Multilayer antireflection coatings for grazing ultraviolet incident light

• US 6,030,717 A
• Filed: 01/22/1998
• Issued: 02/29/2000
• Est. Priority Date: 01/23/1997
• Status: Expired due to Term

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Shirai, Takeshi, Nakamura, Hiroshi
• Primary Examiner(s): RAIMUND, CHRISTOPHER W
• Application Number:
  US09/012,125
• Time in Patent Office: 768 Days
• Field of Search: 428/699, 428/432, 428/913, 359/586, 427/164, 427/166
• US Class Current: 428/699
• CPC Class Codes: C03C 17/3452 comprising a fluoride
• CPC Class Codes: G02B 1/115 Multilayers
• CPC Class Codes: G02B 5/3025 Polarisers, i.e. arrangements capable of producing a definite output polarisation state from an unpolarised input state G02B5/3008, G02B5/3016 take precedence
• CPC Class Codes: Y10S 428/913 Material designed to be responsive to temperature, light, moisture

Abstract

Multilayer antireflection coatings are disclosed for grazing incident ultraviolet light having a large angle of incidence. The coatings comprise, from the medium side, layers of high-refractive-index material alternating with layers of low-refractive-index material. Each layer of the high-refractive-index material has the same optical thickness, and each layer of the low-refractive-index material has the same optical thickness. The multilayer antireflection coatings are effective in preventing reflection of p-polarized light, from optical elements coated with such a coating, having a wavelength of 150 nm≦λ≦250 nm in a range of angle of incidence of 70°≦θ≦80°.

Claims

1. A multilayer antireflection coating, comprising, from the medium side, multiple stacked layers of high-refractive-index material and low-refractive-index material arranged alternatingly in a sequentially stacked manner, each alternating layer of the high-refractive-index material having the same optical thickness, and each alternating layer of the low-refractive-index layer having the same optical thickness, the multilayer antireflection coating inhibiting reflection therefrom of incident p-polarized light having a wavelength λ

such that 150 nm≦

λ

≦

250 nm incident on the multilayer antireflection coating at an angle of incidence θ

such that 70°

≦

θ

≦

80°

.

2. The multilayer antireflection coating of claim 1, wherein:

each of the high-refractive-index layers and each of the low-refractive-index layers has a respective optical thickness, the antireflection coating having an optical period length nd, representing a sum of the optical thickness of the high-refractive-index layer and the optical thickness of the low-refractive-index layer, is within a range 0.6λ

₀ ≦

nd≦

0.65λ

₀, wherein λ

₀ is the wavelength of light incident to the antireflection coating; and

the optical thickness of the high-refractive-index layer and the optical period exhibit a ratio Γ

that is within a range 0.38≦

Γ

≦

0.73.

3. The multilayer antireflection coating of claim 2, wherein:

the high-refractive-index material comprises a substance selected from the group consisting of lanthanum fluoride (LaF₃), gadolinium fluoride (GdF₃), neodymium fluoride (NdF₃), dysprosium fluoride (DyF₃), yttrium fluoride (YF₃), and mixtures and compounds of such compounds; and

the low-refractive-index material comprises a substance selected from the group consisting of aluminum fluoride (AlF₃), magnesium fluoride (MgF₂), calcium fluoride (CaF₂), sodium fluoride (NaF), cryolite (Na₃ AlF₆), thiolite (Na₅ Al₃ F₁₄), and mixtures and compounds of such compounds.

4. The multilayer antireflection coating of claim 2, having a total number N of layers within a range of 5≦

N≦

17.

5. The multilayer antireflection coating of claim 4, wherein:

the high-refractive-index material comprises a substance selected from the group consisting of lanthanum fluoride (LaF₃), gadolinium fluoride (GdF₃), neodymium fluoride (NdF₃), dysprosium fluoride (DyF₃), yttrium fluoride (YF₃), and mixtures and compounds of such compounds; and

the low-refractive-index material comprises a substance selected from the group consisting of aluminum fluoride (AlF₃), magnesium fluoride (MgF₂), calcium fluoride (CaF₂), sodium fluoride (NaF), cryolite (Na₃ AlF₆), thiolite (Na₅ Al₃ F₁₄), and mixtures and compounds of such compounds.

