Transformer for integrated circuits

• US 6,031,445 A
• Filed: 11/25/1998
• Issued: 02/29/2000
• Est. Priority Date: 11/28/1997
• Status: Expired due to Term

• Current Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Original Assignee: STMicroelectronics SA (STMicroelectronics NV)
• Inventors: Marty, Michel, Jaouen, Herve
• Primary Examiner(s): Donovan, Lincoln
• Assistant Examiner(s): Nguyen, TuYen T.
• Application Number:
  US09/199,837
• Time in Patent Office: 461 Days
• Field of Search: 336/200, 336/232, 336/223, 336/225, 29/602.1, 257/531
• US Class Current: 336/200
• CPC Class Codes: H01F 2017/0086 on semiconductor substrate inductors for integrated circuits H01L28/10
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01F 41/041 Printed circuit coils apparatus or processes for manufacturing printed circuits in general H05K3/00
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: Y10T 29/4902 Electromagnet, transformer or inductor

Abstract

A invention provides a transformer for use in integrated circuits, comprising four layers of conductive lines, separated from each other by first, second and third insulating layers. First conductive vias traverse the second insulating layer to connect said second and third pluralities of conducting lines, to form a first winding. Second conductive vias traverse the first, second and third insulating layers to connect said first and fourth pluralities of conducting lines to form a second winding, about and approximately concentric with said first winding.

Claims

1. In an integrated circuit comprising a substrate with a horizontal upper surface, a transformer characterized in that it comprises:

a first plurality of conductive lines arranged in a first layer on the upper surface of the substrate;

a second plurality of conductive lines arranged in a second layer, vertically separated from the first plurality of conductive lines by a first insulating layer;

a third plurality of conductive lines arranged in a third layer, vertically separated from the second plurality of conductive lines by a second insulating layer;

a fourth plurality of conductive lines arranged in a fourth layer, vertically separated from the third plurality of conductive lines by a third insulating layer;

first conductive vias extending through second insulating layer, connecting said second and third pluralities of conducting lines, whereby said second and third pluralities of conducting lines and said first conductive vias form a first winding; and

second conductive vias extending through first, second and third insulating layers, connecting said first and fourth pluralities of conducting lines, whereby said first and fourth pluralities of conducting lines and said second conductive vias form a second winding, about and approximately concentric with said first winding.

2. A transformer according to claim 1 wherein the axes of said first and second windings are substantially parallel to the upper surface of the substrate.

3. A transformer according to claim 1 wherein each of the fourth plurality of conductive lines is unitarily composed with at least part of underlying second conductive vias.

4. A transformer according to claim 1 wherein each of the third plurality of conductive lines is unitarily composed with underlying first conductive vias, such units being in direct electrical contact with underlying respective ones of the second plurality of conductive lines.

5. A transformer according to claim 1 wherein the second conductive vias comprise pads in second and third layers, each pad being unitarily composed with an underlying part of respective second conductive vias.

6. A transformer according to claim 1 wherein each of the fourth plurality of conductive lines is unitarily composed with underlying second conductive vias, such units being in direct electrical contact with underlying respective ones of the first plurality of conductive lines.

7. A transformer according to claim 1 wherein the conductive lines and the conductive vias are substantially composed of copper.

8. A transformer according to claim 1 wherein the conductive lines and the conductive vias are substantially composed of aluminum.

9. A transformer according to claim 7 or claim 8, wherein the conductive lines and the conductive vias further comprise a coating layer of titanium nitride, encapsulating the conductive lines and the conductive vias on all surfaces other than their upper surfaces.

10. A transformer according to claim 1 wherein each turn of each winding includes only two contact surfaces.

11. A method for forming transformers in integrated circuits, characterized in that it comprises the steps of:

a)--forming a first dielectric layer on an upper surface of a substrate;

b)--patterning the first dielectric layer with a motif to form cavities corresponding to a desired arrangement of first conductive lines;

c)--filling the cavities in the first dielectric layer to form a first plurality of conductive lines arranged in a first layer;

d)--depositing a first insulating layer;

e)--forming a second dielectric layer on the upper surface of the resulting structure;

f)--patterning the second dielectric layer with a motif to form cavities corresponding to a desired arrangement of second conductive lines;

g)--filling the cavities in the second dielectric layer to form a second plurality of conductive lines arranged in a second layer;

h)--depositing a second insulating layer;

i)--forming a third dielectric layer on the upper surface of the resulting structure;

j)--patterning the third dielectric layer with a motif to form cavities corresponding to a desired arrangement of third conductive lines;

k)--filling the cavities in the third dielectric layer to form a third plurality of conductive lines arranged in a third layer;

l)--depositing a third insulating layer;

m)--forming a fourth plurality of conductive lines arranged in a fourth layer;

n)--between steps (h) and (l), performing the steps of;

n1)--forming cavities in the second insulating layer according to a motif corresponding to required locations of first conductive vias;

n2)--filling the cavities in the second insulating layer with conductive material to form first conductive vias extending through second insulating layer, to electrically connect respective ones of second and third pluralities of conducting lines, to form a first winding; and

p)--between steps (d) and (m), performing the steps of;

p1)--forming cavities in the first, second and third insulating layers according to a motif corresponding to required locations of second conductive vias;

p2)--filling the cavities in the first, second, and third insulating layers with conductive material to form first conductive vias extending through first, second and third second insulating layers,

to electrically connect respective ones of first and fourth pluralities of conducting lines, so as to form a second winding about and approximately concentric with said first winding.

12. A method according to claim 11 wherein the step (m) comprises the steps of:

m1)--forming a fourth dielectric layer on an upper surface of a substrate;

m2)--patterning the fourth dielectric layer with a motif to form cavities corresponding to a desired arrangement of fourth conductive lines;

m3)--filling the cavities in the fourth dielectric layer to form the fourth plurality of conductive lines.

13. A method according to claim 11 wherein, in step (p1), the cavities are formed in first, second and third insulating layers in a single step.

14. A method according to claim 11 wherein, in step (p2), the filling of the cavities in first, second and third insulating layers is performed in a single step.

15. A method according to claim 11 wherein, in step (p2), the filling of the cavities in first, second and third insulating layers is performed within step (m3).

16. A method according to claim 11 wherein, in step (p1), the cavities are formed in second and third insulating layers in a single step.

17. A method according to claim 11 wherein, in step (p2), the filling of the cavities in second and third insulating layers is performed in a single step.

18. A method according to claim 17 wherein, in step (p2), the filling of the holes in second and third insulating layers is performed within step (m3).