducer with error compensation, the method comprising steps of:
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(a) selecting first and second sensors having substantially similar characteristics, each sensor providing an output indicative of pressure exerted thereon; (b) fluidly coupling the first and second sensors so that each sensor is arranged to be subjected to a first pressure and a second pressure; and (c) electrically cross-coupling the outputs of the first and second sensors so that an error in the first sensor is compensated with a substantially similar error in the second sensor. - View Dependent Claims (32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification