Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system

• US 6,026,677 A
• Filed: 11/06/1997
• Issued: 02/22/2000
• Est. Priority Date: 10/01/1993
• Status: Expired due to Term

• Current Assignee: Hysitron Incorporated (Bruker Corporation)
• Original Assignee: Hysitron Incorporated (Bruker Corporation)
• Inventors: Bonin, Wayne A.
• Primary Examiner(s): LARKIN, DANIEL SEAN
• Application Number:
  US08/965,332
• Time in Patent Office: 838 Days
• Field of Search: 73/105, 73/862.626, 73/862.628, 73/718, 73/720, 73/724, 361/271, 361/280, 361/281, 361/283.1, 361/283.2, 361/283.3, 361/283.4
• US Class Current: 73/105
• CPC Class Codes: B82Y 35/00 Methods or apparatus for measurement or analysis of nanostructures
• CPC Class Codes: G01G 7/06 by electrostatic action
• CPC Class Codes: G01N 2203/0051 Piezoelectric means
• CPC Class Codes: G01N 2203/0623 using piezoelectric gauges
• CPC Class Codes: G01N 3/42 by performing impressions under a steady load by indentors, e.g. sphere, pyramid G01N3/54 takes precedence
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01Q 60/366 Nanoindenters, i.e. wherein the indenting force is measured
• CPC Class Codes: Y10S 977/872 Positioner

Abstract

A force, weight or position sensor unit and sensor element incorporated into an apparatus for microindentation hardness testing and surface imaging which allows immediate imaging of the surface subsequent to hardness testing. The sensor uses a multi-capacitor system having drive and pick-up plates mounted on an appropriate suspension system to provide the desired relative motion when a force is applied to the pick-up plate. The output signal is run through a buffer amplifier and synchronously demodulated to produce a signal proportional to force or displacement. The sensor element is mounted on a scanning tunneling microscope base and a sample mounted on the sensor. The force sensor is used for both measuring the applied force during microindentation or micro hardness testing and for imaging before and after the testing to achieve an atomic force microscope type image of the surface topography before and after indentation testing.

Claims

1. In a scanned probe microscope apparatus having a probe and a scanning head operably arranged for measuring surface properties of a sample, the apparatus improvement comprising:

a high precision capacitance sensor having a pick-up plate movably mounted relative to a drive plate;

means for transmitting force between an object remote from the pick-up plate and the pick-up plate; and

means responsive to the position of the pick-up plate relative to the drive plate for providing an output signal proportional to the relative position.

2. The apparatus of claim 1, wherein the means for transmitting force between an object remote from the pick-up plate and the pick-up plate includes the pick-up plate mechanically linked to the probe.

3. The apparatus of claim 1, wherein the means responsive to the position of the pick-up plate relative to the drive plate includes means for utilizing said output signal to control a vertical movement of the scanning head relative to the sample.

4. The apparatus of claim 3, wherein the vertical movement of the scanning head relative to the sample is controlled to maintain a constant force on the sample as the surface property is measured.

5. The apparatus of claim 1, wherein the means responsive to the position of the pick-up plate relative to the drive plate includes means for applying an AC signal to the drive plate.

6. The apparatus of claim 1, wherein the means responsive to the position of the pick-up plate relative to the drive plate synchronously demodulates the output signal to produce a DC signal proportional to the displacement of the pick-up plate.

7. In a scanned probe microscope apparatus having a probe and a scanning head arranged for operative engagement of the surface of a sample for measuring a surface property thereof, the apparatus improvement comprising:

a force sensor operatively located to measure the surface property, the force sensor having an output signal representative of the measured surface property, wherein the force sensor includes;

a pair of capacitive transducers, each transducer including a separate drive plate and a shared pick-up plate movably suspended between the drive plates, wherein said pick-up plate is capable of deflection between each of the drive plates; and

means for transmitting force from a point remote from the pick-up plate to the pick-up plate.

8. The apparatus of claim 7, further comprising means for measuring the output signal of the force sensor and utilizing the output signal to control a vertical movement of the scanning head.

9. The apparatus of claim 8, wherein the vertical movement of the scanning head is controlled to maintain a constant force on the sample as the surface topography is measured.

10. The apparatus of claim 8, further comprising means for applying a downward force to said probe, wherein said force sensor measures the force and the means for measuring the output signal of the force sensor converts the output signal to a signal representative of the force during an indentation test.

11. The apparatus of claim 7, further comprising means responsive to the output signal for controlling the movement of the scanning head.

12. The apparatus of claim 11, wherein the movement of the scanning head is controlled in a vertical direction.

13. The apparatus of claim 12, wherein the means responsive to the output signal further controls the movement of the scanning head in a two-dimensional horizontal direction.

14. The apparatus of claim 13, wherein the means for controlling movement of the scanning head provides an output signal to an image display, wherein the image display provides an image representative of the surface property being measured.

15. The apparatus of claim 7, further comprising means responsive to the output signal for providing an image representative of the surface topography.

16. In a high resolution sensor apparatus for use with a scanned-probe microscope having a probe and a scanning head operably arranged for measuring surface properties of a sample, the apparatus improvement comprising:

a. a sensor element, said sensor element including,

1. a pair of capacitive transducers, each transducer including a separate drive plate, and a shared pickup plate, said pickup plate positioned between said separate drive plates, said drive plates having spaced opposing conductive surfaces when said pickup plate is mounted therebetween, said pickup plate further comprising a conductive central plate suspended by spring means between said drive plates, wherein said central plate is capable of deflection between the conductive surfaces of each of said drive plates;

2. means for mechanically transmitting force from a point remote from said central plate to said central plate; and

b. means for providing an output signal representative of the surface property being measured, including means for applying an alternating current carrier signal to said pair of drive plates, wherein the signal to one of said drive plates is 180 degrees out of phase with the signal to the other of said drive plates.

17. The apparatus of claim 16, further comprising means for measuring the output signal of the sensor element and utilizing the output signal to control a vertical movement of the scanning head.

18. The apparatus of claim 17, wherein the vertical movement of the scanning head is controlled to maintain a constant force on the sample as the surface topography is measured.

19. The apparatus of claim 16, further comprising means for applying a downward force to said probe, wherein said sensor element measures the force and the means for measuring the output signal of the sensor element converts the output signal to a signal representative of the force during an indentation test.

20. The apparatus of claim 16, further comprising means responsive to the output signal for controlling the movement of the scanning head.

21. The apparatus of claim 20, wherein the movement of the scanning head is controlled in a vertical direction.

22. The apparatus of claim 21, wherein the means responsive to the output signal further controls the movement of the scanning head in a two-dimensional horizontal direction.

23. The apparatus of claim 22, wherein the means for controlling movement of the scanning head provides an output signal to an image display, wherein the image display provides an image representative of the surface property being measured.

24. The apparatus of claim 16, further comprising means responsive to the output signal for providing an image representative of the surface topography.