Sputtering apparatus with a rotating magnet array having a geometry for specified target erosion profile

• US 6,024,843 A
• Filed: 08/27/1992
• Issued: 02/15/2000
• Est. Priority Date: 05/22/1989
• Status: Expired due to Term

• Current Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Original Assignee: Novellus Systems Incorporated (Lam Research Corporation)
• Inventors: Anderson, Robert L., Helmer, John C.
• Primary Examiner(s): NGUYEN, NAM X
• Application Number:
  US07/936,865
• Time in Patent Office: 2,728 Days
• Field of Search: 204/298.16, 204/298.17, 204/298.19, 204/298.18, 204/298.2, 204/298.21, 204/298.22, 204/192.12
• US Class Current: 204/192.12
• CPC Class Codes: C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering C23C14/3457 takes precedence
• CPC Class Codes: H01J 37/3408 Planar magnetron sputtering
• CPC Class Codes: H01J 37/3455 Movable magnets

Abstract

A magentron sputtering apparatus includes a rotatable magnet which is either concave or convex. For one magnet structure, at least a portion of the centerline of the magnet lies along a curve defined by ##EQU1## where ξ(r) is a preselected erosion profile. When stationary, the magnet generates a localized magnetic field of approximately constant width. In operation, when the magnet is rotated, it generates the preselected erosion profile in the target. The preselected erosion profile may be constant.

Claims

1. A magnetron sputter apparatus comprising:

a vacuum chamber;

means for holding a target having a concave front surface in said vacuum chamber, said front surface being a surface of revolution; and

rotatable magnetic means defining a normalized centerline for generating a magnetic field over said front surface of said target,

said magnetic means being configured so that at least a first portion of the normalized centerline of said magnetic means is describable by an equation of the form ##EQU41## where ξ

(r) is a preselected normalized erosion profile to be generated in said target during rotation of said magnetic means, z(r) defines said surface of revolution, C is a selected constant, and θ

has a selected range between 0 and π

, r is the distance from the axis of rotation divided by the width of the magnet array assembly times a constant.

2. A sputtering apparatus as in claim 1 wherein said preselected erosion profile ξ

(r) is constant and said first portion is describable by an equation of the form ##EQU42## where C is a selected constant.

3. A sputtering apparatus as in claim 1 wherein said centerline forms a closed curve and each portion of said curve is described by an equation of said form for a selected choice of C and a selected range of θ

.

4. A sputtering apparatus as in claim 1 wherein a second portion of said centerline is symmetrical with respect to said first portion.

5. A sputtering apparatus as in claim 1 including a first and a second pole pieces each uniformly spaced from said first portion over most of said portion in order to distribute the magnetic field generated by said magnetic means uniformly along said first portion.

6. A sputtering apparatus as in claim 5 wherein said means for holding are flexible.

7. The sputtering apparatus of claim 1 wherein said normalized centerline is also the centerline of said magnetic field.

8. A magnetron sputter apparatus comprising:

a vacuum chamber;

means for holding a target having a convex front surface in said vacuum chamber, said front surface being a surface of revolution; and

rotatable magnetic means defining a normalized centerline for generating a magnetic field over said front surface of said target,

said magnetic means being configured so that at least a first portion of the normalized centerline of said magnetic means is describable by an equation of the form ##EQU43## where ξ

(r) is a preselected normalized erosion profile to be generated in said target during rotation of said magnetic means, z(r) defines said surface of revolution, C is a selectd constant, and θ

has a selected range between 0 and π

, r is the distance from the axis of rotation divided by the width of the magnet array assembly times a constant.

9. A sputtering apparatus as in claim 8 wherein said preselected erosion profile ξ

(r) is constant and said first portion is describable by an equation of the form ##EQU44## where C is a selected constant.

10. A sputtering apparatus as in claim 8 wherein said centerline forms a closed curve and each portion of said curve is described by an equation of said form for a selected choice of C and a selected range of θ

.

11. A sputtering apparatus as in claim 8 wherein a second portion of said centerline is symmetrical with respect to said first portion.

12. A sputtering apparatus as in claim 8 including a first and a second pole pieces each uniformly spaced from said first portion over most of said portion in order to distribute the magnetic field generated by said magnetic means uniformly along said first portion.

13. A sputtering apparatus as in claim 12 wherein said retaining means are flexible.

14. The sputtering apparatus of claim 8 wherein said normalized centerline is also the centerline of said magnetic field.

15. A magnetron sputtering apparatus comprising:

a vacuum chamber;

a target cathode in said vacuum chamber having a non-planar front surface comprising material to be sputtered and a back surface;

a plurality of individual magnets for generating a magnetic field over said front surface, said plurality of individual magnets being positioned behind said back surface and rotatable about an axis which passes through the front and back surfaces of the target cathode;

said plurality of individual magnets comprising a plurality of segments joined to form a closed loop disposed about said axis, wherein said plurality of individual magnets are disposed on a centerline defining said closed loop, and further wherein the shape of at least two of said segments substantially conforming to a mathematical equation selected to produce a desired erosion pattern over a substantial portion of said target front surface; and

spaced-apart keepers for holding said plurality of individual magnets in position, said keepers substantially conforming to the shape of said centerline and offset therefrom.

