Microfabricated aperture-based sensor
First Claim
Patent Images
1. A microfabricated device for detecting an analyte molecule in a co-reactant-containing sample comprising(a) a transducing element;
- (b) a first layer contacting the surface of said transducing element, said first layer comprising a support matrix containing at least one catalyst capable of catalyzing the conversion of said analyte and co-reactant into a reaction product detectable by said transducing element;
(c) a second layer in contact with said first layer, second layer permitting transport of said analyte molecule and co-reactant; and
(d) a third layer covering said first and second layers, said third layer being permeable to co-reactant but substantially impermeable to said analyte molecule and containing at least one microfabricated aperture extending there through, which permits transport of said analyte to said first layer.
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Abstract
A chemical sensor includes an enzyme layer, a diffusion layer and an analyte barrier layer positioned over the diffusion layer. Apertures are formed by microfabrication in the analyte barrier layer to allow controlled analyte flux to the diffusion layer.
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Citations
49 Claims
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1. A microfabricated device for detecting an analyte molecule in a co-reactant-containing sample comprising
(a) a transducing element; -
(b) a first layer contacting the surface of said transducing element, said first layer comprising a support matrix containing at least one catalyst capable of catalyzing the conversion of said analyte and co-reactant into a reaction product detectable by said transducing element; (c) a second layer in contact with said first layer, second layer permitting transport of said analyte molecule and co-reactant; and (d) a third layer covering said first and second layers, said third layer being permeable to co-reactant but substantially impermeable to said analyte molecule and containing at least one microfabricated aperture extending there through, which permits transport of said analyte to said first layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37)
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38. A process for manufacturing a planar microfabricated device for detecting an analyte molecule in an oxygen-containing liquid sample comprising:
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microfabricating a transducing element on a planar surface; microfabricating a first layer above said transducing element comprising an enzyme and support matrix, said enzyme capable of converting said analyte and oxygen in a manner detectable at said transducing element; microfabricating a second layer above said first layer that is permeable to both the analyte molecule and oxygen; establishing a third layer above said first layer comprising a polymer that is permeable to oxygen, but impermeable to said analyte; establishing a photoformable layer over said third layer; exposing said photoformable layer through a mask, said mask containing a pattern for forming one or more apertures of controlled geometry at predetermined locations in said photoformable layer; developing said pattern; contacting said photoformed layer with an etchant capable of etching through said third layer to produce a third layer containing one or more microfabricated apertures of controlled geometry at predetermined locations capable of permitting transport of said analyte to said first layer. - View Dependent Claims (39, 40, 41, 42, 43)
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44. A process for manufacturing a planar microfabricated device for detecting an analyte molecule in an oxygen-containing liquid sample comprising:
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microfabricating a transducing element on a planar surface; microfabricating a first layer above said transducing element comprising an enzyme and support matrix, said enzyme capable of converting said analyte and oxygen in a manner detectable at said transducing element; microfabricating a second layer above said first layer that is permeable to both the analyte molecule and oxygen; establishing a third layer which is photoformable above said first layer that is permeable to oxygen, but impermeable to said analyte; exposing said photoformable layer through a mask, said mask containing a pattern for forming one or more apertures of controlled geometry at predetermined locations; developing said pattern to produce a third layer containing one or more microfabricated apertures of controlled geometry at predetermined locations capable of permitting transport of said analyte to said first layer. - View Dependent Claims (45, 46, 47, 48, 49)
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Specification