Apparatus and method for defect testing of integrated circuits
First Claim
1. An apparatus for defect or failure-mechanism testing of an integrated circuit (IC), comprising:
- (a) a source connected to a power supply terminal of the IC to provide an operating voltage thereto;
(b) means connected to a plurality of input pins of the IC for providing a vector set of voltage inputs to the IC for toggling the IC between logic states thereof; and
(c) means connected to the power supply terminal of the IC for measuring a transient voltage component (VDDT) generated in response to the toggling of the IC between logic states thereof, with the transient voltage component providing an indication of any defects or failure-mechanisms present within the IC.
2 Assignments
0 Petitions
Accused Products
Abstract
An apparatus and method for defect and failure-mechanism testing of integrated circuits (ICs) is disclosed. The apparatus provides an operating voltage, VDD, to an IC under test and measures a transient voltage component, VDDT, signal that is produced in response to switching transients that occur as test vectors are provided as inputs to the IC. The amplitude or time delay of the VDDT signal can be used to distinguish between defective and defect-free (i.e. known good) ICs. The VDDT signal is measured with a transient digitizer, a digital oscilloscope, or with an IC tester that is also used to input the test vectors to the IC. The present invention has applications for IC process development, for the testing of ICs during manufacture, and for qualifying ICs for reliability.
-
Citations
45 Claims
-
1. An apparatus for defect or failure-mechanism testing of an integrated circuit (IC), comprising:
-
(a) a source connected to a power supply terminal of the IC to provide an operating voltage thereto; (b) means connected to a plurality of input pins of the IC for providing a vector set of voltage inputs to the IC for toggling the IC between logic states thereof; and (c) means connected to the power supply terminal of the IC for measuring a transient voltage component (VDDT) generated in response to the toggling of the IC between logic states thereof, with the transient voltage component providing an indication of any defects or failure-mechanisms present within the IC. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15)
-
-
16. A method for testing an integrated circuit (IC) and locating any defects or failure-mechanisms therein, comprising steps for:
-
(a) providing an operating voltage (VDD) to the IC; (b) toggling the IC between logic states thereof by providing a vector set of voltage inputs to input pins of the IC; (c) measuring a transient voltage component (VDDT) of the operating voltage generated in response to toggling of the IC between logic states thereof; and (d) identifying ICs having defects or failure-mechanisms therein by determining whether the transient voltage component (VDDT) exceeds a known value. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
-
-
30. A method for testing an integrated circuit (IC) and locating any defects or failure-mechanisms therein, comprising steps for:
-
(a) providing an operating voltage (VDD) to the IC; (b) toggling the IC between logic states thereof by providing a vector set of voltage inputs to input pins of the IC; (c) measuring a time delay in a transient voltage component (VDDT) of the operating voltage generated in response to toggling of the IC between logic states thereof; and (d) identifying ICs having defects or failure-mechanisms therein by determining whether the time delay exceeds a known value of time delay. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45)
-
Specification