16. The sputtering apparatus of claim 15 wherein said spaced-apart keepers are made of magnetic material and serve as magnetic pole pieces for said plurality of individual magnets.

17. A sputter source comprising:

a vacuum chamber;

a target cathode;

a closed-loop magnet positioned behind said target cathode, said closed-loop magnet being rotatable about an axis which passes through said target cathode, said closed-loop magnet having a shape which conforms to the shape of said target cathode; and

said closed-loop magnet further being shaped such that when said closed-loop magnet is rotated, the total arc length of the portions of said closed-loop magnet which pass beneath a point on said target cathode surface a distance R from the axis of rotation is substantially proportional to ξ

(R)×

R, for values of R>

R₀, where ξ

(R) is a trigonometric function corresponding to a desired erosion profile and R₀ is a constant.

18. A sputter source comprising:

a vacuum chamber;

a target cathode;

a closed-loop magnet positioned behind said target cathode, said closed-loop magnet being rotatable about an axis which passes through said target cathode, said closed-loop magnet having a shape which conforms to the shape of said target cathode; and

said closed-loop magnet further being shaped such that when said closed-loop magnet is rotated, the total arc length of the portions of said closed-loop magnet which pass beneath a point on said target cathode surface a distance R from the axis of rotation is substantially proportional to ξ

(R)×

R, for values of R>

R₀, where ξ

(R) is a step function corresponding to a desired erosion profile and R₀ is a constant.

19. A sputter source comprising:

a vacuum chamber;

a target cathode;

a closed-loop magnet positioned behind said target cathode, said closed-loop magnet being rotatable about an axis which passes through said target cathode, said closed-loop magnet having a shape which conforms to the shape of said target cathode; and

said closed-loop magnet further being shaped such that when said closed-loop magnet is rotated, the total arc length of the portions of said closed-loop magnet which pass beneath a point on said target cathode surface a distance R from the axis of rotation is substantially proportional to ξ

(R)×

R. for values of R>

R₀, where ξ

(R) is a non-constant linear function corresponding to a desired erosion profile and R₀ is a constant.

20. A sputter source comprising:

a vacuum chamber;

a target cathode;

a closed-loop magnet positioned behind said target cathode, said closed-loop magnet being rotatable about an axis which passes through said target cathode, said closed-loop magnet having a shape which conforms to the shape of said target cathode, wherein said closed-loop magnet comprises closed-loop magnetic pole pieces and an array of spaced-apart permanent magnets positioned between said closed-loop magnetic pole pieces; and

said closed-loop magnet further being shaped such that when said closed-loop magnet is rotated, the total arc length of the portions of said closed-loop magnet which pass beneath a point on said target cathode surface a distance R from the axis of rotation is substantially proportional to ξ

(R)×

R, for values of R>

R₀, where ξ

(R) is a selected function corresponding to a desired erosion profile and R₀ is a constant.

21. A magnetron device, comprising:

a vacuum chamber,

a cathode having a front surface within said vacuum chamber,

closed-loop magnet means positioned behind said cathode, said closed-loop magnet means being rotatable about an axis which passes through said cathode front surface and having a shape which conforms to the shape of the said cathode front surface,

said closed-loop magnet means comprising a plurality of substantially identical individual magnets located between two closed-loop magnetic pole pieces, the distance between said pole pieces being substantially constant over substantially the entire loop.

22. The magnetron device of claim 21 wherein the distance between said pole pieces is small in comparison to the size of the cathode.

23. The magnetron device of claim 21 wherein the pole pieces are positioned a constant distance behind the surface of the cathode.

24. The magnetron device of claim 21 wherein the pole pieces are spaced equidistant from a centerline therebetween, and wherein said centerline lies on a curve defined by a mathematical equation.

25. The magnetron device of claim 24 wherein the centerline of each of said individual magnets is perpendicular to the centerline of said pole pieces and each of said individual magnets is equally spaced apart from its neighbors.

26. The magnetron device of claim 21 wherein said closed loop is generally heart-shaped.

27. The magnetron device of claim 21 wherein said closed loop comprises multiple lobes and is mechanically balanced.

28. The magnetron device of claim 21 wherein said closed loop is asymmetrical.

29. The magnetron device of claim 21 wherein said pole pieces are flexible.

30. The magnetron device of claim 21 wherein said pole pieces are mounted on a rotating plate.

31. A method of making a magnetron sputtering apparatus, comprising the steps of:

providing a sputter target having a front surface adapted to being positioned within a vacuum chamber;

selecting a desired erosion profile for a portion of said target front surface, said erosion profile being expressible as a mathematical equation;

positioning a rotatable magnet behind said target front surface for generating a closed-loop magnetic field above said front surface, said rotatable magnet comprising joined segments having a shape conforming to a mathematical equation calculated to produce said desired erosion profile; and

bending two flexible pole pieces into calculated closed-loop shapes that are evenly spaced apart, and disposing a plurality of individual magnets on the centerline between said pole pieces.