Post-CMP cleaner apparatus and method

• US 6,026,830 A
• Filed: 03/29/1999
• Issued: 02/22/2000
• Est. Priority Date: 03/28/1997
• Status: Expired due to Term

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Huang, Ying-Shih
• Primary Examiner(s): Stinson, Frankie L.
• Application Number:
  US09/282,064
• Time in Patent Office: 330 Days
• Field of Search: 134/95.2, 134/61, 134/66, 134/902, 134/157, 134/153, 134/155, 134/186
• US Class Current: 134/66
• CPC Class Codes: B08B 3/08 the liquid having chemical or dissolving effect substances used, see the relevant classes
• CPC Class Codes: H01L 21/02074 the processing being a planarization of conductive layers
• CPC Class Codes: H01L 21/67057 with the semiconductor substrates being dipped in baths or vessels
• CPC Class Codes: Y10S 134/902 Semiconductor wafer

Abstract

An improved and new apparatus and method for post chemical-mechanical planarization (CMP) cleaning has been developed. Use of a QDR (Quick Dump Rinse) DI water bath for receiving a cassette of semiconductor substrates from a previous CMP processing station, for keeping the semiconductor substrates submerged in DI water following CMP and before transmission to a next processing station and for performing at least one rinsing and dumping operation on the semiconductor substrates in flowing DI water greatly enhances the manufacturing throughput of the process, reduces the use of chemicals, and simplifies the tool requirements for the post-CMP cleaning process.

Claims

1. A post-CMP (Chemical-Mechanical Polishing) semiconductor substrate cleaning apparatus including a plurality of stations, comprising:

a first QDR (Quick Dump Rinse) DI water bath for receiving a cassette of semiconductor substrates from a previous CMP processing station, for keeping said semiconductor substrates submerged in DI water following CMP and before transmission to a next processing station and for performing at least one rinsing and dumping operation on said semiconductor substrates in flowing DI water;

a loader mechanism for transferring said semiconductor substrates from the cassette to a single substrate processing chuck;

a chuck clean bath for cleaning the single substrate processing chuck;

a chemical bath for receiving semiconductor substrates;

a second QDR (Quick Dump Rinse) DI water bath for receiving semiconductor substrates from said chemical bath and for performing at least one rinsing and dumping operation on said semiconductor substrates in flowing DI water;

a semiconductor substrate dryer; and

an unloader mechanisim for transferring said semiconductor substrates from the single substrate processing chuck to a cassette.

2. The apparatus of claim 1, wherein said first QDR (Quick Dump Rinse) DI water bath receives a cassette of semiconductor substrates from a previous CMP processing station, said semiconductor substrates having CMP process contaminants thereon.

3. The apparatus of claim 2, wherein said first QDR (Quick Dump Rinse) DI water bath is used to remove the CMP process contaminants from said semiconductor substrates.

4. The apparatus of claim 1, wherein said chuck clean bath comprises DI water at a temperature between about 22 and 80°

C.

5. The apparatus of claim 1, wherein said chemical bath comprises a solution of APM (Ammonia Peroxide Mixture) containing NH₄ OH, H₂ O₂ and DI water, having a concentration between about 0.2:

1;

5 and 1;

1;

5, at a temperature between about 22 and 80°

C.

6. The apparatus of claim 1, wherein said chemical bath comprises a solution of DHF (Diluted HF), having a concentration between about 0.2% and 1.0%, at a temperature between about 22 and 80°

C.

7. The apparatus of claim 1, where said chemical bath includes a means of applying ultrasonic agitation to said semiconductor substrates during submersion of the semiconductor substrates in the chemical bath.

8. The apparatus of claim 1, wherein said semiconductor substrate dryer comprises a spin dryer mechanism.

9. The apparatus of claim 1, wherein said semiconductor substrate dryer comprises an IPA (Isopropyl alcohol) vapor dryer means.