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Multilayer antireflection coatings for grazing ultraviolet incident light

  • US 6,030,717 A
  • Filed: 01/22/1998
  • Issued: 02/29/2000
  • Est. Priority Date: 01/23/1997
  • Status: Expired due to Term
First Claim
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1. A multilayer antireflection coating, comprising, from the medium side, multiple stacked layers of high-refractive-index material and low-refractive-index material arranged alternatingly in a sequentially stacked manner, each alternating layer of the high-refractive-index material having the same optical thickness, and each alternating layer of the low-refractive-index layer having the same optical thickness, the multilayer antireflection coating inhibiting reflection therefrom of incident p-polarized light having a wavelength λ

  • such that 150 nm≦

    λ



    250 nm incident on the multilayer antireflection coating at an angle of incidence θ

    such that 70°



    θ



    80°

    .

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