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High speed topography measurement of semi-diffuse objects

  • US 6,024,449 A
  • Filed: 07/13/1998
  • Issued: 02/15/2000
  • Est. Priority Date: 07/13/1998
  • Status: Expired due to Fees
First Claim
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1. A system for rapidly measuring the topography of a semidiffuse target surface comprising:

  • a projection source means comprising a laser producing a pulsed plane polarized light beam having a substantially uniform intensity cross section, said light beam passing through a mask, said mask having apertures to form a grid pattern, said light beam through said grid pattern projecting sharply defined bright and dark areas on the semi-diffuse target surface;

    a video camera means comprising a polarizing filter, image forming optics and a CCD (charge coupled device), said camera forming on the CCD an image of the grid pattern projected on said target surface, the polarizing filter blocking specular reflected light and passing diffuse reflected light from said image on the target surface;

    a focussing means whereby said projection source and the video camera are mounted on a common platform, said platform being movable as to maintain focus and positioning of the grid pattern on the CCD;

    a master clock producing low jitter constant frequency pulses;

    a frequency divider receiving pulses from said master clock and delivering pulses at a reduced repetition rate to the CCD so that a single pixel readout occurs for each of the reduced repetition rate pulses, said readout resulting in an output voltage from the CCD proportional to pixel light intensity;

    a master clock counter giving a count of all pulses from said master clock over a time period corresponding to a complete readout of the pixels of the CCD, said count precisely identifying the pixel location on the CCD;

    an analog circuit assembly consisting of a differentiator, zero crossing detector, and gate circuit, said assembly enabling the capture of the master clock count at an instant when a voltage peak corresponding to a light intensity peak is outputted by the CCD and when said voltage peak is above a threshold value;

    a digital register, into said register is stored the master clock count at the instant an enabling pulse is issued by said gate circuit;

    an analog to digital converter producing a digital equivalent of the CCD output voltage, said digital equivalent being stored in said digital register simultaneous with storage of said master clock count, said converter being used to provide a feedback signal to automatically control movement of said platform;

    a digital computing means, either in an application specific integrated circuit (ASIC) or computer based, performing in real time the functions of temporary storage, averaging, interpolation, error correction, topography calculation and displays.

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