×

Method of reducing agglomerate particles in a polishing slurry

  • US 6,024,829 A
  • Filed: 05/21/1998
  • Issued: 02/15/2000
  • Est. Priority Date: 05/21/1998
  • Status: Expired due to Term
First Claim
Patent Images

1. A method for reducing agglomerate particles in a polishing slurry having a design particle size that is to be dispensed by a slurry dispensing system, comprising:

  • transferring said polishing slurry by said slurry dispensing system from a slurry source to an energy source coupled to said slurry dispensing system, said slurry forming an agglomerate within said slurry dispensing system, said agglomerate having an agglomerated particle size substantially larger than said design particle size;

    subjecting said agglomerate to energy emanating from said energy source; and

    transferring energy from said energy source to said agglomerate to reduce said agglomerated particle size to substantially said design particle size.

View all claims
  • 14 Assignments
Timeline View
Assignment View
    ×
    ×