Spacer-based antifuse structure for low capacitance and high reliability and method of fabrication thereof
First Claim
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1. An antifuse structure comprising:
- a base;
a first electrode formed on said base, said first electrode having above said base a top surface and a pair of side surfaces, said top surface having a width;
antifuse material formed over said first electrode and disposed over the top surface of said first electrode and said side surfaces of said first electrode, so that at least a portion of the functioning antifuse material lies along a first one of the side surfaces of said first electrode;
a second electrode laterally offset from said first and spaced from said first electrode by said antifuse material, said second electrode laterally overlapping only a portion of said top surface of said first electrode by a predetermined amount less than the width of the top surface of said first electrode, and a portion of the second electrode is disposed alone but spaced from at least a portion of the first side surface; and
said first electrode has a contact contacting said top surface through said antifuse material and said second electrode has a separate contact laterally offset from and not overlapping said first electrode.
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Abstract
The present antifuse includes a base having a first electrode thereon which defines a top surface and a side surface. Antifuse material is disposed on the first electrode on at least a portion of the top surface and at least a portion of the side surface, with a second electrode on the antifuse material. Due to this configuration, defect problems in etching oxide as part of the antifuse structure are avoided, and meanwhile capacitance of the device is very low.
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Citations
6 Claims
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1. An antifuse structure comprising:
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a base; a first electrode formed on said base, said first electrode having above said base a top surface and a pair of side surfaces, said top surface having a width; antifuse material formed over said first electrode and disposed over the top surface of said first electrode and said side surfaces of said first electrode, so that at least a portion of the functioning antifuse material lies along a first one of the side surfaces of said first electrode; a second electrode laterally offset from said first and spaced from said first electrode by said antifuse material, said second electrode laterally overlapping only a portion of said top surface of said first electrode by a predetermined amount less than the width of the top surface of said first electrode, and a portion of the second electrode is disposed alone but spaced from at least a portion of the first side surface; and
said first electrode has a contact contacting said top surface through said antifuse material and said second electrode has a separate contact laterally offset from and not overlapping said first electrode. - View Dependent Claims (2, 3, 4, 5, 6)
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Specification