6. The multilayer antireflection coating of claim 1, having a total number N of layers within a range 5≦

N≦

17.

7. The multilayer antireflection coating of claim 6, wherein:

the high-refractive-index material comprises a substance selected from the group consisting of lanthanum fluoride (LaF₃), gadolinium fluoride (GdF₃), neodymium fluoride (NdF₃), dysprosium fluoride (DyF₃), yttrium fluoride (YF₃), and mixtures and compounds of such compounds; and

the low-refractive-index material comprises a substance selected from the group consisting of aluminum fluoride (AlF₃), magnesium fluoride (MgF₂), calcium fluoride (CaF₂), sodium fluoride (NaF), cryolite (Na₃ AlF₆), thiolite (Na₅ Al₃ F₁₄), and mixtures and compounds of such compounds.

8. The multilayer antireflection coating of claim 1, wherein:

the high-refractive-index material comprises a substance selected from the group consisting of lanthanum fluoride (LaF₃), gadolinium fluoride (GdF₃), neodymium fluoride (NdF₃), dysprosium fluoride (DyF₃), yttrium fluoride (YF₃), and mixtures and compounds of such compounds; and

the low-refractive-index material comprises a substance selected from the group consisting of aluminum fluoride (AlF₃), magnesium fluoride (MgF₂), calcium fluoride (CaF₂), sodium fluoride (NaF), cryolite (Na₃ AlF₆), thiolite (Na₅ Al₃ F₁₄), and mixtures and compounds of such compounds.

9. An optical element, comprising:

(a) a substrate transmissive to light having a wavelength λ

, wherein 150 nm≦

λ

≦

250 nm; and

(b) an antireflective coating according to claim 1 on at least one surface of the substrate.

10. The optical element of claim 9, wherein the substrate is selected from a group consisting of silica glass, calcium fluoride, and magnesium fluoride.

11. The optical element of claim 9, wherein the layer closest to the medium side is a high-refractive-index layer.

12. A method for reducing reflection of grazing incident p-polarized ultraviolet light from a surface, the method comprising the steps:

(a) applying to the surface first and second stacked layers, the first layer being a high-refractive-index layer and the second layer being a low-refractive-index layer; and

(b) applying to the first and second layers additional high-refractive-index layers and low-refractive-index layers in an alternating manner to produce a multilayer antireflection coating on the substrate, the antireflection coating having a total number N of layers within a range of 5≦

N≦

17, each alternating high-refractive-index layer having the same optical thickness, and each alternating low-refractive-index layer having the same optical thickness.

13. The method of claim 12, wherein N is even and the second layer contacts the surface of the substrate.

14. The method of claim 12, wherein N is odd and the first layer contacts the surface of the substrate.

15. The method of claim 12, wherein, in step (b), the antireflection coating is formed to have an optical period nd, representing a sum of the optical thickness of any of the high-refractive-index layers and the optical thickness of any of the low-refractive-index layers, the optical period being within a range of 0.6λ

₀ ≦

nd≦

0.65λ

₀, wherein λ

₀ is the wavelength of light to be incident to the antireflection coating; and

the optical thickness of the high-refractive-index layer and the optical period exhibit a ratio Γ

that is within a range of 0.38≦

Γ

≦

0.73.

16. The method of claim 14, wherein the high-refractive-index layers comprise a substance selected from the group consisting of lanthanum fluoride (LaF₃), gadolinium fluoride (GdF₃), neodymium fluoride (NdF₃), dysprosium fluoride (DyF₃), yttrium fluoride (YF₃), and mixtures and compounds of such compounds;

and

the low-refractive-index layers comprise a substance selected from the group consisting of aluminum fluoride (AlF₃), magnesium fluoride (MgF₂), calcium fluoride (CaF₂), sodium fluoride (NaF), cryolite (Na₃ AlF₆), thiolite (Na₅ Al₃ F₁₄), and mixtures and compounds of such compounds.