Method for producing tapered waveguide

• US 6,030,540 A
• Filed: 07/28/1997
• Issued: 02/29/2000
• Est. Priority Date: 07/29/1996
• Status: Expired due to Term

• Current Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Original Assignee: Sharp Kabushiki Kaisha (Hon Hai Precision Industry Co., Ltd.)
• Inventors: Yamamoto, Hiroyuki, Yoshida, Yoshio, Kurata, Yukio
• Primary Examiner(s): Gulakowski, Randy
• Assistant Examiner(s): Ahmed, Shamim
• Application Number:
  US08/900,164
• Time in Patent Office: 946 Days
• Field of Search: 216/24, 216/41, 216/47, 385/131, 385/132
• US Class Current: 216/47
• CPC Class Codes: G02B 2006/12173 Masking
• CPC Class Codes: G02B 2006/12176 Etching
• CPC Class Codes: G02B 2006/12195 Tapering
• CPC Class Codes: G02B 6/122 Basic optical elements, e.g. light-guiding paths
• CPC Class Codes: G02B 6/1228 Tapered waveguides, e.g. integrated spot-size transformers for coupling with fibres G02B6/305
• CPC Class Codes: G02B 6/136 by etching

Abstract

A method for producing a tapered waveguide is produced using an undercut-type shadow mask having an overhanging part. The shadow mask includes a photoresist layer having the overhanging part and a metal layer for supporting the photoresist layer on a substrate. After the shadow mask is provided on the substrate, film-forming particles are caused to jump from above the shadow mask toward the substrate, thereby forming a dielectric film having a tapered part on the substrate. Then, the shadow mask is removed together with the film-forming particles thereon by lift-off. Then, an optical waveguide is formed on the substrate so as to cover the dielectric film having the tapered part. The thickness of the metal layer is preferably in the range of about 0.1 to 10 μm and more preferably about 1 μm.

Claims

1. A method for producing a tapered waveguide, comprising the steps of:

forming an undercut shadow mask having an overhanging part on a substrate;

causing film-forming particles to jump from above the shadow mask toward the substrate, thereby forming a dielectric film having a tapered part on the substrate;

removing the shadow mask together with the film-forming particles thereon by lift-off; and

forming an optical waveguide layer on the substrate so as to cover the dielectric film having the tapered part,

wherein the undercut shadow mask includes a photoresist layer having an overhanging part and a metal layer having a thickness of in the range of about 0.1 to 10 μ

m for supporting the photoresist layer above the substrate.

2. A method for producing a tapered waveguide according to claim 1, wherein the metal layer has a thickness of about 1 μ

m.

3. A method for producing a tapered waveguide according to claim 1, wherein the photoresist layer has a thickness of in the range of 0.5 to 50 μ

m.

4. A method for producing a tapered waveguide according to claim 3, wherein the photoresist layer has a thickness of about 10 μ

m.

5. A method for producing a tapered waveguide according to claim 1, further comprising the step of thermally deforming the photoresist layer to reduce the thickness of a tip of the overhanging part and to slowly curve a top part of the overhanging part.

6. A method for producing a tapered waveguide according to claim 1, wherein the step of forming the shadow mask includes the steps of:

forming the metal layer on the substrate;

forming the photoresist layer having the overhanging part on the metal layer; and

etching the metal layer by an etchant formed of one of an acid and a mixture of an acid, using the photoresist layer as a mask.

7. A method for producing a tapered waveguide according to claim 1, wherein the metal layer is formed of aluminum.

8. A method for producing a tapered waveguide according to claim 7, wherein the metal layer is formed of aluminum and the etchant is formed on a material mainly containing phosphoric acid.

9. A method for producing a tapered waveguide according to claim 1, wherein the step of forming the dielectric film includes the steps of:

placing the substrate having the shadow mask thereabove on a movable sample table; and

causing the film-forming particles to jump toward the sample table while moving the sample table so as to cause the film-forming particles to jump toward the substrate in random directions.

10. A method for producing a tapered waveguide, comprising the steps of:

forming a metal layer on a substrate;

forming a patterned photoresist layer on the metal layer;

etching the metal layer by an etchant formed of one of an acid and a mixture of an acid, using the photoresist layer as a mask, thereby forming an undercut shadow mask having an overhanging part on the substrate;

causing film-forming particles to jump from above the shadow mask toward the substrate, thereby forming a dielectric film having a tapered part on the substrate;

removing the shadow mask together with film-forming particles thereon by lift-off; and

forming an optical waveguide layer on the substrate so as to cover the dielectric film having the tapered portion.