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Polarization characteristic measuring method and apparatus

  • US 6,025,917 A
  • Filed: 05/01/1998
  • Issued: 02/15/2000
  • Est. Priority Date: 09/24/1996
  • Status: Expired due to Term
First Claim
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1. A polarization characteristic measuring method using beam splitting means for reflecting one of a first beam for irradiation of a sample and a second beam emitted from said sample and for transmitting the other, said polarization characteristic measuring method being adapted for guiding said first beam via said beam splitting means onto said sample, thereby effecting irradiation of the sample, and for measuring a polarization characteristic of said second beam emitted from said sample under the irradiation and traveling via said beam splitting means,said polarization characteristic measuring method comprising:

  • a first step of measuring an intensity Ipp of a p-polarized component and an intensity Ips of an s-polarized component of said second beam emitted when said sample is irradiated with said first beam in the form of p-polarized light with respect to said beam splitting means;

    a second step of measuring an intensity Isp of a p-polarized component and an intensity Iss of an s-polarized component of said second beam emitted when said sample is irradiated with said first beam in the form of s-polarized light with respect to said beam splitting means;

    a third step of calculating a polarization response correction factor G according to the following equation;

    
    
    space="preserve" listing-type="equation">G=[(I.sub.pp ·

    I.sub.sp)/(I.sub.ps ·

    I.sub.ss)].sup.1/2 ; and

    a fourth step of performing polarization response correction based on said polarization response correction factor G to obtain the polarization characteristic of said second beam.

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