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Method for manufacturing multi-layered high-deformation piezoelectric actuators and sensors

  • US 6,030,480 A
  • Filed: 07/21/1998
  • Issued: 02/29/2000
  • Est. Priority Date: 07/25/1997
  • Status: Expired due to Term
First Claim
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1. A method of manufacturing a multilayered high deformation piezoelectric actuator, comprising the steps of:

  • selecting a first piezoelectric ceramic layer, a first metal prestress layer and a second metal prestress layer, said first piezoelectric ceramic layer and said first metal prestress layer and said second metal prestress layer each having two major surfaces, wherein said second metal prestress layer has a dimension that is larger than the other layers;

    placing in order in a press said first metal prestress layer, a first adhesive layer, said first piezoelectric ceramic layer, a second adhesive layer and said second metal prestress layer so as to form a stack comprising said first metal prestress layer, said first adhesive layer, said first piezoelectric ceramic layer, said second adhesive layer and said second metal prestress layer;

    applying pressure to said stack with said press in a direction perpendicular to each of said major surfaces;

    heating said stack to a temperature above a melting point of each of said adhesive layers and below a Curie temperature of said first piezoelectric ceramic layer;

    maintaining a temperature of said stack above a melting point of each of said adhesive layers and below a Curie temperature of said first piezoelectric ceramic layer until each of said adhesive layers has melted;

    after said step of maintaining the temperature of said stack, decreasing the temperature of said stack to below a melting point of each of said adhesive layers;

    after said step of decreasing the temperature of said stack, releasing said pressure;

    and, after said step of releasing said pressure, cooling said stack to room temperature;

    wherein said step of placing in order in a press said first metal prestress layer, a first adhesive layer, said first piezoelectric ceramic layer, a second adhesive layer and said second metal prestress layer comprises placing a first portion of said stack into a first recess within a first rigid press member and placing a second portion of said stack into a second recess within a said second rigid press member;

    and wherein said second recess is configured to accommodate the difference in dimensions between said second metal prestress layer and said other layers.

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